8/29/2012	1:05:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	1:05:18 PM	Recipe started at 1:05 PM
8/29/2012	1:05:18 PM	Helium valve closed
8/29/2012	1:05:18 PM	H2 valve closed
8/29/2012	1:05:18 PM	BCl3 valve closed
8/29/2012	1:05:18 PM	PH3 valve closed
8/29/2012	1:05:18 PM	SiCl4 pre valve closed
8/29/2012	1:05:18 PM	SiCl4 post valve closed
8/29/2012	1:05:18 PM	Main Vac valve closed
8/29/2012	1:05:18 PM	Bypass valve closed
8/29/2012	1:05:18 PM	Bubbler valve closed
8/29/2012	1:05:18 PM	Helium MFC set to  0.000000
8/29/2012	1:05:18 PM	H2 MFC set to  0.000000
8/29/2012	1:05:18 PM	BCl3 MFC set to  0.000000
8/29/2012	1:05:18 PM	PH3 MFC set to  0.000000
8/29/2012	1:05:18 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:05:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:05:18 PM	Tube furnace set to 0
8/29/2012	1:05:21 PM	H2 valve closed
8/29/2012	1:05:21 PM	BCl3 valve closed
8/29/2012	1:05:21 PM	PH3 valve closed
8/29/2012	1:05:21 PM	SiCl4 pre valve closed
8/29/2012	1:05:21 PM	SiCl4 post valve closed
8/29/2012	1:05:21 PM	Main Vac valve closed
8/29/2012	1:05:21 PM	Bypass valve closed
8/29/2012	1:05:21 PM	Bubbler valve closed
8/29/2012	1:05:21 PM	Helium valve opened
8/29/2012	1:05:21 PM	Helium MFC set to  500.000000
8/29/2012	1:05:21 PM	H2 MFC set to  0.000000
8/29/2012	1:05:21 PM	BCl3 MFC set to  0.000000
8/29/2012	1:05:21 PM	PH3 MFC set to  0.000000
8/29/2012	1:05:21 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:05:21 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:05:21 PM	Tube furnace set to 0
8/29/2012	1:06:34 PM	Helium valve closed
8/29/2012	1:06:34 PM	H2 valve closed
8/29/2012	1:06:34 PM	BCl3 valve closed
8/29/2012	1:06:34 PM	PH3 valve closed
8/29/2012	1:06:34 PM	SiCl4 pre valve closed
8/29/2012	1:06:34 PM	SiCl4 post valve closed
8/29/2012	1:06:34 PM	Main Vac valve closed
8/29/2012	1:06:34 PM	Bypass valve closed
8/29/2012	1:06:34 PM	Bubbler valve closed
8/29/2012	1:06:34 PM	Helium MFC set to  0.000000
8/29/2012	1:06:34 PM	H2 MFC set to  0.000000
8/29/2012	1:06:34 PM	BCl3 MFC set to  0.000000
8/29/2012	1:06:34 PM	PH3 MFC set to  0.000000
8/29/2012	1:06:34 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:06:34 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:06:34 PM	Tube furnace set to 0
8/29/2012	1:06:35 PM	Run finished at 1:06 PM
8/29/2012	1:06:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	1:11:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	1:11:07 PM	Recipe started at 1:11 PM
8/29/2012	1:11:07 PM	Helium valve closed
8/29/2012	1:11:07 PM	H2 valve closed
8/29/2012	1:11:07 PM	BCl3 valve closed
8/29/2012	1:11:07 PM	PH3 valve closed
8/29/2012	1:11:07 PM	SiCl4 pre valve closed
8/29/2012	1:11:07 PM	SiCl4 post valve closed
8/29/2012	1:11:07 PM	Main Vac valve closed
8/29/2012	1:11:07 PM	Bubbler valve closed
8/29/2012	1:11:07 PM	Bypass valve opened
8/29/2012	1:11:07 PM	Helium MFC set to  0.000000
8/29/2012	1:11:07 PM	H2 MFC set to  0.000000
8/29/2012	1:11:07 PM	BCl3 MFC set to  0.000000
8/29/2012	1:11:07 PM	PH3 MFC set to  0.000000
8/29/2012	1:11:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:11:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:11:07 PM	Tube furnace set to 0
8/29/2012	1:12:28 PM	Helium valve closed
8/29/2012	1:12:28 PM	H2 valve closed
8/29/2012	1:12:28 PM	BCl3 valve closed
8/29/2012	1:12:28 PM	PH3 valve closed
8/29/2012	1:12:29 PM	SiCl4 pre valve closed
8/29/2012	1:12:29 PM	SiCl4 post valve closed
8/29/2012	1:12:29 PM	Main Vac valve closed
8/29/2012	1:12:29 PM	Bubbler valve closed
8/29/2012	1:12:29 PM	Bypass valve opened
8/29/2012	1:12:29 PM	Helium MFC set to  0.000000
8/29/2012	1:12:29 PM	H2 MFC set to  0.000000
8/29/2012	1:12:29 PM	BCl3 MFC set to  0.000000
8/29/2012	1:12:29 PM	PH3 MFC set to  0.000000
8/29/2012	1:12:29 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:12:29 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:12:29 PM	Tube furnace set to 0
8/29/2012	1:13:29 PM	Helium valve closed
8/29/2012	1:13:29 PM	H2 valve closed
8/29/2012	1:13:29 PM	BCl3 valve closed
8/29/2012	1:13:29 PM	PH3 valve closed
8/29/2012	1:13:29 PM	SiCl4 pre valve closed
8/29/2012	1:13:29 PM	SiCl4 post valve closed
8/29/2012	1:13:29 PM	Bypass valve closed
8/29/2012	1:13:29 PM	Bubbler valve closed
8/29/2012	1:13:29 PM	Main Vac valve opened
8/29/2012	1:13:29 PM	Helium MFC set to  0.000000
8/29/2012	1:13:29 PM	H2 MFC set to  0.000000
8/29/2012	1:13:29 PM	BCl3 MFC set to  0.000000
8/29/2012	1:13:29 PM	PH3 MFC set to  0.000000
8/29/2012	1:13:29 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:13:29 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:13:29 PM	Tube furnace set to 0
8/29/2012	1:13:30 PM	Run finished at 1:13 PM
8/29/2012	1:13:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	1:17:29 PM	Tube furnace set to 200
8/29/2012	1:18:23 PM	Main Vac valve closed
8/29/2012	1:18:29 PM	Main Vac valve opened
8/29/2012	1:28:55 PM	Tube furnace set to 0
8/29/2012	1:46:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	1:46:49 PM	Recipe started at 1:46 PM
8/29/2012	1:46:49 PM	Helium valve closed
8/29/2012	1:46:49 PM	H2 valve closed
8/29/2012	1:46:49 PM	BCl3 valve closed
8/29/2012	1:46:49 PM	PH3 valve closed
8/29/2012	1:46:49 PM	SiCl4 pre valve closed
8/29/2012	1:46:49 PM	SiCl4 post valve closed
8/29/2012	1:46:49 PM	Main Vac valve closed
8/29/2012	1:46:49 PM	Bypass valve closed
8/29/2012	1:46:49 PM	Bubbler valve closed
8/29/2012	1:46:49 PM	Helium MFC set to  0.000000
8/29/2012	1:46:49 PM	H2 MFC set to  0.000000
8/29/2012	1:46:49 PM	BCl3 MFC set to  0.000000
8/29/2012	1:46:49 PM	PH3 MFC set to  0.000000
8/29/2012	1:46:49 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:46:49 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:46:49 PM	Tube furnace set to 0
8/29/2012	1:46:52 PM	H2 valve closed
8/29/2012	1:46:52 PM	BCl3 valve closed
8/29/2012	1:46:52 PM	PH3 valve closed
8/29/2012	1:46:52 PM	SiCl4 pre valve closed
8/29/2012	1:46:52 PM	SiCl4 post valve closed
8/29/2012	1:46:52 PM	Main Vac valve closed
8/29/2012	1:46:52 PM	Bypass valve closed
8/29/2012	1:46:52 PM	Bubbler valve closed
8/29/2012	1:46:52 PM	Helium valve opened
8/29/2012	1:46:52 PM	Helium MFC set to  500.000000
8/29/2012	1:46:52 PM	H2 MFC set to  0.000000
8/29/2012	1:46:52 PM	BCl3 MFC set to  0.000000
8/29/2012	1:46:52 PM	PH3 MFC set to  0.000000
8/29/2012	1:46:52 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:46:52 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:46:52 PM	Tube furnace set to 0
8/29/2012	1:48:02 PM	Helium valve closed
8/29/2012	1:48:02 PM	H2 valve closed
8/29/2012	1:48:02 PM	BCl3 valve closed
8/29/2012	1:48:02 PM	PH3 valve closed
8/29/2012	1:48:02 PM	SiCl4 pre valve closed
8/29/2012	1:48:02 PM	SiCl4 post valve closed
8/29/2012	1:48:02 PM	Main Vac valve closed
8/29/2012	1:48:02 PM	Bypass valve closed
8/29/2012	1:48:02 PM	Bubbler valve closed
8/29/2012	1:48:02 PM	Helium MFC set to  0.000000
8/29/2012	1:48:02 PM	H2 MFC set to  0.000000
8/29/2012	1:48:02 PM	BCl3 MFC set to  0.000000
8/29/2012	1:48:02 PM	PH3 MFC set to  0.000000
8/29/2012	1:48:02 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:48:02 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:48:02 PM	Tube furnace set to 0
8/29/2012	1:48:03 PM	Run finished at 1:48 PM
8/29/2012	1:48:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	1:52:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	1:52:22 PM	Recipe started at 1:52 PM
8/29/2012	1:52:22 PM	Helium valve closed
8/29/2012	1:52:22 PM	H2 valve closed
8/29/2012	1:52:22 PM	BCl3 valve closed
8/29/2012	1:52:22 PM	PH3 valve closed
8/29/2012	1:52:22 PM	SiCl4 pre valve closed
8/29/2012	1:52:22 PM	SiCl4 post valve closed
8/29/2012	1:52:22 PM	Main Vac valve closed
8/29/2012	1:52:22 PM	Bubbler valve closed
8/29/2012	1:52:22 PM	Bypass valve opened
8/29/2012	1:52:22 PM	Helium MFC set to  0.000000
8/29/2012	1:52:22 PM	H2 MFC set to  0.000000
8/29/2012	1:52:22 PM	BCl3 MFC set to  0.000000
8/29/2012	1:52:22 PM	PH3 MFC set to  0.000000
8/29/2012	1:52:22 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:52:22 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:52:22 PM	Tube furnace set to 0
8/29/2012	1:53:38 PM	Helium valve closed
8/29/2012	1:53:38 PM	H2 valve closed
8/29/2012	1:53:38 PM	BCl3 valve closed
8/29/2012	1:53:38 PM	PH3 valve closed
8/29/2012	1:53:38 PM	SiCl4 pre valve closed
8/29/2012	1:53:38 PM	SiCl4 post valve closed
8/29/2012	1:53:38 PM	Main Vac valve closed
8/29/2012	1:53:38 PM	Bubbler valve closed
8/29/2012	1:53:38 PM	Bypass valve opened
8/29/2012	1:53:38 PM	Helium MFC set to  0.000000
8/29/2012	1:53:38 PM	H2 MFC set to  0.000000
8/29/2012	1:53:38 PM	BCl3 MFC set to  0.000000
8/29/2012	1:53:38 PM	PH3 MFC set to  0.000000
8/29/2012	1:53:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:53:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:53:38 PM	Tube furnace set to 0
8/29/2012	1:54:38 PM	Helium valve closed
8/29/2012	1:54:38 PM	H2 valve closed
8/29/2012	1:54:38 PM	BCl3 valve closed
8/29/2012	1:54:38 PM	PH3 valve closed
8/29/2012	1:54:38 PM	SiCl4 pre valve closed
8/29/2012	1:54:38 PM	SiCl4 post valve closed
8/29/2012	1:54:38 PM	Bypass valve closed
8/29/2012	1:54:38 PM	Bubbler valve closed
8/29/2012	1:54:38 PM	Main Vac valve opened
8/29/2012	1:54:38 PM	Helium MFC set to  0.000000
8/29/2012	1:54:38 PM	H2 MFC set to  0.000000
8/29/2012	1:54:38 PM	BCl3 MFC set to  0.000000
8/29/2012	1:54:38 PM	PH3 MFC set to  0.000000
8/29/2012	1:54:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:54:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:54:39 PM	Tube furnace set to 0
8/29/2012	1:54:40 PM	Run finished at 1:54 PM
8/29/2012	1:54:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	1:55:41 PM	Recipe started at 1:55 PM
8/29/2012	1:55:41 PM	Helium valve closed
8/29/2012	1:55:41 PM	H2 valve closed
8/29/2012	1:55:41 PM	BCl3 valve closed
8/29/2012	1:55:41 PM	PH3 valve closed
8/29/2012	1:55:41 PM	SiCl4 pre valve closed
8/29/2012	1:55:41 PM	SiCl4 post valve closed
8/29/2012	1:55:41 PM	Bypass valve closed
8/29/2012	1:55:41 PM	Bubbler valve closed
8/29/2012	1:55:41 PM	Main Vac valve opened
8/29/2012	1:55:41 PM	Helium MFC set to  0.000000
8/29/2012	1:55:41 PM	H2 MFC set to  0.000000
8/29/2012	1:55:41 PM	BCl3 MFC set to  0.000000
8/29/2012	1:55:41 PM	PH3 MFC set to  0.000000
8/29/2012	1:55:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:55:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:55:41 PM	Tube furnace set to 0
8/29/2012	1:56:11 PM	H2 valve closed
8/29/2012	1:56:11 PM	BCl3 valve closed
8/29/2012	1:56:11 PM	PH3 valve closed
8/29/2012	1:56:11 PM	SiCl4 pre valve closed
8/29/2012	1:56:11 PM	SiCl4 post valve closed
8/29/2012	1:56:11 PM	Bypass valve closed
8/29/2012	1:56:11 PM	Bubbler valve closed
8/29/2012	1:56:11 PM	Helium valve opened
8/29/2012	1:56:11 PM	Main Vac valve opened
8/29/2012	1:56:11 PM	Helium MFC set to  20.000000
8/29/2012	1:56:11 PM	H2 MFC set to  0.000000
8/29/2012	1:56:11 PM	BCl3 MFC set to  0.000000
8/29/2012	1:56:11 PM	PH3 MFC set to  0.000000
8/29/2012	1:56:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:56:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:56:11 PM	Tube furnace set to 0
8/29/2012	1:56:41 PM	Helium valve closed
8/29/2012	1:56:41 PM	H2 valve closed
8/29/2012	1:56:41 PM	BCl3 valve closed
8/29/2012	1:56:41 PM	PH3 valve closed
8/29/2012	1:56:41 PM	SiCl4 pre valve closed
8/29/2012	1:56:41 PM	SiCl4 post valve closed
8/29/2012	1:56:41 PM	Bypass valve closed
8/29/2012	1:56:41 PM	Bubbler valve closed
8/29/2012	1:56:41 PM	Main Vac valve opened
8/29/2012	1:56:41 PM	Helium MFC set to  0.000000
8/29/2012	1:56:41 PM	H2 MFC set to  0.000000
8/29/2012	1:56:41 PM	BCl3 MFC set to  0.000000
8/29/2012	1:56:41 PM	PH3 MFC set to  0.000000
8/29/2012	1:56:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:56:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:56:41 PM	Tube furnace set to 0
8/29/2012	1:57:11 PM	H2 valve closed
8/29/2012	1:57:11 PM	BCl3 valve closed
8/29/2012	1:57:11 PM	PH3 valve closed
8/29/2012	1:57:11 PM	SiCl4 pre valve closed
8/29/2012	1:57:11 PM	SiCl4 post valve closed
8/29/2012	1:57:11 PM	Bypass valve closed
8/29/2012	1:57:11 PM	Bubbler valve closed
8/29/2012	1:57:11 PM	Helium valve opened
8/29/2012	1:57:11 PM	Main Vac valve opened
8/29/2012	1:57:11 PM	Helium MFC set to  20.000000
8/29/2012	1:57:11 PM	H2 MFC set to  0.000000
8/29/2012	1:57:11 PM	BCl3 MFC set to  0.000000
8/29/2012	1:57:11 PM	PH3 MFC set to  0.000000
8/29/2012	1:57:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:57:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:57:12 PM	Tube furnace set to 0
8/29/2012	1:57:42 PM	Helium valve closed
8/29/2012	1:57:42 PM	H2 valve closed
8/29/2012	1:57:42 PM	BCl3 valve closed
8/29/2012	1:57:42 PM	PH3 valve closed
8/29/2012	1:57:42 PM	SiCl4 pre valve closed
8/29/2012	1:57:42 PM	SiCl4 post valve closed
8/29/2012	1:57:42 PM	Bypass valve closed
8/29/2012	1:57:42 PM	Bubbler valve closed
8/29/2012	1:57:42 PM	Main Vac valve opened
8/29/2012	1:57:42 PM	Helium MFC set to  0.000000
8/29/2012	1:57:42 PM	H2 MFC set to  0.000000
8/29/2012	1:57:42 PM	BCl3 MFC set to  0.000000
8/29/2012	1:57:42 PM	PH3 MFC set to  0.000000
8/29/2012	1:57:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:57:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:57:42 PM	Tube furnace set to 0
8/29/2012	1:58:12 PM	H2 valve closed
8/29/2012	1:58:12 PM	BCl3 valve closed
8/29/2012	1:58:12 PM	PH3 valve closed
8/29/2012	1:58:12 PM	SiCl4 pre valve closed
8/29/2012	1:58:12 PM	SiCl4 post valve closed
8/29/2012	1:58:12 PM	Bypass valve closed
8/29/2012	1:58:12 PM	Bubbler valve closed
8/29/2012	1:58:12 PM	Helium valve opened
8/29/2012	1:58:12 PM	Main Vac valve opened
8/29/2012	1:58:12 PM	Helium MFC set to  20.000000
8/29/2012	1:58:12 PM	H2 MFC set to  0.000000
8/29/2012	1:58:12 PM	BCl3 MFC set to  0.000000
8/29/2012	1:58:12 PM	PH3 MFC set to  0.000000
8/29/2012	1:58:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:58:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:58:12 PM	Tube furnace set to 0
8/29/2012	1:58:42 PM	Helium valve closed
8/29/2012	1:58:42 PM	H2 valve closed
8/29/2012	1:58:42 PM	BCl3 valve closed
8/29/2012	1:58:42 PM	PH3 valve closed
8/29/2012	1:58:42 PM	SiCl4 pre valve closed
8/29/2012	1:58:42 PM	SiCl4 post valve closed
8/29/2012	1:58:42 PM	Bypass valve closed
8/29/2012	1:58:42 PM	Bubbler valve closed
8/29/2012	1:58:42 PM	Main Vac valve opened
8/29/2012	1:58:42 PM	Helium MFC set to  0.000000
8/29/2012	1:58:42 PM	H2 MFC set to  0.000000
8/29/2012	1:58:42 PM	BCl3 MFC set to  0.000000
8/29/2012	1:58:42 PM	PH3 MFC set to  0.000000
8/29/2012	1:58:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:58:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:58:42 PM	Tube furnace set to 0
8/29/2012	1:59:12 PM	H2 valve closed
8/29/2012	1:59:12 PM	BCl3 valve closed
8/29/2012	1:59:12 PM	PH3 valve closed
8/29/2012	1:59:12 PM	SiCl4 pre valve closed
8/29/2012	1:59:12 PM	SiCl4 post valve closed
8/29/2012	1:59:12 PM	Bypass valve closed
8/29/2012	1:59:12 PM	Bubbler valve closed
8/29/2012	1:59:12 PM	Helium valve opened
8/29/2012	1:59:12 PM	Main Vac valve opened
8/29/2012	1:59:12 PM	Helium MFC set to  20.000000
8/29/2012	1:59:12 PM	H2 MFC set to  0.000000
8/29/2012	1:59:12 PM	BCl3 MFC set to  0.000000
8/29/2012	1:59:12 PM	PH3 MFC set to  0.000000
8/29/2012	1:59:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:59:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:59:13 PM	Tube furnace set to 0
8/29/2012	1:59:43 PM	Helium valve closed
8/29/2012	1:59:43 PM	H2 valve closed
8/29/2012	1:59:43 PM	BCl3 valve closed
8/29/2012	1:59:43 PM	PH3 valve closed
8/29/2012	1:59:43 PM	SiCl4 pre valve closed
8/29/2012	1:59:43 PM	SiCl4 post valve closed
8/29/2012	1:59:43 PM	Bypass valve closed
8/29/2012	1:59:43 PM	Bubbler valve closed
8/29/2012	1:59:43 PM	Main Vac valve opened
8/29/2012	1:59:43 PM	Helium MFC set to  0.000000
8/29/2012	1:59:43 PM	H2 MFC set to  0.000000
8/29/2012	1:59:43 PM	BCl3 MFC set to  0.000000
8/29/2012	1:59:43 PM	PH3 MFC set to  0.000000
8/29/2012	1:59:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	1:59:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	1:59:43 PM	Tube furnace set to 0
8/29/2012	2:00:13 PM	H2 valve closed
8/29/2012	2:00:13 PM	BCl3 valve closed
8/29/2012	2:00:13 PM	PH3 valve closed
8/29/2012	2:00:13 PM	SiCl4 pre valve closed
8/29/2012	2:00:13 PM	SiCl4 post valve closed
8/29/2012	2:00:13 PM	Bypass valve closed
8/29/2012	2:00:13 PM	Bubbler valve closed
8/29/2012	2:00:13 PM	Helium valve opened
8/29/2012	2:00:13 PM	Main Vac valve opened
8/29/2012	2:00:13 PM	Helium MFC set to  20.000000
8/29/2012	2:00:13 PM	H2 MFC set to  0.000000
8/29/2012	2:00:13 PM	BCl3 MFC set to  0.000000
8/29/2012	2:00:13 PM	PH3 MFC set to  0.000000
8/29/2012	2:00:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:00:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:00:13 PM	Tube furnace set to 0
8/29/2012	2:00:43 PM	Helium valve closed
8/29/2012	2:00:43 PM	H2 valve closed
8/29/2012	2:00:43 PM	BCl3 valve closed
8/29/2012	2:00:43 PM	PH3 valve closed
8/29/2012	2:00:43 PM	SiCl4 pre valve closed
8/29/2012	2:00:43 PM	SiCl4 post valve closed
8/29/2012	2:00:43 PM	Bypass valve closed
8/29/2012	2:00:43 PM	Bubbler valve closed
8/29/2012	2:00:43 PM	Main Vac valve opened
8/29/2012	2:00:43 PM	Helium MFC set to  0.000000
8/29/2012	2:00:43 PM	H2 MFC set to  0.000000
8/29/2012	2:00:43 PM	BCl3 MFC set to  0.000000
8/29/2012	2:00:43 PM	PH3 MFC set to  0.000000
8/29/2012	2:00:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:00:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:00:43 PM	Tube furnace set to 0
8/29/2012	2:01:13 PM	H2 valve closed
8/29/2012	2:01:13 PM	BCl3 valve closed
8/29/2012	2:01:13 PM	PH3 valve closed
8/29/2012	2:01:13 PM	SiCl4 pre valve closed
8/29/2012	2:01:13 PM	SiCl4 post valve closed
8/29/2012	2:01:13 PM	Bypass valve closed
8/29/2012	2:01:13 PM	Bubbler valve closed
8/29/2012	2:01:13 PM	Helium valve opened
8/29/2012	2:01:13 PM	Main Vac valve opened
8/29/2012	2:01:13 PM	Helium MFC set to  20.000000
8/29/2012	2:01:13 PM	H2 MFC set to  0.000000
8/29/2012	2:01:13 PM	BCl3 MFC set to  0.000000
8/29/2012	2:01:13 PM	PH3 MFC set to  0.000000
8/29/2012	2:01:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:01:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:01:13 PM	Tube furnace set to 0
8/29/2012	2:01:43 PM	Helium valve closed
8/29/2012	2:01:43 PM	H2 valve closed
8/29/2012	2:01:43 PM	BCl3 valve closed
8/29/2012	2:01:44 PM	PH3 valve closed
8/29/2012	2:01:44 PM	SiCl4 pre valve closed
8/29/2012	2:01:44 PM	SiCl4 post valve closed
8/29/2012	2:01:44 PM	Bypass valve closed
8/29/2012	2:01:44 PM	Bubbler valve closed
8/29/2012	2:01:44 PM	Main Vac valve opened
8/29/2012	2:01:44 PM	Helium MFC set to  0.000000
8/29/2012	2:01:44 PM	H2 MFC set to  0.000000
8/29/2012	2:01:44 PM	BCl3 MFC set to  0.000000
8/29/2012	2:01:44 PM	PH3 MFC set to  0.000000
8/29/2012	2:01:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:01:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:01:44 PM	Tube furnace set to 0
8/29/2012	2:02:14 PM	H2 valve closed
8/29/2012	2:02:14 PM	BCl3 valve closed
8/29/2012	2:02:14 PM	PH3 valve closed
8/29/2012	2:02:14 PM	SiCl4 pre valve closed
8/29/2012	2:02:14 PM	SiCl4 post valve closed
8/29/2012	2:02:14 PM	Bypass valve closed
8/29/2012	2:02:14 PM	Bubbler valve closed
8/29/2012	2:02:14 PM	Helium valve opened
8/29/2012	2:02:14 PM	Main Vac valve opened
8/29/2012	2:02:14 PM	Helium MFC set to  20.000000
8/29/2012	2:02:14 PM	H2 MFC set to  0.000000
8/29/2012	2:02:14 PM	BCl3 MFC set to  0.000000
8/29/2012	2:02:14 PM	PH3 MFC set to  0.000000
8/29/2012	2:02:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:02:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:02:14 PM	Tube furnace set to 0
8/29/2012	2:02:44 PM	Helium valve closed
8/29/2012	2:02:44 PM	H2 valve closed
8/29/2012	2:02:44 PM	BCl3 valve closed
8/29/2012	2:02:44 PM	PH3 valve closed
8/29/2012	2:02:44 PM	SiCl4 pre valve closed
8/29/2012	2:02:44 PM	SiCl4 post valve closed
8/29/2012	2:02:44 PM	Bypass valve closed
8/29/2012	2:02:44 PM	Bubbler valve closed
8/29/2012	2:02:44 PM	Main Vac valve opened
8/29/2012	2:02:44 PM	Helium MFC set to  0.000000
8/29/2012	2:02:44 PM	H2 MFC set to  0.000000
8/29/2012	2:02:44 PM	BCl3 MFC set to  0.000000
8/29/2012	2:02:44 PM	PH3 MFC set to  0.000000
8/29/2012	2:02:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:02:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:02:44 PM	Tube furnace set to 0
8/29/2012	2:03:14 PM	H2 valve closed
8/29/2012	2:03:14 PM	BCl3 valve closed
8/29/2012	2:03:14 PM	PH3 valve closed
8/29/2012	2:03:14 PM	SiCl4 pre valve closed
8/29/2012	2:03:14 PM	SiCl4 post valve closed
8/29/2012	2:03:14 PM	Bypass valve closed
8/29/2012	2:03:14 PM	Bubbler valve closed
8/29/2012	2:03:14 PM	Helium valve opened
8/29/2012	2:03:14 PM	Main Vac valve opened
8/29/2012	2:03:14 PM	Helium MFC set to  20.000000
8/29/2012	2:03:14 PM	H2 MFC set to  0.000000
8/29/2012	2:03:14 PM	BCl3 MFC set to  0.000000
8/29/2012	2:03:14 PM	PH3 MFC set to  0.000000
8/29/2012	2:03:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:03:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:03:14 PM	Tube furnace set to 0
8/29/2012	2:03:44 PM	Helium valve closed
8/29/2012	2:03:44 PM	H2 valve closed
8/29/2012	2:03:44 PM	BCl3 valve closed
8/29/2012	2:03:44 PM	PH3 valve closed
8/29/2012	2:03:44 PM	SiCl4 pre valve closed
8/29/2012	2:03:44 PM	SiCl4 post valve closed
8/29/2012	2:03:44 PM	Bypass valve closed
8/29/2012	2:03:44 PM	Bubbler valve closed
8/29/2012	2:03:44 PM	Main Vac valve opened
8/29/2012	2:03:44 PM	Helium MFC set to  0.000000
8/29/2012	2:03:44 PM	H2 MFC set to  0.000000
8/29/2012	2:03:44 PM	BCl3 MFC set to  0.000000
8/29/2012	2:03:44 PM	PH3 MFC set to  0.000000
8/29/2012	2:03:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:03:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:03:45 PM	Tube furnace set to 0
8/29/2012	2:04:15 PM	H2 valve closed
8/29/2012	2:04:15 PM	BCl3 valve closed
8/29/2012	2:04:15 PM	PH3 valve closed
8/29/2012	2:04:15 PM	SiCl4 pre valve closed
8/29/2012	2:04:15 PM	SiCl4 post valve closed
8/29/2012	2:04:15 PM	Bypass valve closed
8/29/2012	2:04:15 PM	Bubbler valve closed
8/29/2012	2:04:15 PM	Helium valve opened
8/29/2012	2:04:15 PM	Main Vac valve opened
8/29/2012	2:04:15 PM	Helium MFC set to  20.000000
8/29/2012	2:04:15 PM	H2 MFC set to  0.000000
8/29/2012	2:04:15 PM	BCl3 MFC set to  0.000000
8/29/2012	2:04:15 PM	PH3 MFC set to  0.000000
8/29/2012	2:04:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:04:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:04:15 PM	Tube furnace set to 0
8/29/2012	2:04:45 PM	Helium valve closed
8/29/2012	2:04:45 PM	H2 valve closed
8/29/2012	2:04:45 PM	BCl3 valve closed
8/29/2012	2:04:45 PM	PH3 valve closed
8/29/2012	2:04:45 PM	SiCl4 pre valve closed
8/29/2012	2:04:45 PM	SiCl4 post valve closed
8/29/2012	2:04:45 PM	Bypass valve closed
8/29/2012	2:04:45 PM	Bubbler valve closed
8/29/2012	2:04:45 PM	Main Vac valve opened
8/29/2012	2:04:45 PM	Helium MFC set to  0.000000
8/29/2012	2:04:45 PM	H2 MFC set to  0.000000
8/29/2012	2:04:45 PM	BCl3 MFC set to  0.000000
8/29/2012	2:04:45 PM	PH3 MFC set to  0.000000
8/29/2012	2:04:45 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:04:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:04:45 PM	Tube furnace set to 200
8/29/2012	2:05:15 PM	H2 valve closed
8/29/2012	2:05:15 PM	BCl3 valve closed
8/29/2012	2:05:15 PM	PH3 valve closed
8/29/2012	2:05:15 PM	SiCl4 pre valve closed
8/29/2012	2:05:15 PM	SiCl4 post valve closed
8/29/2012	2:05:15 PM	Bypass valve closed
8/29/2012	2:05:15 PM	Bubbler valve closed
8/29/2012	2:05:15 PM	Helium valve opened
8/29/2012	2:05:15 PM	Main Vac valve opened
8/29/2012	2:05:15 PM	Helium MFC set to  20.000000
8/29/2012	2:05:15 PM	H2 MFC set to  0.000000
8/29/2012	2:05:15 PM	BCl3 MFC set to  0.000000
8/29/2012	2:05:15 PM	PH3 MFC set to  0.000000
8/29/2012	2:05:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:05:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:05:15 PM	Tube furnace set to 200
8/29/2012	2:05:45 PM	Helium valve closed
8/29/2012	2:05:45 PM	H2 valve closed
8/29/2012	2:05:45 PM	BCl3 valve closed
8/29/2012	2:05:45 PM	PH3 valve closed
8/29/2012	2:05:45 PM	SiCl4 pre valve closed
8/29/2012	2:05:45 PM	SiCl4 post valve closed
8/29/2012	2:05:45 PM	Bypass valve closed
8/29/2012	2:05:45 PM	Bubbler valve closed
8/29/2012	2:05:45 PM	Main Vac valve opened
8/29/2012	2:05:45 PM	Helium MFC set to  0.000000
8/29/2012	2:05:45 PM	H2 MFC set to  0.000000
8/29/2012	2:05:45 PM	BCl3 MFC set to  0.000000
8/29/2012	2:05:45 PM	PH3 MFC set to  0.000000
8/29/2012	2:05:45 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:05:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:05:46 PM	Tube furnace set to 200
8/29/2012	2:06:16 PM	H2 valve closed
8/29/2012	2:06:16 PM	BCl3 valve closed
8/29/2012	2:06:16 PM	PH3 valve closed
8/29/2012	2:06:16 PM	SiCl4 pre valve closed
8/29/2012	2:06:16 PM	SiCl4 post valve closed
8/29/2012	2:06:16 PM	Bypass valve closed
8/29/2012	2:06:16 PM	Bubbler valve closed
8/29/2012	2:06:16 PM	Helium valve opened
8/29/2012	2:06:16 PM	Main Vac valve opened
8/29/2012	2:06:16 PM	Helium MFC set to  20.000000
8/29/2012	2:06:16 PM	H2 MFC set to  0.000000
8/29/2012	2:06:16 PM	BCl3 MFC set to  0.000000
8/29/2012	2:06:16 PM	PH3 MFC set to  0.000000
8/29/2012	2:06:16 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:06:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:06:16 PM	Tube furnace set to 200
8/29/2012	2:06:46 PM	Helium valve closed
8/29/2012	2:06:46 PM	H2 valve closed
8/29/2012	2:06:46 PM	BCl3 valve closed
8/29/2012	2:06:46 PM	PH3 valve closed
8/29/2012	2:06:46 PM	SiCl4 pre valve closed
8/29/2012	2:06:46 PM	SiCl4 post valve closed
8/29/2012	2:06:46 PM	Bypass valve closed
8/29/2012	2:06:46 PM	Bubbler valve closed
8/29/2012	2:06:46 PM	Main Vac valve opened
8/29/2012	2:06:46 PM	Helium MFC set to  0.000000
8/29/2012	2:06:46 PM	H2 MFC set to  0.000000
8/29/2012	2:06:46 PM	BCl3 MFC set to  0.000000
8/29/2012	2:06:46 PM	PH3 MFC set to  0.000000
8/29/2012	2:06:46 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:06:46 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:06:46 PM	Tube furnace set to 200
8/29/2012	2:07:16 PM	H2 valve closed
8/29/2012	2:07:16 PM	BCl3 valve closed
8/29/2012	2:07:16 PM	PH3 valve closed
8/29/2012	2:07:16 PM	SiCl4 pre valve closed
8/29/2012	2:07:16 PM	SiCl4 post valve closed
8/29/2012	2:07:16 PM	Bypass valve closed
8/29/2012	2:07:16 PM	Bubbler valve closed
8/29/2012	2:07:16 PM	Helium valve opened
8/29/2012	2:07:16 PM	Main Vac valve opened
8/29/2012	2:07:16 PM	Helium MFC set to  20.000000
8/29/2012	2:07:16 PM	H2 MFC set to  0.000000
8/29/2012	2:07:16 PM	BCl3 MFC set to  0.000000
8/29/2012	2:07:16 PM	PH3 MFC set to  0.000000
8/29/2012	2:07:16 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:07:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:07:16 PM	Tube furnace set to 200
8/29/2012	2:07:46 PM	Helium valve closed
8/29/2012	2:07:46 PM	H2 valve closed
8/29/2012	2:07:46 PM	BCl3 valve closed
8/29/2012	2:07:46 PM	PH3 valve closed
8/29/2012	2:07:46 PM	SiCl4 pre valve closed
8/29/2012	2:07:46 PM	SiCl4 post valve closed
8/29/2012	2:07:46 PM	Bypass valve closed
8/29/2012	2:07:46 PM	Bubbler valve closed
8/29/2012	2:07:46 PM	Main Vac valve opened
8/29/2012	2:07:46 PM	Helium MFC set to  0.000000
8/29/2012	2:07:46 PM	H2 MFC set to  0.000000
8/29/2012	2:07:46 PM	BCl3 MFC set to  0.000000
8/29/2012	2:07:46 PM	PH3 MFC set to  0.000000
8/29/2012	2:07:46 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:07:46 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:07:47 PM	Tube furnace set to 200
8/29/2012	2:08:17 PM	H2 valve closed
8/29/2012	2:08:17 PM	BCl3 valve closed
8/29/2012	2:08:17 PM	PH3 valve closed
8/29/2012	2:08:17 PM	SiCl4 pre valve closed
8/29/2012	2:08:17 PM	SiCl4 post valve closed
8/29/2012	2:08:17 PM	Bypass valve closed
8/29/2012	2:08:17 PM	Bubbler valve closed
8/29/2012	2:08:17 PM	Helium valve opened
8/29/2012	2:08:17 PM	Main Vac valve opened
8/29/2012	2:08:17 PM	Helium MFC set to  20.000000
8/29/2012	2:08:17 PM	H2 MFC set to  0.000000
8/29/2012	2:08:17 PM	BCl3 MFC set to  0.000000
8/29/2012	2:08:17 PM	PH3 MFC set to  0.000000
8/29/2012	2:08:17 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:08:17 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:08:17 PM	Tube furnace set to 200
8/29/2012	2:08:47 PM	Helium valve closed
8/29/2012	2:08:47 PM	H2 valve closed
8/29/2012	2:08:47 PM	BCl3 valve closed
8/29/2012	2:08:47 PM	PH3 valve closed
8/29/2012	2:08:47 PM	SiCl4 pre valve closed
8/29/2012	2:08:47 PM	SiCl4 post valve closed
8/29/2012	2:08:47 PM	Bypass valve closed
8/29/2012	2:08:47 PM	Bubbler valve closed
8/29/2012	2:08:47 PM	Main Vac valve opened
8/29/2012	2:08:47 PM	Helium MFC set to  0.000000
8/29/2012	2:08:47 PM	H2 MFC set to  0.000000
8/29/2012	2:08:47 PM	BCl3 MFC set to  0.000000
8/29/2012	2:08:47 PM	PH3 MFC set to  0.000000
8/29/2012	2:08:47 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:08:47 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:08:47 PM	Tube furnace set to 200
8/29/2012	2:09:17 PM	H2 valve closed
8/29/2012	2:09:17 PM	BCl3 valve closed
8/29/2012	2:09:17 PM	PH3 valve closed
8/29/2012	2:09:17 PM	SiCl4 pre valve closed
8/29/2012	2:09:17 PM	SiCl4 post valve closed
8/29/2012	2:09:17 PM	Bypass valve closed
8/29/2012	2:09:17 PM	Bubbler valve closed
8/29/2012	2:09:17 PM	Helium valve opened
8/29/2012	2:09:17 PM	Main Vac valve opened
8/29/2012	2:09:17 PM	Helium MFC set to  20.000000
8/29/2012	2:09:17 PM	H2 MFC set to  0.000000
8/29/2012	2:09:17 PM	BCl3 MFC set to  0.000000
8/29/2012	2:09:17 PM	PH3 MFC set to  0.000000
8/29/2012	2:09:17 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:09:17 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:09:17 PM	Tube furnace set to 200
8/29/2012	2:09:47 PM	Helium valve closed
8/29/2012	2:09:47 PM	H2 valve closed
8/29/2012	2:09:47 PM	BCl3 valve closed
8/29/2012	2:09:47 PM	PH3 valve closed
8/29/2012	2:09:47 PM	SiCl4 pre valve closed
8/29/2012	2:09:47 PM	SiCl4 post valve closed
8/29/2012	2:09:47 PM	Bypass valve closed
8/29/2012	2:09:47 PM	Bubbler valve closed
8/29/2012	2:09:47 PM	Main Vac valve opened
8/29/2012	2:09:47 PM	Helium MFC set to  0.000000
8/29/2012	2:09:47 PM	H2 MFC set to  0.000000
8/29/2012	2:09:47 PM	BCl3 MFC set to  0.000000
8/29/2012	2:09:47 PM	PH3 MFC set to  0.000000
8/29/2012	2:09:47 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:09:47 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:09:48 PM	Tube furnace set to 200
8/29/2012	2:10:18 PM	H2 valve closed
8/29/2012	2:10:18 PM	BCl3 valve closed
8/29/2012	2:10:18 PM	PH3 valve closed
8/29/2012	2:10:18 PM	SiCl4 pre valve closed
8/29/2012	2:10:18 PM	SiCl4 post valve closed
8/29/2012	2:10:18 PM	Bypass valve closed
8/29/2012	2:10:18 PM	Bubbler valve closed
8/29/2012	2:10:18 PM	Helium valve opened
8/29/2012	2:10:18 PM	Main Vac valve opened
8/29/2012	2:10:18 PM	Helium MFC set to  20.000000
8/29/2012	2:10:18 PM	H2 MFC set to  0.000000
8/29/2012	2:10:18 PM	BCl3 MFC set to  0.000000
8/29/2012	2:10:18 PM	PH3 MFC set to  0.000000
8/29/2012	2:10:18 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:10:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:10:18 PM	Tube furnace set to 200
8/29/2012	2:10:48 PM	Helium valve closed
8/29/2012	2:10:48 PM	H2 valve closed
8/29/2012	2:10:48 PM	BCl3 valve closed
8/29/2012	2:10:48 PM	PH3 valve closed
8/29/2012	2:10:48 PM	SiCl4 pre valve closed
8/29/2012	2:10:48 PM	SiCl4 post valve closed
8/29/2012	2:10:48 PM	Bypass valve closed
8/29/2012	2:10:48 PM	Bubbler valve closed
8/29/2012	2:10:48 PM	Main Vac valve opened
8/29/2012	2:10:48 PM	Helium MFC set to  0.000000
8/29/2012	2:10:48 PM	H2 MFC set to  0.000000
8/29/2012	2:10:48 PM	BCl3 MFC set to  0.000000
8/29/2012	2:10:48 PM	PH3 MFC set to  0.000000
8/29/2012	2:10:48 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:10:48 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:10:48 PM	Tube furnace set to 0
8/29/2012	2:10:49 PM	Run finished at 2:10 PM
8/29/2012	2:28:54 PM	Recipe started at 2:28 PM
8/29/2012	2:28:54 PM	Helium valve closed
8/29/2012	2:28:54 PM	H2 valve closed
8/29/2012	2:28:54 PM	BCl3 valve closed
8/29/2012	2:28:54 PM	PH3 valve closed
8/29/2012	2:28:54 PM	SiCl4 pre valve closed
8/29/2012	2:28:54 PM	SiCl4 post valve closed
8/29/2012	2:28:54 PM	Bypass valve closed
8/29/2012	2:28:54 PM	Bubbler valve closed
8/29/2012	2:28:54 PM	Main Vac valve opened
8/29/2012	2:28:54 PM	Helium MFC set to  0.000000
8/29/2012	2:28:54 PM	H2 MFC set to  0.000000
8/29/2012	2:28:54 PM	BCl3 MFC set to  0.000000
8/29/2012	2:28:54 PM	PH3 MFC set to  0.000000
8/29/2012	2:28:54 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:28:54 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:28:54 PM	Tube furnace set to 0
8/29/2012	2:29:09 PM	H2 valve closed
8/29/2012	2:29:09 PM	BCl3 valve closed
8/29/2012	2:29:09 PM	PH3 valve closed
8/29/2012	2:29:09 PM	SiCl4 pre valve closed
8/29/2012	2:29:09 PM	SiCl4 post valve closed
8/29/2012	2:29:09 PM	Bypass valve closed
8/29/2012	2:29:09 PM	Bubbler valve closed
8/29/2012	2:29:09 PM	Helium valve opened
8/29/2012	2:29:09 PM	Main Vac valve opened
8/29/2012	2:29:09 PM	Helium MFC set to  20.000000
8/29/2012	2:29:09 PM	H2 MFC set to  0.000000
8/29/2012	2:29:09 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:09 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:09 PM	Tube furnace set to 0
8/29/2012	2:29:09 PM	Helium valve closed
8/29/2012	2:29:09 PM	H2 valve closed
8/29/2012	2:29:09 PM	BCl3 valve closed
8/29/2012	2:29:09 PM	PH3 valve closed
8/29/2012	2:29:09 PM	SiCl4 pre valve closed
8/29/2012	2:29:09 PM	SiCl4 post valve closed
8/29/2012	2:29:09 PM	Bypass valve closed
8/29/2012	2:29:09 PM	Bubbler valve closed
8/29/2012	2:29:09 PM	Main Vac valve opened
8/29/2012	2:29:09 PM	Helium MFC set to  0.000000
8/29/2012	2:29:09 PM	H2 MFC set to  0.000000
8/29/2012	2:29:09 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:09 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:09 PM	Tube furnace set to 0
8/29/2012	2:29:10 PM	H2 valve closed
8/29/2012	2:29:10 PM	BCl3 valve closed
8/29/2012	2:29:10 PM	PH3 valve closed
8/29/2012	2:29:10 PM	SiCl4 pre valve closed
8/29/2012	2:29:10 PM	SiCl4 post valve closed
8/29/2012	2:29:10 PM	Bypass valve closed
8/29/2012	2:29:10 PM	Bubbler valve closed
8/29/2012	2:29:10 PM	Helium valve opened
8/29/2012	2:29:10 PM	Main Vac valve opened
8/29/2012	2:29:10 PM	Helium MFC set to  20.000000
8/29/2012	2:29:10 PM	H2 MFC set to  0.000000
8/29/2012	2:29:10 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:10 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:10 PM	Tube furnace set to 0
8/29/2012	2:29:11 PM	Helium valve closed
8/29/2012	2:29:11 PM	H2 valve closed
8/29/2012	2:29:11 PM	BCl3 valve closed
8/29/2012	2:29:11 PM	PH3 valve closed
8/29/2012	2:29:11 PM	SiCl4 pre valve closed
8/29/2012	2:29:11 PM	SiCl4 post valve closed
8/29/2012	2:29:11 PM	Bypass valve closed
8/29/2012	2:29:11 PM	Bubbler valve closed
8/29/2012	2:29:11 PM	Main Vac valve opened
8/29/2012	2:29:11 PM	Helium MFC set to  0.000000
8/29/2012	2:29:11 PM	H2 MFC set to  0.000000
8/29/2012	2:29:11 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:11 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:11 PM	Tube furnace set to 0
8/29/2012	2:29:12 PM	H2 valve closed
8/29/2012	2:29:12 PM	BCl3 valve closed
8/29/2012	2:29:12 PM	PH3 valve closed
8/29/2012	2:29:12 PM	SiCl4 pre valve closed
8/29/2012	2:29:12 PM	SiCl4 post valve closed
8/29/2012	2:29:12 PM	Bypass valve closed
8/29/2012	2:29:12 PM	Bubbler valve closed
8/29/2012	2:29:12 PM	Helium valve opened
8/29/2012	2:29:12 PM	Main Vac valve opened
8/29/2012	2:29:12 PM	Helium MFC set to  20.000000
8/29/2012	2:29:12 PM	H2 MFC set to  0.000000
8/29/2012	2:29:12 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:12 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:12 PM	Tube furnace set to 0
8/29/2012	2:29:12 PM	Helium valve closed
8/29/2012	2:29:12 PM	H2 valve closed
8/29/2012	2:29:12 PM	BCl3 valve closed
8/29/2012	2:29:12 PM	PH3 valve closed
8/29/2012	2:29:12 PM	SiCl4 pre valve closed
8/29/2012	2:29:12 PM	SiCl4 post valve closed
8/29/2012	2:29:12 PM	Bypass valve closed
8/29/2012	2:29:12 PM	Bubbler valve closed
8/29/2012	2:29:12 PM	Main Vac valve opened
8/29/2012	2:29:12 PM	Helium MFC set to  0.000000
8/29/2012	2:29:12 PM	H2 MFC set to  0.000000
8/29/2012	2:29:12 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:12 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:12 PM	Tube furnace set to 0
8/29/2012	2:29:13 PM	H2 valve closed
8/29/2012	2:29:13 PM	BCl3 valve closed
8/29/2012	2:29:13 PM	PH3 valve closed
8/29/2012	2:29:13 PM	SiCl4 pre valve closed
8/29/2012	2:29:13 PM	SiCl4 post valve closed
8/29/2012	2:29:13 PM	Bypass valve closed
8/29/2012	2:29:13 PM	Bubbler valve closed
8/29/2012	2:29:13 PM	Helium valve opened
8/29/2012	2:29:13 PM	Main Vac valve opened
8/29/2012	2:29:13 PM	Helium MFC set to  20.000000
8/29/2012	2:29:13 PM	H2 MFC set to  0.000000
8/29/2012	2:29:13 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:13 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:13 PM	Tube furnace set to 0
8/29/2012	2:29:43 PM	Helium valve closed
8/29/2012	2:29:43 PM	H2 valve closed
8/29/2012	2:29:43 PM	BCl3 valve closed
8/29/2012	2:29:43 PM	PH3 valve closed
8/29/2012	2:29:43 PM	SiCl4 pre valve closed
8/29/2012	2:29:43 PM	SiCl4 post valve closed
8/29/2012	2:29:43 PM	Bypass valve closed
8/29/2012	2:29:43 PM	Bubbler valve closed
8/29/2012	2:29:43 PM	Main Vac valve opened
8/29/2012	2:29:43 PM	Helium MFC set to  0.000000
8/29/2012	2:29:43 PM	H2 MFC set to  0.000000
8/29/2012	2:29:43 PM	BCl3 MFC set to  0.000000
8/29/2012	2:29:43 PM	PH3 MFC set to  0.000000
8/29/2012	2:29:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:29:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:29:43 PM	Tube furnace set to 0
8/29/2012	2:30:13 PM	H2 valve closed
8/29/2012	2:30:13 PM	BCl3 valve closed
8/29/2012	2:30:13 PM	PH3 valve closed
8/29/2012	2:30:14 PM	SiCl4 pre valve closed
8/29/2012	2:30:14 PM	SiCl4 post valve closed
8/29/2012	2:30:14 PM	Bypass valve closed
8/29/2012	2:30:14 PM	Bubbler valve closed
8/29/2012	2:30:14 PM	Helium valve opened
8/29/2012	2:30:14 PM	Main Vac valve opened
8/29/2012	2:30:14 PM	Helium MFC set to  20.000000
8/29/2012	2:30:14 PM	H2 MFC set to  0.000000
8/29/2012	2:30:14 PM	BCl3 MFC set to  0.000000
8/29/2012	2:30:14 PM	PH3 MFC set to  0.000000
8/29/2012	2:30:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:30:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:30:14 PM	Tube furnace set to 0
8/29/2012	2:30:44 PM	Helium valve closed
8/29/2012	2:30:44 PM	H2 valve closed
8/29/2012	2:30:44 PM	BCl3 valve closed
8/29/2012	2:30:44 PM	PH3 valve closed
8/29/2012	2:30:44 PM	SiCl4 pre valve closed
8/29/2012	2:30:44 PM	SiCl4 post valve closed
8/29/2012	2:30:44 PM	Bypass valve closed
8/29/2012	2:30:44 PM	Bubbler valve closed
8/29/2012	2:30:44 PM	Main Vac valve opened
8/29/2012	2:30:44 PM	Helium MFC set to  0.000000
8/29/2012	2:30:44 PM	H2 MFC set to  0.000000
8/29/2012	2:30:44 PM	BCl3 MFC set to  0.000000
8/29/2012	2:30:44 PM	PH3 MFC set to  0.000000
8/29/2012	2:30:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:30:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:30:44 PM	Tube furnace set to 0
8/29/2012	2:31:14 PM	H2 valve closed
8/29/2012	2:31:14 PM	BCl3 valve closed
8/29/2012	2:31:14 PM	PH3 valve closed
8/29/2012	2:31:14 PM	SiCl4 pre valve closed
8/29/2012	2:31:14 PM	SiCl4 post valve closed
8/29/2012	2:31:14 PM	Bypass valve closed
8/29/2012	2:31:14 PM	Bubbler valve closed
8/29/2012	2:31:14 PM	Helium valve opened
8/29/2012	2:31:14 PM	Main Vac valve opened
8/29/2012	2:31:14 PM	Helium MFC set to  20.000000
8/29/2012	2:31:14 PM	H2 MFC set to  0.000000
8/29/2012	2:31:14 PM	BCl3 MFC set to  0.000000
8/29/2012	2:31:14 PM	PH3 MFC set to  0.000000
8/29/2012	2:31:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:31:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:31:14 PM	Tube furnace set to 0
8/29/2012	2:31:44 PM	Helium valve closed
8/29/2012	2:31:44 PM	H2 valve closed
8/29/2012	2:31:44 PM	BCl3 valve closed
8/29/2012	2:31:44 PM	PH3 valve closed
8/29/2012	2:31:44 PM	SiCl4 pre valve closed
8/29/2012	2:31:44 PM	SiCl4 post valve closed
8/29/2012	2:31:44 PM	Bypass valve closed
8/29/2012	2:31:44 PM	Bubbler valve closed
8/29/2012	2:31:44 PM	Main Vac valve opened
8/29/2012	2:31:44 PM	Helium MFC set to  0.000000
8/29/2012	2:31:44 PM	H2 MFC set to  0.000000
8/29/2012	2:31:44 PM	BCl3 MFC set to  0.000000
8/29/2012	2:31:44 PM	PH3 MFC set to  0.000000
8/29/2012	2:31:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:31:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:31:44 PM	Tube furnace set to 0
8/29/2012	2:32:14 PM	H2 valve closed
8/29/2012	2:32:14 PM	BCl3 valve closed
8/29/2012	2:32:14 PM	PH3 valve closed
8/29/2012	2:32:14 PM	SiCl4 pre valve closed
8/29/2012	2:32:14 PM	SiCl4 post valve closed
8/29/2012	2:32:14 PM	Bypass valve closed
8/29/2012	2:32:14 PM	Bubbler valve closed
8/29/2012	2:32:14 PM	Helium valve opened
8/29/2012	2:32:14 PM	Main Vac valve opened
8/29/2012	2:32:14 PM	Helium MFC set to  20.000000
8/29/2012	2:32:14 PM	H2 MFC set to  0.000000
8/29/2012	2:32:14 PM	BCl3 MFC set to  0.000000
8/29/2012	2:32:14 PM	PH3 MFC set to  0.000000
8/29/2012	2:32:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:32:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:32:15 PM	Tube furnace set to 0
8/29/2012	2:32:45 PM	Helium valve closed
8/29/2012	2:32:45 PM	H2 valve closed
8/29/2012	2:32:45 PM	BCl3 valve closed
8/29/2012	2:32:45 PM	PH3 valve closed
8/29/2012	2:32:45 PM	SiCl4 pre valve closed
8/29/2012	2:32:45 PM	SiCl4 post valve closed
8/29/2012	2:32:45 PM	Bypass valve closed
8/29/2012	2:32:45 PM	Bubbler valve closed
8/29/2012	2:32:45 PM	Main Vac valve opened
8/29/2012	2:32:45 PM	Helium MFC set to  0.000000
8/29/2012	2:32:45 PM	H2 MFC set to  0.000000
8/29/2012	2:32:45 PM	BCl3 MFC set to  0.000000
8/29/2012	2:32:45 PM	PH3 MFC set to  0.000000
8/29/2012	2:32:45 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:32:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:32:45 PM	Tube furnace set to 0
8/29/2012	2:33:15 PM	H2 valve closed
8/29/2012	2:33:15 PM	BCl3 valve closed
8/29/2012	2:33:15 PM	PH3 valve closed
8/29/2012	2:33:15 PM	SiCl4 pre valve closed
8/29/2012	2:33:15 PM	SiCl4 post valve closed
8/29/2012	2:33:15 PM	Bypass valve closed
8/29/2012	2:33:15 PM	Bubbler valve closed
8/29/2012	2:33:15 PM	Helium valve opened
8/29/2012	2:33:15 PM	Main Vac valve opened
8/29/2012	2:33:15 PM	Helium MFC set to  20.000000
8/29/2012	2:33:15 PM	H2 MFC set to  0.000000
8/29/2012	2:33:15 PM	BCl3 MFC set to  0.000000
8/29/2012	2:33:15 PM	PH3 MFC set to  0.000000
8/29/2012	2:33:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:33:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:33:15 PM	Tube furnace set to 0
8/29/2012	2:33:45 PM	Helium valve closed
8/29/2012	2:33:45 PM	H2 valve closed
8/29/2012	2:33:45 PM	BCl3 valve closed
8/29/2012	2:33:45 PM	PH3 valve closed
8/29/2012	2:33:45 PM	SiCl4 pre valve closed
8/29/2012	2:33:45 PM	SiCl4 post valve closed
8/29/2012	2:33:45 PM	Bypass valve closed
8/29/2012	2:33:45 PM	Bubbler valve closed
8/29/2012	2:33:45 PM	Main Vac valve opened
8/29/2012	2:33:45 PM	Helium MFC set to  0.000000
8/29/2012	2:33:45 PM	H2 MFC set to  0.000000
8/29/2012	2:33:45 PM	BCl3 MFC set to  0.000000
8/29/2012	2:33:45 PM	PH3 MFC set to  0.000000
8/29/2012	2:33:45 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:33:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:33:45 PM	Tube furnace set to 0
8/29/2012	2:34:15 PM	H2 valve closed
8/29/2012	2:34:15 PM	BCl3 valve closed
8/29/2012	2:34:15 PM	PH3 valve closed
8/29/2012	2:34:15 PM	SiCl4 pre valve closed
8/29/2012	2:34:15 PM	SiCl4 post valve closed
8/29/2012	2:34:15 PM	Bypass valve closed
8/29/2012	2:34:15 PM	Bubbler valve closed
8/29/2012	2:34:15 PM	Helium valve opened
8/29/2012	2:34:15 PM	Main Vac valve opened
8/29/2012	2:34:15 PM	Helium MFC set to  20.000000
8/29/2012	2:34:15 PM	H2 MFC set to  0.000000
8/29/2012	2:34:15 PM	BCl3 MFC set to  0.000000
8/29/2012	2:34:15 PM	PH3 MFC set to  0.000000
8/29/2012	2:34:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:34:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:34:16 PM	Tube furnace set to 0
8/29/2012	2:34:46 PM	Helium valve closed
8/29/2012	2:34:46 PM	H2 valve closed
8/29/2012	2:34:46 PM	BCl3 valve closed
8/29/2012	2:34:46 PM	PH3 valve closed
8/29/2012	2:34:46 PM	SiCl4 pre valve closed
8/29/2012	2:34:46 PM	SiCl4 post valve closed
8/29/2012	2:34:46 PM	Bypass valve closed
8/29/2012	2:34:46 PM	Bubbler valve closed
8/29/2012	2:34:46 PM	Main Vac valve opened
8/29/2012	2:34:46 PM	Helium MFC set to  0.000000
8/29/2012	2:34:46 PM	H2 MFC set to  0.000000
8/29/2012	2:34:46 PM	BCl3 MFC set to  0.000000
8/29/2012	2:34:46 PM	PH3 MFC set to  0.000000
8/29/2012	2:34:46 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:34:46 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:34:46 PM	Tube furnace set to 200
8/29/2012	2:35:16 PM	H2 valve closed
8/29/2012	2:35:16 PM	BCl3 valve closed
8/29/2012	2:35:16 PM	PH3 valve closed
8/29/2012	2:35:16 PM	SiCl4 pre valve closed
8/29/2012	2:35:16 PM	SiCl4 post valve closed
8/29/2012	2:35:16 PM	Bypass valve closed
8/29/2012	2:35:16 PM	Bubbler valve closed
8/29/2012	2:35:16 PM	Helium valve opened
8/29/2012	2:35:16 PM	Main Vac valve opened
8/29/2012	2:35:16 PM	Helium MFC set to  20.000000
8/29/2012	2:35:16 PM	H2 MFC set to  0.000000
8/29/2012	2:35:16 PM	BCl3 MFC set to  0.000000
8/29/2012	2:35:16 PM	PH3 MFC set to  0.000000
8/29/2012	2:35:16 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:35:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:35:16 PM	Tube furnace set to 200
8/29/2012	2:35:46 PM	Helium valve closed
8/29/2012	2:35:46 PM	H2 valve closed
8/29/2012	2:35:46 PM	BCl3 valve closed
8/29/2012	2:35:46 PM	PH3 valve closed
8/29/2012	2:35:46 PM	SiCl4 pre valve closed
8/29/2012	2:35:46 PM	SiCl4 post valve closed
8/29/2012	2:35:46 PM	Bypass valve closed
8/29/2012	2:35:46 PM	Bubbler valve closed
8/29/2012	2:35:46 PM	Main Vac valve opened
8/29/2012	2:35:46 PM	Helium MFC set to  0.000000
8/29/2012	2:35:46 PM	H2 MFC set to  0.000000
8/29/2012	2:35:46 PM	BCl3 MFC set to  0.000000
8/29/2012	2:35:46 PM	PH3 MFC set to  0.000000
8/29/2012	2:35:46 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:35:46 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:35:46 PM	Tube furnace set to 200
8/29/2012	2:36:16 PM	H2 valve closed
8/29/2012	2:36:16 PM	BCl3 valve closed
8/29/2012	2:36:16 PM	PH3 valve closed
8/29/2012	2:36:16 PM	SiCl4 pre valve closed
8/29/2012	2:36:16 PM	SiCl4 post valve closed
8/29/2012	2:36:16 PM	Bypass valve closed
8/29/2012	2:36:16 PM	Bubbler valve closed
8/29/2012	2:36:16 PM	Helium valve opened
8/29/2012	2:36:16 PM	Main Vac valve opened
8/29/2012	2:36:16 PM	Helium MFC set to  20.000000
8/29/2012	2:36:16 PM	H2 MFC set to  0.000000
8/29/2012	2:36:16 PM	BCl3 MFC set to  0.000000
8/29/2012	2:36:16 PM	PH3 MFC set to  0.000000
8/29/2012	2:36:16 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:36:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:36:17 PM	Tube furnace set to 200
8/29/2012	2:36:47 PM	Helium valve closed
8/29/2012	2:36:47 PM	H2 valve closed
8/29/2012	2:36:47 PM	BCl3 valve closed
8/29/2012	2:36:47 PM	PH3 valve closed
8/29/2012	2:36:47 PM	SiCl4 pre valve closed
8/29/2012	2:36:47 PM	SiCl4 post valve closed
8/29/2012	2:36:47 PM	Bypass valve closed
8/29/2012	2:36:47 PM	Bubbler valve closed
8/29/2012	2:36:47 PM	Main Vac valve opened
8/29/2012	2:36:47 PM	Helium MFC set to  0.000000
8/29/2012	2:36:47 PM	H2 MFC set to  0.000000
8/29/2012	2:36:47 PM	BCl3 MFC set to  0.000000
8/29/2012	2:36:47 PM	PH3 MFC set to  0.000000
8/29/2012	2:36:47 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:36:47 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:36:47 PM	Tube furnace set to 200
8/29/2012	2:37:17 PM	H2 valve closed
8/29/2012	2:37:17 PM	BCl3 valve closed
8/29/2012	2:37:17 PM	PH3 valve closed
8/29/2012	2:37:17 PM	SiCl4 pre valve closed
8/29/2012	2:37:17 PM	SiCl4 post valve closed
8/29/2012	2:37:17 PM	Bypass valve closed
8/29/2012	2:37:17 PM	Bubbler valve closed
8/29/2012	2:37:17 PM	Helium valve opened
8/29/2012	2:37:17 PM	Main Vac valve opened
8/29/2012	2:37:17 PM	Helium MFC set to  20.000000
8/29/2012	2:37:17 PM	H2 MFC set to  0.000000
8/29/2012	2:37:17 PM	BCl3 MFC set to  0.000000
8/29/2012	2:37:17 PM	PH3 MFC set to  0.000000
8/29/2012	2:37:17 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:37:17 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:37:17 PM	Tube furnace set to 200
8/29/2012	2:37:47 PM	Helium valve closed
8/29/2012	2:37:47 PM	H2 valve closed
8/29/2012	2:37:47 PM	BCl3 valve closed
8/29/2012	2:37:47 PM	PH3 valve closed
8/29/2012	2:37:47 PM	SiCl4 pre valve closed
8/29/2012	2:37:47 PM	SiCl4 post valve closed
8/29/2012	2:37:47 PM	Bypass valve closed
8/29/2012	2:37:47 PM	Bubbler valve closed
8/29/2012	2:37:47 PM	Main Vac valve opened
8/29/2012	2:37:47 PM	Helium MFC set to  0.000000
8/29/2012	2:37:47 PM	H2 MFC set to  0.000000
8/29/2012	2:37:47 PM	BCl3 MFC set to  0.000000
8/29/2012	2:37:47 PM	PH3 MFC set to  0.000000
8/29/2012	2:37:47 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:37:47 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:37:47 PM	Tube furnace set to 200
8/29/2012	2:38:17 PM	H2 valve closed
8/29/2012	2:38:17 PM	BCl3 valve closed
8/29/2012	2:38:17 PM	PH3 valve closed
8/29/2012	2:38:17 PM	SiCl4 pre valve closed
8/29/2012	2:38:17 PM	SiCl4 post valve closed
8/29/2012	2:38:17 PM	Bypass valve closed
8/29/2012	2:38:17 PM	Bubbler valve closed
8/29/2012	2:38:17 PM	Helium valve opened
8/29/2012	2:38:17 PM	Main Vac valve opened
8/29/2012	2:38:17 PM	Helium MFC set to  20.000000
8/29/2012	2:38:17 PM	H2 MFC set to  0.000000
8/29/2012	2:38:17 PM	BCl3 MFC set to  0.000000
8/29/2012	2:38:17 PM	PH3 MFC set to  0.000000
8/29/2012	2:38:17 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:38:17 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:38:17 PM	Tube furnace set to 200
8/29/2012	2:38:47 PM	Helium valve closed
8/29/2012	2:38:48 PM	H2 valve closed
8/29/2012	2:38:48 PM	BCl3 valve closed
8/29/2012	2:38:48 PM	PH3 valve closed
8/29/2012	2:38:48 PM	SiCl4 pre valve closed
8/29/2012	2:38:48 PM	SiCl4 post valve closed
8/29/2012	2:38:48 PM	Bypass valve closed
8/29/2012	2:38:48 PM	Bubbler valve closed
8/29/2012	2:38:48 PM	Main Vac valve opened
8/29/2012	2:38:48 PM	Helium MFC set to  0.000000
8/29/2012	2:38:48 PM	H2 MFC set to  0.000000
8/29/2012	2:38:48 PM	BCl3 MFC set to  0.000000
8/29/2012	2:38:48 PM	PH3 MFC set to  0.000000
8/29/2012	2:38:48 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:38:48 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:38:48 PM	Tube furnace set to 200
8/29/2012	2:39:18 PM	H2 valve closed
8/29/2012	2:39:18 PM	BCl3 valve closed
8/29/2012	2:39:18 PM	PH3 valve closed
8/29/2012	2:39:18 PM	SiCl4 pre valve closed
8/29/2012	2:39:18 PM	SiCl4 post valve closed
8/29/2012	2:39:18 PM	Bypass valve closed
8/29/2012	2:39:18 PM	Bubbler valve closed
8/29/2012	2:39:18 PM	Helium valve opened
8/29/2012	2:39:18 PM	Main Vac valve opened
8/29/2012	2:39:18 PM	Helium MFC set to  20.000000
8/29/2012	2:39:18 PM	H2 MFC set to  0.000000
8/29/2012	2:39:18 PM	BCl3 MFC set to  0.000000
8/29/2012	2:39:18 PM	PH3 MFC set to  0.000000
8/29/2012	2:39:18 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:39:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:39:18 PM	Tube furnace set to 200
8/29/2012	2:39:48 PM	Helium valve closed
8/29/2012	2:39:48 PM	H2 valve closed
8/29/2012	2:39:48 PM	BCl3 valve closed
8/29/2012	2:39:48 PM	PH3 valve closed
8/29/2012	2:39:48 PM	SiCl4 pre valve closed
8/29/2012	2:39:48 PM	SiCl4 post valve closed
8/29/2012	2:39:48 PM	Bypass valve closed
8/29/2012	2:39:48 PM	Bubbler valve closed
8/29/2012	2:39:48 PM	Main Vac valve opened
8/29/2012	2:39:48 PM	Helium MFC set to  0.000000
8/29/2012	2:39:48 PM	H2 MFC set to  0.000000
8/29/2012	2:39:48 PM	BCl3 MFC set to  0.000000
8/29/2012	2:39:48 PM	PH3 MFC set to  0.000000
8/29/2012	2:39:48 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:39:48 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:39:48 PM	Tube furnace set to 200
8/29/2012	2:40:18 PM	H2 valve closed
8/29/2012	2:40:18 PM	BCl3 valve closed
8/29/2012	2:40:18 PM	PH3 valve closed
8/29/2012	2:40:18 PM	SiCl4 pre valve closed
8/29/2012	2:40:18 PM	SiCl4 post valve closed
8/29/2012	2:40:18 PM	Bypass valve closed
8/29/2012	2:40:18 PM	Bubbler valve closed
8/29/2012	2:40:18 PM	Helium valve opened
8/29/2012	2:40:18 PM	Main Vac valve opened
8/29/2012	2:40:18 PM	Helium MFC set to  20.000000
8/29/2012	2:40:18 PM	H2 MFC set to  0.000000
8/29/2012	2:40:18 PM	BCl3 MFC set to  0.000000
8/29/2012	2:40:18 PM	PH3 MFC set to  0.000000
8/29/2012	2:40:18 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:40:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:40:18 PM	Tube furnace set to 200
8/29/2012	2:40:48 PM	Helium valve closed
8/29/2012	2:40:48 PM	H2 valve closed
8/29/2012	2:40:48 PM	BCl3 valve closed
8/29/2012	2:40:48 PM	PH3 valve closed
8/29/2012	2:40:48 PM	SiCl4 pre valve closed
8/29/2012	2:40:48 PM	SiCl4 post valve closed
8/29/2012	2:40:48 PM	Bypass valve closed
8/29/2012	2:40:48 PM	Bubbler valve closed
8/29/2012	2:40:48 PM	Main Vac valve opened
8/29/2012	2:40:48 PM	Helium MFC set to  0.000000
8/29/2012	2:40:48 PM	H2 MFC set to  0.000000
8/29/2012	2:40:48 PM	BCl3 MFC set to  0.000000
8/29/2012	2:40:49 PM	PH3 MFC set to  0.000000
8/29/2012	2:40:49 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:40:49 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:40:49 PM	Tube furnace set to 0
8/29/2012	2:40:50 PM	Run finished at 2:40 PM
8/29/2012	2:55:01 PM	Recipe started at 2:54 PM
8/29/2012	2:55:01 PM	Helium valve closed
8/29/2012	2:55:01 PM	H2 valve closed
8/29/2012	2:55:01 PM	BCl3 valve closed
8/29/2012	2:55:01 PM	PH3 valve closed
8/29/2012	2:55:01 PM	SiCl4 pre valve closed
8/29/2012	2:55:01 PM	SiCl4 post valve closed
8/29/2012	2:55:01 PM	Bypass valve closed
8/29/2012	2:55:01 PM	Bubbler valve closed
8/29/2012	2:55:01 PM	Main Vac valve opened
8/29/2012	2:55:01 PM	Helium MFC set to  0.000000
8/29/2012	2:55:01 PM	H2 MFC set to  0.000000
8/29/2012	2:55:01 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:01 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:01 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:01 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:02 PM	Tube furnace set to 0
8/29/2012	2:55:02 PM	H2 valve closed
8/29/2012	2:55:02 PM	BCl3 valve closed
8/29/2012	2:55:02 PM	PH3 valve closed
8/29/2012	2:55:02 PM	SiCl4 pre valve closed
8/29/2012	2:55:02 PM	SiCl4 post valve closed
8/29/2012	2:55:02 PM	Bypass valve closed
8/29/2012	2:55:02 PM	Bubbler valve closed
8/29/2012	2:55:02 PM	Helium valve opened
8/29/2012	2:55:02 PM	Main Vac valve opened
8/29/2012	2:55:02 PM	Helium MFC set to  20.000000
8/29/2012	2:55:02 PM	H2 MFC set to  0.000000
8/29/2012	2:55:02 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:02 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:02 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:02 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:03 PM	Tube furnace set to 0
8/29/2012	2:55:04 PM	Helium valve closed
8/29/2012	2:55:04 PM	H2 valve closed
8/29/2012	2:55:04 PM	BCl3 valve closed
8/29/2012	2:55:04 PM	PH3 valve closed
8/29/2012	2:55:04 PM	SiCl4 pre valve closed
8/29/2012	2:55:04 PM	SiCl4 post valve closed
8/29/2012	2:55:04 PM	Bypass valve closed
8/29/2012	2:55:04 PM	Bubbler valve closed
8/29/2012	2:55:04 PM	Main Vac valve opened
8/29/2012	2:55:04 PM	Helium MFC set to  0.000000
8/29/2012	2:55:04 PM	H2 MFC set to  0.000000
8/29/2012	2:55:04 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:04 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:04 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:04 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:04 PM	Tube furnace set to 0
8/29/2012	2:55:05 PM	H2 valve closed
8/29/2012	2:55:05 PM	BCl3 valve closed
8/29/2012	2:55:05 PM	PH3 valve closed
8/29/2012	2:55:05 PM	SiCl4 pre valve closed
8/29/2012	2:55:05 PM	SiCl4 post valve closed
8/29/2012	2:55:05 PM	Bypass valve closed
8/29/2012	2:55:05 PM	Bubbler valve closed
8/29/2012	2:55:05 PM	Helium valve opened
8/29/2012	2:55:05 PM	Main Vac valve opened
8/29/2012	2:55:05 PM	Helium MFC set to  20.000000
8/29/2012	2:55:05 PM	H2 MFC set to  0.000000
8/29/2012	2:55:05 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:05 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:05 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:05 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:05 PM	Tube furnace set to 0
8/29/2012	2:55:06 PM	Helium valve closed
8/29/2012	2:55:06 PM	H2 valve closed
8/29/2012	2:55:06 PM	BCl3 valve closed
8/29/2012	2:55:06 PM	PH3 valve closed
8/29/2012	2:55:06 PM	SiCl4 pre valve closed
8/29/2012	2:55:06 PM	SiCl4 post valve closed
8/29/2012	2:55:06 PM	Bypass valve closed
8/29/2012	2:55:06 PM	Bubbler valve closed
8/29/2012	2:55:06 PM	Main Vac valve opened
8/29/2012	2:55:06 PM	Helium MFC set to  0.000000
8/29/2012	2:55:06 PM	H2 MFC set to  0.000000
8/29/2012	2:55:06 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:06 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:06 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:06 PM	Tube furnace set to 0
8/29/2012	2:55:06 PM	H2 valve closed
8/29/2012	2:55:06 PM	BCl3 valve closed
8/29/2012	2:55:06 PM	PH3 valve closed
8/29/2012	2:55:06 PM	SiCl4 pre valve closed
8/29/2012	2:55:06 PM	SiCl4 post valve closed
8/29/2012	2:55:06 PM	Bypass valve closed
8/29/2012	2:55:06 PM	Bubbler valve closed
8/29/2012	2:55:06 PM	Helium valve opened
8/29/2012	2:55:06 PM	Main Vac valve opened
8/29/2012	2:55:06 PM	Helium MFC set to  20.000000
8/29/2012	2:55:06 PM	H2 MFC set to  0.000000
8/29/2012	2:55:06 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:06 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:06 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:07 PM	Tube furnace set to 0
8/29/2012	2:55:07 PM	Helium valve closed
8/29/2012	2:55:07 PM	H2 valve closed
8/29/2012	2:55:07 PM	BCl3 valve closed
8/29/2012	2:55:07 PM	PH3 valve closed
8/29/2012	2:55:07 PM	SiCl4 pre valve closed
8/29/2012	2:55:07 PM	SiCl4 post valve closed
8/29/2012	2:55:07 PM	Bypass valve closed
8/29/2012	2:55:07 PM	Bubbler valve closed
8/29/2012	2:55:07 PM	Main Vac valve opened
8/29/2012	2:55:07 PM	Helium MFC set to  0.000000
8/29/2012	2:55:07 PM	H2 MFC set to  0.000000
8/29/2012	2:55:07 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:07 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:07 PM	Tube furnace set to 0
8/29/2012	2:55:08 PM	H2 valve closed
8/29/2012	2:55:08 PM	BCl3 valve closed
8/29/2012	2:55:08 PM	PH3 valve closed
8/29/2012	2:55:08 PM	SiCl4 pre valve closed
8/29/2012	2:55:08 PM	SiCl4 post valve closed
8/29/2012	2:55:08 PM	Bypass valve closed
8/29/2012	2:55:08 PM	Bubbler valve closed
8/29/2012	2:55:08 PM	Helium valve opened
8/29/2012	2:55:08 PM	Main Vac valve opened
8/29/2012	2:55:08 PM	Helium MFC set to  20.000000
8/29/2012	2:55:08 PM	H2 MFC set to  0.000000
8/29/2012	2:55:08 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:08 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:08 PM	Tube furnace set to 0
8/29/2012	2:55:09 PM	Helium valve closed
8/29/2012	2:55:09 PM	H2 valve closed
8/29/2012	2:55:09 PM	BCl3 valve closed
8/29/2012	2:55:09 PM	PH3 valve closed
8/29/2012	2:55:09 PM	SiCl4 pre valve closed
8/29/2012	2:55:09 PM	SiCl4 post valve closed
8/29/2012	2:55:09 PM	Bypass valve closed
8/29/2012	2:55:09 PM	Bubbler valve closed
8/29/2012	2:55:09 PM	Main Vac valve opened
8/29/2012	2:55:09 PM	Helium MFC set to  0.000000
8/29/2012	2:55:09 PM	H2 MFC set to  0.000000
8/29/2012	2:55:09 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:09 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:09 PM	Tube furnace set to 0
8/29/2012	2:55:09 PM	H2 valve closed
8/29/2012	2:55:09 PM	BCl3 valve closed
8/29/2012	2:55:09 PM	PH3 valve closed
8/29/2012	2:55:09 PM	SiCl4 pre valve closed
8/29/2012	2:55:09 PM	SiCl4 post valve closed
8/29/2012	2:55:09 PM	Bypass valve closed
8/29/2012	2:55:09 PM	Bubbler valve closed
8/29/2012	2:55:09 PM	Helium valve opened
8/29/2012	2:55:09 PM	Main Vac valve opened
8/29/2012	2:55:09 PM	Helium MFC set to  20.000000
8/29/2012	2:55:09 PM	H2 MFC set to  0.000000
8/29/2012	2:55:09 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:09 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:09 PM	Tube furnace set to 0
8/29/2012	2:55:10 PM	Helium valve closed
8/29/2012	2:55:10 PM	H2 valve closed
8/29/2012	2:55:10 PM	BCl3 valve closed
8/29/2012	2:55:10 PM	PH3 valve closed
8/29/2012	2:55:10 PM	SiCl4 pre valve closed
8/29/2012	2:55:10 PM	SiCl4 post valve closed
8/29/2012	2:55:10 PM	Bypass valve closed
8/29/2012	2:55:10 PM	Bubbler valve closed
8/29/2012	2:55:10 PM	Main Vac valve opened
8/29/2012	2:55:10 PM	Helium MFC set to  0.000000
8/29/2012	2:55:10 PM	H2 MFC set to  0.000000
8/29/2012	2:55:10 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:10 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:10 PM	Tube furnace set to 0
8/29/2012	2:55:11 PM	H2 valve closed
8/29/2012	2:55:11 PM	BCl3 valve closed
8/29/2012	2:55:11 PM	PH3 valve closed
8/29/2012	2:55:11 PM	SiCl4 pre valve closed
8/29/2012	2:55:11 PM	SiCl4 post valve closed
8/29/2012	2:55:11 PM	Bypass valve closed
8/29/2012	2:55:11 PM	Bubbler valve closed
8/29/2012	2:55:11 PM	Helium valve opened
8/29/2012	2:55:11 PM	Main Vac valve opened
8/29/2012	2:55:11 PM	Helium MFC set to  20.000000
8/29/2012	2:55:11 PM	H2 MFC set to  0.000000
8/29/2012	2:55:11 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:11 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:11 PM	Tube furnace set to 0
8/29/2012	2:55:41 PM	Helium valve closed
8/29/2012	2:55:41 PM	H2 valve closed
8/29/2012	2:55:41 PM	BCl3 valve closed
8/29/2012	2:55:41 PM	PH3 valve closed
8/29/2012	2:55:41 PM	SiCl4 pre valve closed
8/29/2012	2:55:41 PM	SiCl4 post valve closed
8/29/2012	2:55:41 PM	Bypass valve closed
8/29/2012	2:55:41 PM	Bubbler valve closed
8/29/2012	2:55:41 PM	Main Vac valve opened
8/29/2012	2:55:41 PM	Helium MFC set to  0.000000
8/29/2012	2:55:41 PM	H2 MFC set to  0.000000
8/29/2012	2:55:41 PM	BCl3 MFC set to  0.000000
8/29/2012	2:55:41 PM	PH3 MFC set to  0.000000
8/29/2012	2:55:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:55:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:55:41 PM	Tube furnace set to 0
8/29/2012	2:56:11 PM	H2 valve closed
8/29/2012	2:56:11 PM	BCl3 valve closed
8/29/2012	2:56:11 PM	PH3 valve closed
8/29/2012	2:56:11 PM	SiCl4 pre valve closed
8/29/2012	2:56:11 PM	SiCl4 post valve closed
8/29/2012	2:56:11 PM	Bypass valve closed
8/29/2012	2:56:11 PM	Bubbler valve closed
8/29/2012	2:56:11 PM	Helium valve opened
8/29/2012	2:56:11 PM	Main Vac valve opened
8/29/2012	2:56:11 PM	Helium MFC set to  20.000000
8/29/2012	2:56:11 PM	H2 MFC set to  0.000000
8/29/2012	2:56:11 PM	BCl3 MFC set to  0.000000
8/29/2012	2:56:11 PM	PH3 MFC set to  0.000000
8/29/2012	2:56:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:56:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:56:11 PM	Tube furnace set to 0
8/29/2012	2:56:41 PM	Helium valve closed
8/29/2012	2:56:41 PM	H2 valve closed
8/29/2012	2:56:41 PM	BCl3 valve closed
8/29/2012	2:56:41 PM	PH3 valve closed
8/29/2012	2:56:41 PM	SiCl4 pre valve closed
8/29/2012	2:56:41 PM	SiCl4 post valve closed
8/29/2012	2:56:41 PM	Bypass valve closed
8/29/2012	2:56:41 PM	Bubbler valve closed
8/29/2012	2:56:41 PM	Main Vac valve opened
8/29/2012	2:56:41 PM	Helium MFC set to  0.000000
8/29/2012	2:56:41 PM	H2 MFC set to  0.000000
8/29/2012	2:56:41 PM	BCl3 MFC set to  0.000000
8/29/2012	2:56:41 PM	PH3 MFC set to  0.000000
8/29/2012	2:56:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:56:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:56:42 PM	Tube furnace set to 0
8/29/2012	2:57:12 PM	H2 valve closed
8/29/2012	2:57:12 PM	BCl3 valve closed
8/29/2012	2:57:12 PM	PH3 valve closed
8/29/2012	2:57:12 PM	SiCl4 pre valve closed
8/29/2012	2:57:12 PM	SiCl4 post valve closed
8/29/2012	2:57:12 PM	Bypass valve closed
8/29/2012	2:57:12 PM	Bubbler valve closed
8/29/2012	2:57:12 PM	Helium valve opened
8/29/2012	2:57:12 PM	Main Vac valve opened
8/29/2012	2:57:12 PM	Helium MFC set to  20.000000
8/29/2012	2:57:12 PM	H2 MFC set to  0.000000
8/29/2012	2:57:12 PM	BCl3 MFC set to  0.000000
8/29/2012	2:57:12 PM	PH3 MFC set to  0.000000
8/29/2012	2:57:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:57:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:57:12 PM	Tube furnace set to 0
8/29/2012	2:57:42 PM	Helium valve closed
8/29/2012	2:57:42 PM	H2 valve closed
8/29/2012	2:57:42 PM	BCl3 valve closed
8/29/2012	2:57:42 PM	PH3 valve closed
8/29/2012	2:57:42 PM	SiCl4 pre valve closed
8/29/2012	2:57:42 PM	SiCl4 post valve closed
8/29/2012	2:57:42 PM	Bypass valve closed
8/29/2012	2:57:42 PM	Bubbler valve closed
8/29/2012	2:57:42 PM	Main Vac valve opened
8/29/2012	2:57:42 PM	Helium MFC set to  0.000000
8/29/2012	2:57:42 PM	H2 MFC set to  0.000000
8/29/2012	2:57:42 PM	BCl3 MFC set to  0.000000
8/29/2012	2:57:42 PM	PH3 MFC set to  0.000000
8/29/2012	2:57:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:57:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:57:42 PM	Tube furnace set to 0
8/29/2012	2:58:12 PM	H2 valve closed
8/29/2012	2:58:12 PM	BCl3 valve closed
8/29/2012	2:58:12 PM	PH3 valve closed
8/29/2012	2:58:12 PM	SiCl4 pre valve closed
8/29/2012	2:58:12 PM	SiCl4 post valve closed
8/29/2012	2:58:12 PM	Bypass valve closed
8/29/2012	2:58:12 PM	Bubbler valve closed
8/29/2012	2:58:12 PM	Helium valve opened
8/29/2012	2:58:12 PM	Main Vac valve opened
8/29/2012	2:58:12 PM	Helium MFC set to  20.000000
8/29/2012	2:58:12 PM	H2 MFC set to  0.000000
8/29/2012	2:58:12 PM	BCl3 MFC set to  0.000000
8/29/2012	2:58:12 PM	PH3 MFC set to  0.000000
8/29/2012	2:58:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:58:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:58:12 PM	Tube furnace set to 0
8/29/2012	2:58:42 PM	Helium valve closed
8/29/2012	2:58:42 PM	H2 valve closed
8/29/2012	2:58:42 PM	BCl3 valve closed
8/29/2012	2:58:42 PM	PH3 valve closed
8/29/2012	2:58:42 PM	SiCl4 pre valve closed
8/29/2012	2:58:42 PM	SiCl4 post valve closed
8/29/2012	2:58:42 PM	Bypass valve closed
8/29/2012	2:58:42 PM	Bubbler valve closed
8/29/2012	2:58:42 PM	Main Vac valve opened
8/29/2012	2:58:42 PM	Helium MFC set to  0.000000
8/29/2012	2:58:42 PM	H2 MFC set to  0.000000
8/29/2012	2:58:42 PM	BCl3 MFC set to  0.000000
8/29/2012	2:58:42 PM	PH3 MFC set to  0.000000
8/29/2012	2:58:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:58:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:58:43 PM	Tube furnace set to 200
8/29/2012	2:59:13 PM	H2 valve closed
8/29/2012	2:59:13 PM	BCl3 valve closed
8/29/2012	2:59:13 PM	PH3 valve closed
8/29/2012	2:59:13 PM	SiCl4 pre valve closed
8/29/2012	2:59:13 PM	SiCl4 post valve closed
8/29/2012	2:59:13 PM	Bypass valve closed
8/29/2012	2:59:13 PM	Bubbler valve closed
8/29/2012	2:59:13 PM	Helium valve opened
8/29/2012	2:59:13 PM	Main Vac valve opened
8/29/2012	2:59:13 PM	Helium MFC set to  20.000000
8/29/2012	2:59:13 PM	H2 MFC set to  0.000000
8/29/2012	2:59:13 PM	BCl3 MFC set to  0.000000
8/29/2012	2:59:13 PM	PH3 MFC set to  0.000000
8/29/2012	2:59:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:59:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:59:13 PM	Tube furnace set to 200
8/29/2012	2:59:43 PM	Helium valve closed
8/29/2012	2:59:43 PM	H2 valve closed
8/29/2012	2:59:43 PM	BCl3 valve closed
8/29/2012	2:59:43 PM	PH3 valve closed
8/29/2012	2:59:43 PM	SiCl4 pre valve closed
8/29/2012	2:59:43 PM	SiCl4 post valve closed
8/29/2012	2:59:43 PM	Bypass valve closed
8/29/2012	2:59:43 PM	Bubbler valve closed
8/29/2012	2:59:43 PM	Main Vac valve opened
8/29/2012	2:59:43 PM	Helium MFC set to  0.000000
8/29/2012	2:59:43 PM	H2 MFC set to  0.000000
8/29/2012	2:59:43 PM	BCl3 MFC set to  0.000000
8/29/2012	2:59:43 PM	PH3 MFC set to  0.000000
8/29/2012	2:59:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	2:59:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	2:59:43 PM	Tube furnace set to 200
8/29/2012	3:00:13 PM	H2 valve closed
8/29/2012	3:00:13 PM	BCl3 valve closed
8/29/2012	3:00:13 PM	PH3 valve closed
8/29/2012	3:00:13 PM	SiCl4 pre valve closed
8/29/2012	3:00:13 PM	SiCl4 post valve closed
8/29/2012	3:00:13 PM	Bypass valve closed
8/29/2012	3:00:13 PM	Bubbler valve closed
8/29/2012	3:00:13 PM	Helium valve opened
8/29/2012	3:00:13 PM	Main Vac valve opened
8/29/2012	3:00:13 PM	Helium MFC set to  20.000000
8/29/2012	3:00:13 PM	H2 MFC set to  0.000000
8/29/2012	3:00:13 PM	BCl3 MFC set to  0.000000
8/29/2012	3:00:13 PM	PH3 MFC set to  0.000000
8/29/2012	3:00:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:00:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:00:13 PM	Tube furnace set to 200
8/29/2012	3:00:43 PM	Helium valve closed
8/29/2012	3:00:43 PM	H2 valve closed
8/29/2012	3:00:43 PM	BCl3 valve closed
8/29/2012	3:00:43 PM	PH3 valve closed
8/29/2012	3:00:43 PM	SiCl4 pre valve closed
8/29/2012	3:00:43 PM	SiCl4 post valve closed
8/29/2012	3:00:43 PM	Bypass valve closed
8/29/2012	3:00:43 PM	Bubbler valve closed
8/29/2012	3:00:43 PM	Main Vac valve opened
8/29/2012	3:00:43 PM	Helium MFC set to  0.000000
8/29/2012	3:00:43 PM	H2 MFC set to  0.000000
8/29/2012	3:00:43 PM	BCl3 MFC set to  0.000000
8/29/2012	3:00:43 PM	PH3 MFC set to  0.000000
8/29/2012	3:00:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:00:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:00:44 PM	Tube furnace set to 200
8/29/2012	3:01:14 PM	H2 valve closed
8/29/2012	3:01:14 PM	BCl3 valve closed
8/29/2012	3:01:14 PM	PH3 valve closed
8/29/2012	3:01:14 PM	SiCl4 pre valve closed
8/29/2012	3:01:14 PM	SiCl4 post valve closed
8/29/2012	3:01:14 PM	Bypass valve closed
8/29/2012	3:01:14 PM	Bubbler valve closed
8/29/2012	3:01:14 PM	Helium valve opened
8/29/2012	3:01:14 PM	Main Vac valve opened
8/29/2012	3:01:14 PM	Helium MFC set to  20.000000
8/29/2012	3:01:14 PM	H2 MFC set to  0.000000
8/29/2012	3:01:14 PM	BCl3 MFC set to  0.000000
8/29/2012	3:01:14 PM	PH3 MFC set to  0.000000
8/29/2012	3:01:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:01:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:01:14 PM	Tube furnace set to 200
8/29/2012	3:01:44 PM	Helium valve closed
8/29/2012	3:01:44 PM	H2 valve closed
8/29/2012	3:01:44 PM	BCl3 valve closed
8/29/2012	3:01:44 PM	PH3 valve closed
8/29/2012	3:01:44 PM	SiCl4 pre valve closed
8/29/2012	3:01:44 PM	SiCl4 post valve closed
8/29/2012	3:01:44 PM	Bypass valve closed
8/29/2012	3:01:44 PM	Bubbler valve closed
8/29/2012	3:01:44 PM	Main Vac valve opened
8/29/2012	3:01:44 PM	Helium MFC set to  0.000000
8/29/2012	3:01:44 PM	H2 MFC set to  0.000000
8/29/2012	3:01:44 PM	BCl3 MFC set to  0.000000
8/29/2012	3:01:44 PM	PH3 MFC set to  0.000000
8/29/2012	3:01:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:01:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:01:44 PM	Tube furnace set to 200
8/29/2012	3:02:14 PM	H2 valve closed
8/29/2012	3:02:14 PM	BCl3 valve closed
8/29/2012	3:02:14 PM	PH3 valve closed
8/29/2012	3:02:14 PM	SiCl4 pre valve closed
8/29/2012	3:02:14 PM	SiCl4 post valve closed
8/29/2012	3:02:14 PM	Bypass valve closed
8/29/2012	3:02:14 PM	Bubbler valve closed
8/29/2012	3:02:14 PM	Helium valve opened
8/29/2012	3:02:14 PM	Main Vac valve opened
8/29/2012	3:02:14 PM	Helium MFC set to  20.000000
8/29/2012	3:02:14 PM	H2 MFC set to  0.000000
8/29/2012	3:02:14 PM	BCl3 MFC set to  0.000000
8/29/2012	3:02:14 PM	PH3 MFC set to  0.000000
8/29/2012	3:02:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:02:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:02:14 PM	Tube furnace set to 200
8/29/2012	3:02:44 PM	Helium valve closed
8/29/2012	3:02:44 PM	H2 valve closed
8/29/2012	3:02:44 PM	BCl3 valve closed
8/29/2012	3:02:44 PM	PH3 valve closed
8/29/2012	3:02:44 PM	SiCl4 pre valve closed
8/29/2012	3:02:44 PM	SiCl4 post valve closed
8/29/2012	3:02:44 PM	Bypass valve closed
8/29/2012	3:02:44 PM	Bubbler valve closed
8/29/2012	3:02:44 PM	Main Vac valve opened
8/29/2012	3:02:44 PM	Helium MFC set to  0.000000
8/29/2012	3:02:44 PM	H2 MFC set to  0.000000
8/29/2012	3:02:44 PM	BCl3 MFC set to  0.000000
8/29/2012	3:02:44 PM	PH3 MFC set to  0.000000
8/29/2012	3:02:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:02:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:02:44 PM	Tube furnace set to 200
8/29/2012	3:03:15 PM	H2 valve closed
8/29/2012	3:03:15 PM	BCl3 valve closed
8/29/2012	3:03:15 PM	PH3 valve closed
8/29/2012	3:03:15 PM	SiCl4 pre valve closed
8/29/2012	3:03:15 PM	SiCl4 post valve closed
8/29/2012	3:03:15 PM	Bypass valve closed
8/29/2012	3:03:15 PM	Bubbler valve closed
8/29/2012	3:03:15 PM	Helium valve opened
8/29/2012	3:03:15 PM	Main Vac valve opened
8/29/2012	3:03:15 PM	Helium MFC set to  20.000000
8/29/2012	3:03:15 PM	H2 MFC set to  0.000000
8/29/2012	3:03:15 PM	BCl3 MFC set to  0.000000
8/29/2012	3:03:15 PM	PH3 MFC set to  0.000000
8/29/2012	3:03:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:03:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:03:15 PM	Tube furnace set to 200
8/29/2012	3:03:45 PM	Helium valve closed
8/29/2012	3:03:45 PM	H2 valve closed
8/29/2012	3:03:45 PM	BCl3 valve closed
8/29/2012	3:03:45 PM	PH3 valve closed
8/29/2012	3:03:45 PM	SiCl4 pre valve closed
8/29/2012	3:03:45 PM	SiCl4 post valve closed
8/29/2012	3:03:45 PM	Bypass valve closed
8/29/2012	3:03:45 PM	Bubbler valve closed
8/29/2012	3:03:45 PM	Main Vac valve opened
8/29/2012	3:03:45 PM	Helium MFC set to  0.000000
8/29/2012	3:03:45 PM	H2 MFC set to  0.000000
8/29/2012	3:03:45 PM	BCl3 MFC set to  0.000000
8/29/2012	3:03:45 PM	PH3 MFC set to  0.000000
8/29/2012	3:03:45 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:03:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:03:45 PM	Tube furnace set to 200
8/29/2012	3:04:15 PM	H2 valve closed
8/29/2012	3:04:15 PM	BCl3 valve closed
8/29/2012	3:04:15 PM	PH3 valve closed
8/29/2012	3:04:15 PM	SiCl4 pre valve closed
8/29/2012	3:04:15 PM	SiCl4 post valve closed
8/29/2012	3:04:15 PM	Bypass valve closed
8/29/2012	3:04:15 PM	Bubbler valve closed
8/29/2012	3:04:15 PM	Helium valve opened
8/29/2012	3:04:15 PM	Main Vac valve opened
8/29/2012	3:04:15 PM	Helium MFC set to  20.000000
8/29/2012	3:04:15 PM	H2 MFC set to  0.000000
8/29/2012	3:04:15 PM	BCl3 MFC set to  0.000000
8/29/2012	3:04:15 PM	PH3 MFC set to  0.000000
8/29/2012	3:04:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:04:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:04:15 PM	Tube furnace set to 200
8/29/2012	3:04:45 PM	Helium valve closed
8/29/2012	3:04:45 PM	H2 valve closed
8/29/2012	3:04:45 PM	BCl3 valve closed
8/29/2012	3:04:45 PM	PH3 valve closed
8/29/2012	3:04:45 PM	SiCl4 pre valve closed
8/29/2012	3:04:45 PM	SiCl4 post valve closed
8/29/2012	3:04:45 PM	Bypass valve closed
8/29/2012	3:04:45 PM	Bubbler valve closed
8/29/2012	3:04:45 PM	Main Vac valve opened
8/29/2012	3:04:45 PM	Helium MFC set to  0.000000
8/29/2012	3:04:45 PM	H2 MFC set to  0.000000
8/29/2012	3:04:45 PM	BCl3 MFC set to  0.000000
8/29/2012	3:04:45 PM	PH3 MFC set to  0.000000
8/29/2012	3:04:45 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:04:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:04:45 PM	Tube furnace set to 0
8/29/2012	3:04:46 PM	Run finished at 3:04 PM
8/29/2012	3:14:19 PM	Main Vac valve closed
8/29/2012	3:14:39 PM	Main Vac valve opened
8/29/2012	3:14:57 PM	Main Vac valve closed
8/29/2012	3:15:11 PM	Main Vac valve opened
8/29/2012	3:15:52 PM	Recipe started at 3:15 PM
8/29/2012	3:15:52 PM	Helium valve closed
8/29/2012	3:15:52 PM	H2 valve closed
8/29/2012	3:15:52 PM	BCl3 valve closed
8/29/2012	3:15:52 PM	PH3 valve closed
8/29/2012	3:15:52 PM	SiCl4 pre valve closed
8/29/2012	3:15:52 PM	SiCl4 post valve closed
8/29/2012	3:15:52 PM	Main Vac valve closed
8/29/2012	3:15:52 PM	Bypass valve closed
8/29/2012	3:15:52 PM	Bubbler valve closed
8/29/2012	3:15:52 PM	Helium MFC set to  0.000000
8/29/2012	3:15:52 PM	H2 MFC set to  0.000000
8/29/2012	3:15:52 PM	BCl3 MFC set to  0.000000
8/29/2012	3:15:52 PM	PH3 MFC set to  0.000000
8/29/2012	3:15:52 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:15:52 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:15:52 PM	Tube furnace set to 0
8/29/2012	3:15:55 PM	Helium valve closed
8/29/2012	3:15:55 PM	BCl3 valve closed
8/29/2012	3:15:55 PM	PH3 valve closed
8/29/2012	3:15:55 PM	SiCl4 pre valve closed
8/29/2012	3:15:55 PM	SiCl4 post valve closed
8/29/2012	3:15:55 PM	Main Vac valve closed
8/29/2012	3:15:55 PM	Bypass valve closed
8/29/2012	3:15:55 PM	Bubbler valve closed
8/29/2012	3:15:55 PM	H2 valve opened
8/29/2012	3:15:55 PM	Helium MFC set to  0.000000
8/29/2012	3:15:55 PM	H2 MFC set to  500.000000
8/29/2012	3:15:55 PM	BCl3 MFC set to  0.000000
8/29/2012	3:15:55 PM	PH3 MFC set to  0.000000
8/29/2012	3:15:55 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:15:55 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:15:56 PM	Tube furnace set to 0
8/29/2012	3:17:07 PM	Helium valve closed
8/29/2012	3:17:07 PM	BCl3 valve closed
8/29/2012	3:17:07 PM	PH3 valve closed
8/29/2012	3:17:07 PM	SiCl4 pre valve closed
8/29/2012	3:17:07 PM	SiCl4 post valve closed
8/29/2012	3:17:07 PM	Main Vac valve closed
8/29/2012	3:17:07 PM	Bypass valve closed
8/29/2012	3:17:07 PM	H2 valve opened
8/29/2012	3:17:07 PM	Bubbler valve opened
8/29/2012	3:17:07 PM	Helium MFC set to  0.000000
8/29/2012	3:17:07 PM	H2 MFC set to  500.000000
8/29/2012	3:17:07 PM	BCl3 MFC set to  0.000000
8/29/2012	3:17:07 PM	PH3 MFC set to  0.000000
8/29/2012	3:17:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:17:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:17:07 PM	Tube furnace set to 0
8/29/2012	3:17:08 PM	Helium valve closed
8/29/2012	3:17:08 PM	BCl3 valve closed
8/29/2012	3:17:08 PM	PH3 valve closed
8/29/2012	3:17:08 PM	SiCl4 pre valve closed
8/29/2012	3:17:08 PM	SiCl4 post valve closed
8/29/2012	3:17:08 PM	Main Vac valve closed
8/29/2012	3:17:08 PM	Bypass valve closed
8/29/2012	3:17:08 PM	H2 valve opened
8/29/2012	3:17:08 PM	Bubbler valve opened
8/29/2012	3:17:08 PM	Helium MFC set to  0.000000
8/29/2012	3:17:08 PM	H2 MFC set to  500.000000
8/29/2012	3:17:08 PM	BCl3 MFC set to  0.000000
8/29/2012	3:17:08 PM	PH3 MFC set to  0.000000
8/29/2012	3:17:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:17:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:17:08 PM	Tube furnace set to 1000
8/29/2012	3:37:08 PM	Helium valve closed
8/29/2012	3:37:08 PM	PH3 valve closed
8/29/2012	3:37:08 PM	Main Vac valve closed
8/29/2012	3:37:08 PM	Bypass valve closed
8/29/2012	3:37:08 PM	H2 valve opened
8/29/2012	3:37:08 PM	BCl3 valve opened
8/29/2012	3:37:08 PM	SiCl4 pre valve opened
8/29/2012	3:37:08 PM	SiCl4 post valve opened
8/29/2012	3:37:08 PM	Bubbler valve opened
8/29/2012	3:37:08 PM	Helium MFC set to  0.000000
8/29/2012	3:37:08 PM	H2 MFC set to  450.000000
8/29/2012	3:37:08 PM	BCl3 MFC set to  1.500000
8/29/2012	3:37:08 PM	PH3 MFC set to  0.000000
8/29/2012	3:37:08 PM	SiCl4 MFC set to  50.000000
8/29/2012	3:37:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:37:09 PM	Tube furnace set to 1000
8/29/2012	3:47:09 PM	Helium valve closed
8/29/2012	3:47:09 PM	BCl3 valve closed
8/29/2012	3:47:09 PM	PH3 valve closed
8/29/2012	3:47:09 PM	SiCl4 pre valve closed
8/29/2012	3:47:09 PM	SiCl4 post valve closed
8/29/2012	3:47:09 PM	Main Vac valve closed
8/29/2012	3:47:09 PM	Bypass valve closed
8/29/2012	3:47:09 PM	H2 valve opened
8/29/2012	3:47:09 PM	Bubbler valve opened
8/29/2012	3:47:09 PM	Helium MFC set to  0.000000
8/29/2012	3:47:09 PM	H2 MFC set to  500.000000
8/29/2012	3:47:09 PM	BCl3 MFC set to  0.000000
8/29/2012	3:47:09 PM	PH3 MFC set to  0.000000
8/29/2012	3:47:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:47:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:47:09 PM	Tube furnace set to 950
8/29/2012	3:49:09 PM	Helium valve closed
8/29/2012	3:49:09 PM	BCl3 valve closed
8/29/2012	3:49:09 PM	PH3 valve closed
8/29/2012	3:49:09 PM	SiCl4 pre valve closed
8/29/2012	3:49:09 PM	SiCl4 post valve closed
8/29/2012	3:49:09 PM	Main Vac valve closed
8/29/2012	3:49:09 PM	Bypass valve closed
8/29/2012	3:49:09 PM	H2 valve opened
8/29/2012	3:49:09 PM	Bubbler valve opened
8/29/2012	3:49:09 PM	Helium MFC set to  0.000000
8/29/2012	3:49:09 PM	H2 MFC set to  500.000000
8/29/2012	3:49:09 PM	BCl3 MFC set to  0.000000
8/29/2012	3:49:09 PM	PH3 MFC set to  0.000000
8/29/2012	3:49:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:49:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:49:09 PM	Tube furnace set to 900
8/29/2012	3:51:09 PM	Helium valve closed
8/29/2012	3:51:09 PM	BCl3 valve closed
8/29/2012	3:51:09 PM	PH3 valve closed
8/29/2012	3:51:09 PM	SiCl4 pre valve closed
8/29/2012	3:51:09 PM	SiCl4 post valve closed
8/29/2012	3:51:09 PM	Main Vac valve closed
8/29/2012	3:51:09 PM	Bypass valve closed
8/29/2012	3:51:09 PM	H2 valve opened
8/29/2012	3:51:09 PM	Bubbler valve opened
8/29/2012	3:51:09 PM	Helium MFC set to  0.000000
8/29/2012	3:51:09 PM	H2 MFC set to  500.000000
8/29/2012	3:51:09 PM	BCl3 MFC set to  0.000000
8/29/2012	3:51:09 PM	PH3 MFC set to  0.000000
8/29/2012	3:51:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:51:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:51:09 PM	Tube furnace set to 850
8/29/2012	3:53:09 PM	H2 valve closed
8/29/2012	3:53:09 PM	BCl3 valve closed
8/29/2012	3:53:09 PM	PH3 valve closed
8/29/2012	3:53:09 PM	SiCl4 pre valve closed
8/29/2012	3:53:09 PM	SiCl4 post valve closed
8/29/2012	3:53:09 PM	Main Vac valve closed
8/29/2012	3:53:09 PM	Bypass valve closed
8/29/2012	3:53:09 PM	Helium valve opened
8/29/2012	3:53:09 PM	Bubbler valve opened
8/29/2012	3:53:09 PM	Helium MFC set to  500.000000
8/29/2012	3:53:09 PM	H2 MFC set to  0.000000
8/29/2012	3:53:09 PM	BCl3 MFC set to  0.000000
8/29/2012	3:53:09 PM	PH3 MFC set to  0.000000
8/29/2012	3:53:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:53:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:53:10 PM	Tube furnace set to 800
8/29/2012	3:55:10 PM	H2 valve closed
8/29/2012	3:55:10 PM	BCl3 valve closed
8/29/2012	3:55:10 PM	PH3 valve closed
8/29/2012	3:55:10 PM	SiCl4 pre valve closed
8/29/2012	3:55:10 PM	SiCl4 post valve closed
8/29/2012	3:55:10 PM	Main Vac valve closed
8/29/2012	3:55:10 PM	Bypass valve closed
8/29/2012	3:55:10 PM	Helium valve opened
8/29/2012	3:55:10 PM	Bubbler valve opened
8/29/2012	3:55:10 PM	Helium MFC set to  500.000000
8/29/2012	3:55:10 PM	H2 MFC set to  0.000000
8/29/2012	3:55:10 PM	BCl3 MFC set to  0.000000
8/29/2012	3:55:10 PM	PH3 MFC set to  0.000000
8/29/2012	3:55:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:55:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:55:10 PM	Tube furnace set to 750
8/29/2012	3:57:10 PM	H2 valve closed
8/29/2012	3:57:10 PM	BCl3 valve closed
8/29/2012	3:57:10 PM	PH3 valve closed
8/29/2012	3:57:10 PM	SiCl4 pre valve closed
8/29/2012	3:57:10 PM	SiCl4 post valve closed
8/29/2012	3:57:10 PM	Main Vac valve closed
8/29/2012	3:57:10 PM	Bypass valve closed
8/29/2012	3:57:10 PM	Helium valve opened
8/29/2012	3:57:10 PM	Bubbler valve opened
8/29/2012	3:57:10 PM	Helium MFC set to  500.000000
8/29/2012	3:57:10 PM	H2 MFC set to  0.000000
8/29/2012	3:57:10 PM	BCl3 MFC set to  0.000000
8/29/2012	3:57:10 PM	PH3 MFC set to  0.000000
8/29/2012	3:57:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	3:57:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	3:57:10 PM	Tube furnace set to 0
8/29/2012	4:17:10 PM	Helium valve closed
8/29/2012	4:17:10 PM	H2 valve closed
8/29/2012	4:17:10 PM	BCl3 valve closed
8/29/2012	4:17:10 PM	PH3 valve closed
8/29/2012	4:17:10 PM	SiCl4 pre valve closed
8/29/2012	4:17:10 PM	SiCl4 post valve closed
8/29/2012	4:17:10 PM	Main Vac valve closed
8/29/2012	4:17:10 PM	Bypass valve closed
8/29/2012	4:17:10 PM	Bubbler valve closed
8/29/2012	4:17:10 PM	Helium MFC set to  0.000000
8/29/2012	4:17:10 PM	H2 MFC set to  0.000000
8/29/2012	4:17:10 PM	BCl3 MFC set to  0.000000
8/29/2012	4:17:10 PM	PH3 MFC set to  0.000000
8/29/2012	4:17:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:17:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:17:10 PM	Tube furnace set to 0
8/29/2012	4:17:11 PM	Run finished at 4:17 PM
8/29/2012	4:35:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	4:35:12 PM	Recipe started at 4:35 PM
8/29/2012	4:35:12 PM	Helium valve closed
8/29/2012	4:35:12 PM	H2 valve closed
8/29/2012	4:35:12 PM	BCl3 valve closed
8/29/2012	4:35:12 PM	PH3 valve closed
8/29/2012	4:35:12 PM	SiCl4 pre valve closed
8/29/2012	4:35:12 PM	SiCl4 post valve closed
8/29/2012	4:35:12 PM	Main Vac valve closed
8/29/2012	4:35:12 PM	Bypass valve closed
8/29/2012	4:35:12 PM	Bubbler valve closed
8/29/2012	4:35:12 PM	Helium MFC set to  0.000000
8/29/2012	4:35:12 PM	H2 MFC set to  0.000000
8/29/2012	4:35:12 PM	BCl3 MFC set to  0.000000
8/29/2012	4:35:12 PM	PH3 MFC set to  0.000000
8/29/2012	4:35:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:35:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:35:12 PM	Tube furnace set to 0
8/29/2012	4:35:15 PM	H2 valve closed
8/29/2012	4:35:15 PM	BCl3 valve closed
8/29/2012	4:35:15 PM	PH3 valve closed
8/29/2012	4:35:15 PM	SiCl4 pre valve closed
8/29/2012	4:35:15 PM	SiCl4 post valve closed
8/29/2012	4:35:15 PM	Main Vac valve closed
8/29/2012	4:35:15 PM	Bypass valve closed
8/29/2012	4:35:15 PM	Bubbler valve closed
8/29/2012	4:35:15 PM	Helium valve opened
8/29/2012	4:35:15 PM	Helium MFC set to  500.000000
8/29/2012	4:35:15 PM	H2 MFC set to  0.000000
8/29/2012	4:35:15 PM	BCl3 MFC set to  0.000000
8/29/2012	4:35:15 PM	PH3 MFC set to  0.000000
8/29/2012	4:35:15 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:35:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:35:16 PM	Tube furnace set to 0
8/29/2012	4:35:22 PM	Helium valve closed
8/29/2012	4:35:22 PM	H2 valve closed
8/29/2012	4:35:22 PM	BCl3 valve closed
8/29/2012	4:35:22 PM	PH3 valve closed
8/29/2012	4:35:22 PM	SiCl4 pre valve closed
8/29/2012	4:35:22 PM	SiCl4 post valve closed
8/29/2012	4:35:22 PM	Main Vac valve closed
8/29/2012	4:35:22 PM	Bypass valve closed
8/29/2012	4:35:22 PM	Bubbler valve closed
8/29/2012	4:35:22 PM	Helium MFC set to  0.000000
8/29/2012	4:35:22 PM	H2 MFC set to  0.000000
8/29/2012	4:35:22 PM	BCl3 MFC set to  0.000000
8/29/2012	4:35:22 PM	PH3 MFC set to  0.000000
8/29/2012	4:35:22 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:35:22 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:35:22 PM	Tube furnace set to 0
8/29/2012	4:35:23 PM	Run finished at 4:35 PM
8/29/2012	4:35:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	4:38:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	4:38:45 PM	Recipe started at 4:38 PM
8/29/2012	4:38:45 PM	Helium valve closed
8/29/2012	4:38:45 PM	H2 valve closed
8/29/2012	4:38:45 PM	BCl3 valve closed
8/29/2012	4:38:45 PM	PH3 valve closed
8/29/2012	4:38:45 PM	SiCl4 pre valve closed
8/29/2012	4:38:45 PM	SiCl4 post valve closed
8/29/2012	4:38:45 PM	Main Vac valve closed
8/29/2012	4:38:45 PM	Bubbler valve closed
8/29/2012	4:38:45 PM	Bypass valve opened
8/29/2012	4:38:45 PM	Helium MFC set to  0.000000
8/29/2012	4:38:45 PM	H2 MFC set to  0.000000
8/29/2012	4:38:45 PM	BCl3 MFC set to  0.000000
8/29/2012	4:38:46 PM	PH3 MFC set to  0.000000
8/29/2012	4:38:46 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:38:46 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:38:46 PM	Tube furnace set to 0
8/29/2012	4:40:01 PM	Helium valve closed
8/29/2012	4:40:01 PM	H2 valve closed
8/29/2012	4:40:01 PM	BCl3 valve closed
8/29/2012	4:40:01 PM	PH3 valve closed
8/29/2012	4:40:01 PM	SiCl4 pre valve closed
8/29/2012	4:40:01 PM	SiCl4 post valve closed
8/29/2012	4:40:01 PM	Main Vac valve closed
8/29/2012	4:40:01 PM	Bubbler valve closed
8/29/2012	4:40:01 PM	Bypass valve opened
8/29/2012	4:40:01 PM	Helium MFC set to  0.000000
8/29/2012	4:40:01 PM	H2 MFC set to  0.000000
8/29/2012	4:40:01 PM	BCl3 MFC set to  0.000000
8/29/2012	4:40:01 PM	PH3 MFC set to  0.000000
8/29/2012	4:40:01 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:40:01 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:40:01 PM	Tube furnace set to 0
8/29/2012	4:41:01 PM	Helium valve closed
8/29/2012	4:41:01 PM	H2 valve closed
8/29/2012	4:41:01 PM	BCl3 valve closed
8/29/2012	4:41:01 PM	PH3 valve closed
8/29/2012	4:41:01 PM	SiCl4 pre valve closed
8/29/2012	4:41:01 PM	SiCl4 post valve closed
8/29/2012	4:41:01 PM	Bypass valve closed
8/29/2012	4:41:01 PM	Bubbler valve closed
8/29/2012	4:41:01 PM	Main Vac valve opened
8/29/2012	4:41:01 PM	Helium MFC set to  0.000000
8/29/2012	4:41:01 PM	H2 MFC set to  0.000000
8/29/2012	4:41:01 PM	BCl3 MFC set to  0.000000
8/29/2012	4:41:01 PM	PH3 MFC set to  0.000000
8/29/2012	4:41:01 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:41:01 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:41:01 PM	Tube furnace set to 0
8/29/2012	4:41:02 PM	Run finished at 4:41 PM
8/29/2012	4:41:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	4:53:17 PM	Recipe started at 4:53 PM
8/29/2012	4:53:17 PM	Helium valve closed
8/29/2012	4:53:17 PM	H2 valve closed
8/29/2012	4:53:17 PM	BCl3 valve closed
8/29/2012	4:53:17 PM	PH3 valve closed
8/29/2012	4:53:17 PM	SiCl4 pre valve closed
8/29/2012	4:53:17 PM	SiCl4 post valve closed
8/29/2012	4:53:17 PM	Bypass valve closed
8/29/2012	4:53:17 PM	Bubbler valve closed
8/29/2012	4:53:17 PM	Main Vac valve opened
8/29/2012	4:53:17 PM	Helium MFC set to  0.000000
8/29/2012	4:53:17 PM	H2 MFC set to  0.000000
8/29/2012	4:53:17 PM	BCl3 MFC set to  0.000000
8/29/2012	4:53:17 PM	PH3 MFC set to  0.000000
8/29/2012	4:53:17 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:53:17 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:53:18 PM	Tube furnace set to 0
8/29/2012	4:53:48 PM	H2 valve closed
8/29/2012	4:53:48 PM	BCl3 valve closed
8/29/2012	4:53:48 PM	PH3 valve closed
8/29/2012	4:53:48 PM	SiCl4 pre valve closed
8/29/2012	4:53:48 PM	SiCl4 post valve closed
8/29/2012	4:53:48 PM	Bypass valve closed
8/29/2012	4:53:48 PM	Bubbler valve closed
8/29/2012	4:53:48 PM	Helium valve opened
8/29/2012	4:53:48 PM	Main Vac valve opened
8/29/2012	4:53:48 PM	Helium MFC set to  20.000000
8/29/2012	4:53:48 PM	H2 MFC set to  0.000000
8/29/2012	4:53:48 PM	BCl3 MFC set to  0.000000
8/29/2012	4:53:48 PM	PH3 MFC set to  0.000000
8/29/2012	4:53:48 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:53:48 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:53:48 PM	Tube furnace set to 0
8/29/2012	4:54:18 PM	Helium valve closed
8/29/2012	4:54:18 PM	H2 valve closed
8/29/2012	4:54:18 PM	BCl3 valve closed
8/29/2012	4:54:18 PM	PH3 valve closed
8/29/2012	4:54:18 PM	SiCl4 pre valve closed
8/29/2012	4:54:18 PM	SiCl4 post valve closed
8/29/2012	4:54:18 PM	Bypass valve closed
8/29/2012	4:54:18 PM	Bubbler valve closed
8/29/2012	4:54:18 PM	Main Vac valve opened
8/29/2012	4:54:18 PM	Helium MFC set to  0.000000
8/29/2012	4:54:18 PM	H2 MFC set to  0.000000
8/29/2012	4:54:18 PM	BCl3 MFC set to  0.000000
8/29/2012	4:54:18 PM	PH3 MFC set to  0.000000
8/29/2012	4:54:18 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:54:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:54:18 PM	Tube furnace set to 0
8/29/2012	4:54:48 PM	H2 valve closed
8/29/2012	4:54:48 PM	BCl3 valve closed
8/29/2012	4:54:48 PM	PH3 valve closed
8/29/2012	4:54:48 PM	SiCl4 pre valve closed
8/29/2012	4:54:48 PM	SiCl4 post valve closed
8/29/2012	4:54:48 PM	Bypass valve closed
8/29/2012	4:54:48 PM	Bubbler valve closed
8/29/2012	4:54:48 PM	Helium valve opened
8/29/2012	4:54:48 PM	Main Vac valve opened
8/29/2012	4:54:48 PM	Helium MFC set to  20.000000
8/29/2012	4:54:48 PM	H2 MFC set to  0.000000
8/29/2012	4:54:48 PM	BCl3 MFC set to  0.000000
8/29/2012	4:54:48 PM	PH3 MFC set to  0.000000
8/29/2012	4:54:48 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:54:48 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:54:48 PM	Tube furnace set to 0
8/29/2012	4:55:18 PM	Helium valve closed
8/29/2012	4:55:18 PM	H2 valve closed
8/29/2012	4:55:18 PM	BCl3 valve closed
8/29/2012	4:55:18 PM	PH3 valve closed
8/29/2012	4:55:18 PM	SiCl4 pre valve closed
8/29/2012	4:55:18 PM	SiCl4 post valve closed
8/29/2012	4:55:18 PM	Bypass valve closed
8/29/2012	4:55:18 PM	Bubbler valve closed
8/29/2012	4:55:18 PM	Main Vac valve opened
8/29/2012	4:55:18 PM	Helium MFC set to  0.000000
8/29/2012	4:55:18 PM	H2 MFC set to  0.000000
8/29/2012	4:55:18 PM	BCl3 MFC set to  0.000000
8/29/2012	4:55:18 PM	PH3 MFC set to  0.000000
8/29/2012	4:55:18 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:55:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:55:19 PM	Tube furnace set to 0
8/29/2012	4:55:49 PM	H2 valve closed
8/29/2012	4:55:49 PM	BCl3 valve closed
8/29/2012	4:55:49 PM	PH3 valve closed
8/29/2012	4:55:49 PM	SiCl4 pre valve closed
8/29/2012	4:55:49 PM	SiCl4 post valve closed
8/29/2012	4:55:49 PM	Bypass valve closed
8/29/2012	4:55:49 PM	Bubbler valve closed
8/29/2012	4:55:49 PM	Helium valve opened
8/29/2012	4:55:49 PM	Main Vac valve opened
8/29/2012	4:55:49 PM	Helium MFC set to  20.000000
8/29/2012	4:55:49 PM	H2 MFC set to  0.000000
8/29/2012	4:55:49 PM	BCl3 MFC set to  0.000000
8/29/2012	4:55:49 PM	PH3 MFC set to  0.000000
8/29/2012	4:55:49 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:55:49 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:55:49 PM	Tube furnace set to 0
8/29/2012	4:56:19 PM	Helium valve closed
8/29/2012	4:56:19 PM	H2 valve closed
8/29/2012	4:56:19 PM	BCl3 valve closed
8/29/2012	4:56:19 PM	PH3 valve closed
8/29/2012	4:56:19 PM	SiCl4 pre valve closed
8/29/2012	4:56:19 PM	SiCl4 post valve closed
8/29/2012	4:56:19 PM	Bypass valve closed
8/29/2012	4:56:19 PM	Bubbler valve closed
8/29/2012	4:56:19 PM	Main Vac valve opened
8/29/2012	4:56:19 PM	Helium MFC set to  0.000000
8/29/2012	4:56:19 PM	H2 MFC set to  0.000000
8/29/2012	4:56:19 PM	BCl3 MFC set to  0.000000
8/29/2012	4:56:19 PM	PH3 MFC set to  0.000000
8/29/2012	4:56:19 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:56:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:56:19 PM	Tube furnace set to 0
8/29/2012	4:56:49 PM	H2 valve closed
8/29/2012	4:56:49 PM	BCl3 valve closed
8/29/2012	4:56:49 PM	PH3 valve closed
8/29/2012	4:56:49 PM	SiCl4 pre valve closed
8/29/2012	4:56:49 PM	SiCl4 post valve closed
8/29/2012	4:56:49 PM	Bypass valve closed
8/29/2012	4:56:49 PM	Bubbler valve closed
8/29/2012	4:56:49 PM	Helium valve opened
8/29/2012	4:56:49 PM	Main Vac valve opened
8/29/2012	4:56:49 PM	Helium MFC set to  20.000000
8/29/2012	4:56:49 PM	H2 MFC set to  0.000000
8/29/2012	4:56:49 PM	BCl3 MFC set to  0.000000
8/29/2012	4:56:49 PM	PH3 MFC set to  0.000000
8/29/2012	4:56:49 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:56:49 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:56:49 PM	Tube furnace set to 0
8/29/2012	4:57:19 PM	Helium valve closed
8/29/2012	4:57:19 PM	H2 valve closed
8/29/2012	4:57:19 PM	BCl3 valve closed
8/29/2012	4:57:19 PM	PH3 valve closed
8/29/2012	4:57:19 PM	SiCl4 pre valve closed
8/29/2012	4:57:19 PM	SiCl4 post valve closed
8/29/2012	4:57:19 PM	Bypass valve closed
8/29/2012	4:57:19 PM	Bubbler valve closed
8/29/2012	4:57:19 PM	Main Vac valve opened
8/29/2012	4:57:19 PM	Helium MFC set to  0.000000
8/29/2012	4:57:19 PM	H2 MFC set to  0.000000
8/29/2012	4:57:19 PM	BCl3 MFC set to  0.000000
8/29/2012	4:57:19 PM	PH3 MFC set to  0.000000
8/29/2012	4:57:19 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:57:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:57:20 PM	Tube furnace set to 0
8/29/2012	4:57:50 PM	H2 valve closed
8/29/2012	4:57:50 PM	BCl3 valve closed
8/29/2012	4:57:50 PM	PH3 valve closed
8/29/2012	4:57:50 PM	SiCl4 pre valve closed
8/29/2012	4:57:50 PM	SiCl4 post valve closed
8/29/2012	4:57:50 PM	Bypass valve closed
8/29/2012	4:57:50 PM	Bubbler valve closed
8/29/2012	4:57:50 PM	Helium valve opened
8/29/2012	4:57:50 PM	Main Vac valve opened
8/29/2012	4:57:50 PM	Helium MFC set to  20.000000
8/29/2012	4:57:50 PM	H2 MFC set to  0.000000
8/29/2012	4:57:50 PM	BCl3 MFC set to  0.000000
8/29/2012	4:57:50 PM	PH3 MFC set to  0.000000
8/29/2012	4:57:50 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:57:50 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:57:50 PM	Tube furnace set to 0
8/29/2012	4:58:02 PM	Helium valve closed
8/29/2012	4:58:02 PM	H2 valve closed
8/29/2012	4:58:02 PM	BCl3 valve closed
8/29/2012	4:58:02 PM	PH3 valve closed
8/29/2012	4:58:02 PM	SiCl4 pre valve closed
8/29/2012	4:58:02 PM	SiCl4 post valve closed
8/29/2012	4:58:02 PM	Bypass valve closed
8/29/2012	4:58:02 PM	Bubbler valve closed
8/29/2012	4:58:02 PM	Main Vac valve opened
8/29/2012	4:58:02 PM	Helium MFC set to  0.000000
8/29/2012	4:58:02 PM	H2 MFC set to  0.000000
8/29/2012	4:58:02 PM	BCl3 MFC set to  0.000000
8/29/2012	4:58:02 PM	PH3 MFC set to  0.000000
8/29/2012	4:58:02 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:58:02 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:58:02 PM	Tube furnace set to 0
8/29/2012	4:58:03 PM	H2 valve closed
8/29/2012	4:58:03 PM	BCl3 valve closed
8/29/2012	4:58:03 PM	PH3 valve closed
8/29/2012	4:58:03 PM	SiCl4 pre valve closed
8/29/2012	4:58:03 PM	SiCl4 post valve closed
8/29/2012	4:58:03 PM	Bypass valve closed
8/29/2012	4:58:03 PM	Bubbler valve closed
8/29/2012	4:58:03 PM	Helium valve opened
8/29/2012	4:58:03 PM	Main Vac valve opened
8/29/2012	4:58:03 PM	Helium MFC set to  20.000000
8/29/2012	4:58:03 PM	H2 MFC set to  0.000000
8/29/2012	4:58:03 PM	BCl3 MFC set to  0.000000
8/29/2012	4:58:03 PM	PH3 MFC set to  0.000000
8/29/2012	4:58:03 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:58:03 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:58:03 PM	Tube furnace set to 0
8/29/2012	4:58:04 PM	Helium valve closed
8/29/2012	4:58:04 PM	H2 valve closed
8/29/2012	4:58:04 PM	BCl3 valve closed
8/29/2012	4:58:04 PM	PH3 valve closed
8/29/2012	4:58:04 PM	SiCl4 pre valve closed
8/29/2012	4:58:04 PM	SiCl4 post valve closed
8/29/2012	4:58:04 PM	Bypass valve closed
8/29/2012	4:58:04 PM	Bubbler valve closed
8/29/2012	4:58:04 PM	Main Vac valve opened
8/29/2012	4:58:04 PM	Helium MFC set to  0.000000
8/29/2012	4:58:04 PM	H2 MFC set to  0.000000
8/29/2012	4:58:04 PM	BCl3 MFC set to  0.000000
8/29/2012	4:58:04 PM	PH3 MFC set to  0.000000
8/29/2012	4:58:04 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:58:04 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:58:04 PM	Tube furnace set to 0
8/29/2012	4:58:34 PM	H2 valve closed
8/29/2012	4:58:34 PM	BCl3 valve closed
8/29/2012	4:58:34 PM	PH3 valve closed
8/29/2012	4:58:34 PM	SiCl4 pre valve closed
8/29/2012	4:58:34 PM	SiCl4 post valve closed
8/29/2012	4:58:34 PM	Bypass valve closed
8/29/2012	4:58:34 PM	Bubbler valve closed
8/29/2012	4:58:34 PM	Helium valve opened
8/29/2012	4:58:34 PM	Main Vac valve opened
8/29/2012	4:58:34 PM	Helium MFC set to  20.000000
8/29/2012	4:58:34 PM	H2 MFC set to  0.000000
8/29/2012	4:58:34 PM	BCl3 MFC set to  0.000000
8/29/2012	4:58:34 PM	PH3 MFC set to  0.000000
8/29/2012	4:58:34 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:58:34 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:58:34 PM	Tube furnace set to 0
8/29/2012	4:59:04 PM	Helium valve closed
8/29/2012	4:59:04 PM	H2 valve closed
8/29/2012	4:59:04 PM	BCl3 valve closed
8/29/2012	4:59:04 PM	PH3 valve closed
8/29/2012	4:59:04 PM	SiCl4 pre valve closed
8/29/2012	4:59:04 PM	SiCl4 post valve closed
8/29/2012	4:59:04 PM	Bypass valve closed
8/29/2012	4:59:04 PM	Bubbler valve closed
8/29/2012	4:59:04 PM	Main Vac valve opened
8/29/2012	4:59:04 PM	Helium MFC set to  0.000000
8/29/2012	4:59:04 PM	H2 MFC set to  0.000000
8/29/2012	4:59:04 PM	BCl3 MFC set to  0.000000
8/29/2012	4:59:04 PM	PH3 MFC set to  0.000000
8/29/2012	4:59:04 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:59:04 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:59:04 PM	Tube furnace set to 0
8/29/2012	4:59:34 PM	H2 valve closed
8/29/2012	4:59:34 PM	BCl3 valve closed
8/29/2012	4:59:34 PM	PH3 valve closed
8/29/2012	4:59:34 PM	SiCl4 pre valve closed
8/29/2012	4:59:34 PM	SiCl4 post valve closed
8/29/2012	4:59:34 PM	Bypass valve closed
8/29/2012	4:59:34 PM	Bubbler valve closed
8/29/2012	4:59:34 PM	Helium valve opened
8/29/2012	4:59:34 PM	Main Vac valve opened
8/29/2012	4:59:34 PM	Helium MFC set to  20.000000
8/29/2012	4:59:34 PM	H2 MFC set to  0.000000
8/29/2012	4:59:34 PM	BCl3 MFC set to  0.000000
8/29/2012	4:59:34 PM	PH3 MFC set to  0.000000
8/29/2012	4:59:34 PM	SiCl4 MFC set to  0.000000
8/29/2012	4:59:34 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	4:59:34 PM	Tube furnace set to 0
8/29/2012	5:00:04 PM	Helium valve closed
8/29/2012	5:00:04 PM	H2 valve closed
8/29/2012	5:00:04 PM	BCl3 valve closed
8/29/2012	5:00:04 PM	PH3 valve closed
8/29/2012	5:00:04 PM	SiCl4 pre valve closed
8/29/2012	5:00:04 PM	SiCl4 post valve closed
8/29/2012	5:00:04 PM	Bypass valve closed
8/29/2012	5:00:05 PM	Bubbler valve closed
8/29/2012	5:00:05 PM	Main Vac valve opened
8/29/2012	5:00:05 PM	Helium MFC set to  0.000000
8/29/2012	5:00:05 PM	H2 MFC set to  0.000000
8/29/2012	5:00:05 PM	BCl3 MFC set to  0.000000
8/29/2012	5:00:05 PM	PH3 MFC set to  0.000000
8/29/2012	5:00:05 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:00:05 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:00:05 PM	Tube furnace set to 0
8/29/2012	5:00:35 PM	H2 valve closed
8/29/2012	5:00:35 PM	BCl3 valve closed
8/29/2012	5:00:35 PM	PH3 valve closed
8/29/2012	5:00:35 PM	SiCl4 pre valve closed
8/29/2012	5:00:35 PM	SiCl4 post valve closed
8/29/2012	5:00:35 PM	Bypass valve closed
8/29/2012	5:00:35 PM	Bubbler valve closed
8/29/2012	5:00:35 PM	Helium valve opened
8/29/2012	5:00:35 PM	Main Vac valve opened
8/29/2012	5:00:35 PM	Helium MFC set to  20.000000
8/29/2012	5:00:35 PM	H2 MFC set to  0.000000
8/29/2012	5:00:35 PM	BCl3 MFC set to  0.000000
8/29/2012	5:00:35 PM	PH3 MFC set to  0.000000
8/29/2012	5:00:35 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:00:35 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:00:35 PM	Tube furnace set to 0
8/29/2012	5:01:05 PM	Helium valve closed
8/29/2012	5:01:05 PM	H2 valve closed
8/29/2012	5:01:05 PM	BCl3 valve closed
8/29/2012	5:01:05 PM	PH3 valve closed
8/29/2012	5:01:05 PM	SiCl4 pre valve closed
8/29/2012	5:01:05 PM	SiCl4 post valve closed
8/29/2012	5:01:05 PM	Bypass valve closed
8/29/2012	5:01:05 PM	Bubbler valve closed
8/29/2012	5:01:05 PM	Main Vac valve opened
8/29/2012	5:01:05 PM	Helium MFC set to  0.000000
8/29/2012	5:01:05 PM	H2 MFC set to  0.000000
8/29/2012	5:01:05 PM	BCl3 MFC set to  0.000000
8/29/2012	5:01:05 PM	PH3 MFC set to  0.000000
8/29/2012	5:01:05 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:01:05 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:01:05 PM	Tube furnace set to 200
8/29/2012	5:01:35 PM	H2 valve closed
8/29/2012	5:01:35 PM	BCl3 valve closed
8/29/2012	5:01:35 PM	PH3 valve closed
8/29/2012	5:01:35 PM	SiCl4 pre valve closed
8/29/2012	5:01:35 PM	SiCl4 post valve closed
8/29/2012	5:01:35 PM	Bypass valve closed
8/29/2012	5:01:35 PM	Bubbler valve closed
8/29/2012	5:01:35 PM	Helium valve opened
8/29/2012	5:01:35 PM	Main Vac valve opened
8/29/2012	5:01:35 PM	Helium MFC set to  20.000000
8/29/2012	5:01:35 PM	H2 MFC set to  0.000000
8/29/2012	5:01:35 PM	BCl3 MFC set to  0.000000
8/29/2012	5:01:35 PM	PH3 MFC set to  0.000000
8/29/2012	5:01:35 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:01:35 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:01:35 PM	Tube furnace set to 200
8/29/2012	5:02:05 PM	Helium valve closed
8/29/2012	5:02:05 PM	H2 valve closed
8/29/2012	5:02:05 PM	BCl3 valve closed
8/29/2012	5:02:05 PM	PH3 valve closed
8/29/2012	5:02:05 PM	SiCl4 pre valve closed
8/29/2012	5:02:05 PM	SiCl4 post valve closed
8/29/2012	5:02:05 PM	Bypass valve closed
8/29/2012	5:02:05 PM	Bubbler valve closed
8/29/2012	5:02:05 PM	Main Vac valve opened
8/29/2012	5:02:05 PM	Helium MFC set to  0.000000
8/29/2012	5:02:05 PM	H2 MFC set to  0.000000
8/29/2012	5:02:05 PM	BCl3 MFC set to  0.000000
8/29/2012	5:02:05 PM	PH3 MFC set to  0.000000
8/29/2012	5:02:05 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:02:05 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:02:06 PM	Tube furnace set to 200
8/29/2012	5:02:36 PM	H2 valve closed
8/29/2012	5:02:36 PM	BCl3 valve closed
8/29/2012	5:02:36 PM	PH3 valve closed
8/29/2012	5:02:36 PM	SiCl4 pre valve closed
8/29/2012	5:02:36 PM	SiCl4 post valve closed
8/29/2012	5:02:36 PM	Bypass valve closed
8/29/2012	5:02:36 PM	Bubbler valve closed
8/29/2012	5:02:36 PM	Helium valve opened
8/29/2012	5:02:36 PM	Main Vac valve opened
8/29/2012	5:02:36 PM	Helium MFC set to  20.000000
8/29/2012	5:02:36 PM	H2 MFC set to  0.000000
8/29/2012	5:02:36 PM	BCl3 MFC set to  0.000000
8/29/2012	5:02:36 PM	PH3 MFC set to  0.000000
8/29/2012	5:02:36 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:02:36 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:02:36 PM	Tube furnace set to 200
8/29/2012	5:03:06 PM	Helium valve closed
8/29/2012	5:03:06 PM	H2 valve closed
8/29/2012	5:03:06 PM	BCl3 valve closed
8/29/2012	5:03:06 PM	PH3 valve closed
8/29/2012	5:03:06 PM	SiCl4 pre valve closed
8/29/2012	5:03:06 PM	SiCl4 post valve closed
8/29/2012	5:03:06 PM	Bypass valve closed
8/29/2012	5:03:06 PM	Bubbler valve closed
8/29/2012	5:03:06 PM	Main Vac valve opened
8/29/2012	5:03:06 PM	Helium MFC set to  0.000000
8/29/2012	5:03:06 PM	H2 MFC set to  0.000000
8/29/2012	5:03:06 PM	BCl3 MFC set to  0.000000
8/29/2012	5:03:06 PM	PH3 MFC set to  0.000000
8/29/2012	5:03:06 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:03:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:03:06 PM	Tube furnace set to 200
8/29/2012	5:03:36 PM	H2 valve closed
8/29/2012	5:03:36 PM	BCl3 valve closed
8/29/2012	5:03:36 PM	PH3 valve closed
8/29/2012	5:03:36 PM	SiCl4 pre valve closed
8/29/2012	5:03:36 PM	SiCl4 post valve closed
8/29/2012	5:03:36 PM	Bypass valve closed
8/29/2012	5:03:36 PM	Bubbler valve closed
8/29/2012	5:03:36 PM	Helium valve opened
8/29/2012	5:03:36 PM	Main Vac valve opened
8/29/2012	5:03:36 PM	Helium MFC set to  20.000000
8/29/2012	5:03:36 PM	H2 MFC set to  0.000000
8/29/2012	5:03:36 PM	BCl3 MFC set to  0.000000
8/29/2012	5:03:36 PM	PH3 MFC set to  0.000000
8/29/2012	5:03:36 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:03:36 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:03:36 PM	Tube furnace set to 200
8/29/2012	5:04:06 PM	Helium valve closed
8/29/2012	5:04:06 PM	H2 valve closed
8/29/2012	5:04:06 PM	BCl3 valve closed
8/29/2012	5:04:06 PM	PH3 valve closed
8/29/2012	5:04:06 PM	SiCl4 pre valve closed
8/29/2012	5:04:06 PM	SiCl4 post valve closed
8/29/2012	5:04:06 PM	Bypass valve closed
8/29/2012	5:04:06 PM	Bubbler valve closed
8/29/2012	5:04:06 PM	Main Vac valve opened
8/29/2012	5:04:06 PM	Helium MFC set to  0.000000
8/29/2012	5:04:06 PM	H2 MFC set to  0.000000
8/29/2012	5:04:06 PM	BCl3 MFC set to  0.000000
8/29/2012	5:04:06 PM	PH3 MFC set to  0.000000
8/29/2012	5:04:06 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:04:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:04:07 PM	Tube furnace set to 200
8/29/2012	5:04:37 PM	H2 valve closed
8/29/2012	5:04:37 PM	BCl3 valve closed
8/29/2012	5:04:37 PM	PH3 valve closed
8/29/2012	5:04:37 PM	SiCl4 pre valve closed
8/29/2012	5:04:37 PM	SiCl4 post valve closed
8/29/2012	5:04:37 PM	Bypass valve closed
8/29/2012	5:04:37 PM	Bubbler valve closed
8/29/2012	5:04:37 PM	Helium valve opened
8/29/2012	5:04:37 PM	Main Vac valve opened
8/29/2012	5:04:37 PM	Helium MFC set to  20.000000
8/29/2012	5:04:37 PM	H2 MFC set to  0.000000
8/29/2012	5:04:37 PM	BCl3 MFC set to  0.000000
8/29/2012	5:04:37 PM	PH3 MFC set to  0.000000
8/29/2012	5:04:37 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:04:37 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:04:37 PM	Tube furnace set to 200
8/29/2012	5:05:07 PM	Helium valve closed
8/29/2012	5:05:07 PM	H2 valve closed
8/29/2012	5:05:07 PM	BCl3 valve closed
8/29/2012	5:05:07 PM	PH3 valve closed
8/29/2012	5:05:07 PM	SiCl4 pre valve closed
8/29/2012	5:05:07 PM	SiCl4 post valve closed
8/29/2012	5:05:07 PM	Bypass valve closed
8/29/2012	5:05:07 PM	Bubbler valve closed
8/29/2012	5:05:07 PM	Main Vac valve opened
8/29/2012	5:05:07 PM	Helium MFC set to  0.000000
8/29/2012	5:05:07 PM	H2 MFC set to  0.000000
8/29/2012	5:05:07 PM	BCl3 MFC set to  0.000000
8/29/2012	5:05:07 PM	PH3 MFC set to  0.000000
8/29/2012	5:05:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:05:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:05:07 PM	Tube furnace set to 200
8/29/2012	5:05:37 PM	H2 valve closed
8/29/2012	5:05:37 PM	BCl3 valve closed
8/29/2012	5:05:37 PM	PH3 valve closed
8/29/2012	5:05:37 PM	SiCl4 pre valve closed
8/29/2012	5:05:37 PM	SiCl4 post valve closed
8/29/2012	5:05:37 PM	Bypass valve closed
8/29/2012	5:05:37 PM	Bubbler valve closed
8/29/2012	5:05:37 PM	Helium valve opened
8/29/2012	5:05:37 PM	Main Vac valve opened
8/29/2012	5:05:37 PM	Helium MFC set to  20.000000
8/29/2012	5:05:37 PM	H2 MFC set to  0.000000
8/29/2012	5:05:37 PM	BCl3 MFC set to  0.000000
8/29/2012	5:05:37 PM	PH3 MFC set to  0.000000
8/29/2012	5:05:37 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:05:37 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:05:37 PM	Tube furnace set to 200
8/29/2012	5:06:07 PM	Helium valve closed
8/29/2012	5:06:07 PM	H2 valve closed
8/29/2012	5:06:07 PM	BCl3 valve closed
8/29/2012	5:06:07 PM	PH3 valve closed
8/29/2012	5:06:07 PM	SiCl4 pre valve closed
8/29/2012	5:06:07 PM	SiCl4 post valve closed
8/29/2012	5:06:07 PM	Bypass valve closed
8/29/2012	5:06:07 PM	Bubbler valve closed
8/29/2012	5:06:07 PM	Main Vac valve opened
8/29/2012	5:06:07 PM	Helium MFC set to  0.000000
8/29/2012	5:06:07 PM	H2 MFC set to  0.000000
8/29/2012	5:06:07 PM	BCl3 MFC set to  0.000000
8/29/2012	5:06:07 PM	PH3 MFC set to  0.000000
8/29/2012	5:06:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:06:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:06:08 PM	Tube furnace set to 200
8/29/2012	5:06:38 PM	H2 valve closed
8/29/2012	5:06:38 PM	BCl3 valve closed
8/29/2012	5:06:38 PM	PH3 valve closed
8/29/2012	5:06:38 PM	SiCl4 pre valve closed
8/29/2012	5:06:38 PM	SiCl4 post valve closed
8/29/2012	5:06:38 PM	Bypass valve closed
8/29/2012	5:06:38 PM	Bubbler valve closed
8/29/2012	5:06:38 PM	Helium valve opened
8/29/2012	5:06:38 PM	Main Vac valve opened
8/29/2012	5:06:38 PM	Helium MFC set to  20.000000
8/29/2012	5:06:38 PM	H2 MFC set to  0.000000
8/29/2012	5:06:38 PM	BCl3 MFC set to  0.000000
8/29/2012	5:06:38 PM	PH3 MFC set to  0.000000
8/29/2012	5:06:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:06:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:06:38 PM	Tube furnace set to 200
8/29/2012	5:07:08 PM	Helium valve closed
8/29/2012	5:07:08 PM	H2 valve closed
8/29/2012	5:07:08 PM	BCl3 valve closed
8/29/2012	5:07:08 PM	PH3 valve closed
8/29/2012	5:07:08 PM	SiCl4 pre valve closed
8/29/2012	5:07:08 PM	SiCl4 post valve closed
8/29/2012	5:07:08 PM	Bypass valve closed
8/29/2012	5:07:08 PM	Bubbler valve closed
8/29/2012	5:07:08 PM	Main Vac valve opened
8/29/2012	5:07:08 PM	Helium MFC set to  0.000000
8/29/2012	5:07:08 PM	H2 MFC set to  0.000000
8/29/2012	5:07:08 PM	BCl3 MFC set to  0.000000
8/29/2012	5:07:08 PM	PH3 MFC set to  0.000000
8/29/2012	5:07:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:07:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:07:08 PM	Tube furnace set to 0
8/29/2012	5:07:09 PM	Run finished at 5:07 PM
8/29/2012	5:26:31 PM	Recipe started at 5:26 PM
8/29/2012	5:26:31 PM	Helium valve closed
8/29/2012	5:26:31 PM	H2 valve closed
8/29/2012	5:26:31 PM	BCl3 valve closed
8/29/2012	5:26:31 PM	PH3 valve closed
8/29/2012	5:26:31 PM	SiCl4 pre valve closed
8/29/2012	5:26:31 PM	SiCl4 post valve closed
8/29/2012	5:26:31 PM	Bypass valve closed
8/29/2012	5:26:31 PM	Bubbler valve closed
8/29/2012	5:26:31 PM	Main Vac valve opened
8/29/2012	5:26:31 PM	Helium MFC set to  0.000000
8/29/2012	5:26:31 PM	H2 MFC set to  0.000000
8/29/2012	5:26:31 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:31 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:31 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:31 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:31 PM	Tube furnace set to 0
8/29/2012	5:26:34 PM	H2 valve closed
8/29/2012	5:26:34 PM	BCl3 valve closed
8/29/2012	5:26:34 PM	PH3 valve closed
8/29/2012	5:26:34 PM	SiCl4 pre valve closed
8/29/2012	5:26:34 PM	SiCl4 post valve closed
8/29/2012	5:26:34 PM	Bypass valve closed
8/29/2012	5:26:34 PM	Bubbler valve closed
8/29/2012	5:26:34 PM	Helium valve opened
8/29/2012	5:26:34 PM	Main Vac valve opened
8/29/2012	5:26:34 PM	Helium MFC set to  20.000000
8/29/2012	5:26:34 PM	H2 MFC set to  0.000000
8/29/2012	5:26:34 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:34 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:34 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:34 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:35 PM	Tube furnace set to 0
8/29/2012	5:26:35 PM	Helium valve closed
8/29/2012	5:26:35 PM	H2 valve closed
8/29/2012	5:26:35 PM	BCl3 valve closed
8/29/2012	5:26:35 PM	PH3 valve closed
8/29/2012	5:26:35 PM	SiCl4 pre valve closed
8/29/2012	5:26:35 PM	SiCl4 post valve closed
8/29/2012	5:26:35 PM	Bypass valve closed
8/29/2012	5:26:35 PM	Bubbler valve closed
8/29/2012	5:26:35 PM	Main Vac valve opened
8/29/2012	5:26:35 PM	Helium MFC set to  0.000000
8/29/2012	5:26:35 PM	H2 MFC set to  0.000000
8/29/2012	5:26:35 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:35 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:35 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:35 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:35 PM	Tube furnace set to 0
8/29/2012	5:26:36 PM	H2 valve closed
8/29/2012	5:26:36 PM	BCl3 valve closed
8/29/2012	5:26:36 PM	PH3 valve closed
8/29/2012	5:26:36 PM	SiCl4 pre valve closed
8/29/2012	5:26:36 PM	SiCl4 post valve closed
8/29/2012	5:26:36 PM	Bypass valve closed
8/29/2012	5:26:36 PM	Bubbler valve closed
8/29/2012	5:26:36 PM	Helium valve opened
8/29/2012	5:26:36 PM	Main Vac valve opened
8/29/2012	5:26:36 PM	Helium MFC set to  20.000000
8/29/2012	5:26:36 PM	H2 MFC set to  0.000000
8/29/2012	5:26:36 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:36 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:36 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:36 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:36 PM	Tube furnace set to 0
8/29/2012	5:26:36 PM	Helium valve closed
8/29/2012	5:26:36 PM	H2 valve closed
8/29/2012	5:26:36 PM	BCl3 valve closed
8/29/2012	5:26:36 PM	PH3 valve closed
8/29/2012	5:26:36 PM	SiCl4 pre valve closed
8/29/2012	5:26:36 PM	SiCl4 post valve closed
8/29/2012	5:26:36 PM	Bypass valve closed
8/29/2012	5:26:36 PM	Bubbler valve closed
8/29/2012	5:26:36 PM	Main Vac valve opened
8/29/2012	5:26:36 PM	Helium MFC set to  0.000000
8/29/2012	5:26:36 PM	H2 MFC set to  0.000000
8/29/2012	5:26:36 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:36 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:36 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:36 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:37 PM	Tube furnace set to 0
8/29/2012	5:26:37 PM	H2 valve closed
8/29/2012	5:26:37 PM	BCl3 valve closed
8/29/2012	5:26:37 PM	PH3 valve closed
8/29/2012	5:26:37 PM	SiCl4 pre valve closed
8/29/2012	5:26:37 PM	SiCl4 post valve closed
8/29/2012	5:26:37 PM	Bypass valve closed
8/29/2012	5:26:37 PM	Bubbler valve closed
8/29/2012	5:26:37 PM	Helium valve opened
8/29/2012	5:26:37 PM	Main Vac valve opened
8/29/2012	5:26:37 PM	Helium MFC set to  20.000000
8/29/2012	5:26:37 PM	H2 MFC set to  0.000000
8/29/2012	5:26:37 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:37 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:37 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:37 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:37 PM	Tube furnace set to 0
8/29/2012	5:26:38 PM	Helium valve closed
8/29/2012	5:26:38 PM	H2 valve closed
8/29/2012	5:26:38 PM	BCl3 valve closed
8/29/2012	5:26:38 PM	PH3 valve closed
8/29/2012	5:26:38 PM	SiCl4 pre valve closed
8/29/2012	5:26:38 PM	SiCl4 post valve closed
8/29/2012	5:26:38 PM	Bypass valve closed
8/29/2012	5:26:38 PM	Bubbler valve closed
8/29/2012	5:26:38 PM	Main Vac valve opened
8/29/2012	5:26:38 PM	Helium MFC set to  0.000000
8/29/2012	5:26:38 PM	H2 MFC set to  0.000000
8/29/2012	5:26:38 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:38 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:38 PM	Tube furnace set to 0
8/29/2012	5:26:39 PM	H2 valve closed
8/29/2012	5:26:39 PM	BCl3 valve closed
8/29/2012	5:26:39 PM	PH3 valve closed
8/29/2012	5:26:39 PM	SiCl4 pre valve closed
8/29/2012	5:26:39 PM	SiCl4 post valve closed
8/29/2012	5:26:39 PM	Bypass valve closed
8/29/2012	5:26:39 PM	Bubbler valve closed
8/29/2012	5:26:39 PM	Helium valve opened
8/29/2012	5:26:39 PM	Main Vac valve opened
8/29/2012	5:26:39 PM	Helium MFC set to  20.000000
8/29/2012	5:26:39 PM	H2 MFC set to  0.000000
8/29/2012	5:26:39 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:39 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:39 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:39 PM	Tube furnace set to 0
8/29/2012	5:26:39 PM	Helium valve closed
8/29/2012	5:26:39 PM	H2 valve closed
8/29/2012	5:26:39 PM	BCl3 valve closed
8/29/2012	5:26:39 PM	PH3 valve closed
8/29/2012	5:26:39 PM	SiCl4 pre valve closed
8/29/2012	5:26:39 PM	SiCl4 post valve closed
8/29/2012	5:26:39 PM	Bypass valve closed
8/29/2012	5:26:39 PM	Bubbler valve closed
8/29/2012	5:26:39 PM	Main Vac valve opened
8/29/2012	5:26:39 PM	Helium MFC set to  0.000000
8/29/2012	5:26:39 PM	H2 MFC set to  0.000000
8/29/2012	5:26:39 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:39 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:39 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:39 PM	Tube furnace set to 0
8/29/2012	5:26:40 PM	H2 valve closed
8/29/2012	5:26:40 PM	BCl3 valve closed
8/29/2012	5:26:40 PM	PH3 valve closed
8/29/2012	5:26:40 PM	SiCl4 pre valve closed
8/29/2012	5:26:40 PM	SiCl4 post valve closed
8/29/2012	5:26:40 PM	Bypass valve closed
8/29/2012	5:26:40 PM	Bubbler valve closed
8/29/2012	5:26:40 PM	Helium valve opened
8/29/2012	5:26:40 PM	Main Vac valve opened
8/29/2012	5:26:40 PM	Helium MFC set to  20.000000
8/29/2012	5:26:40 PM	H2 MFC set to  0.000000
8/29/2012	5:26:40 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:40 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:40 PM	Tube furnace set to 0
8/29/2012	5:26:41 PM	Helium valve closed
8/29/2012	5:26:41 PM	H2 valve closed
8/29/2012	5:26:41 PM	BCl3 valve closed
8/29/2012	5:26:41 PM	PH3 valve closed
8/29/2012	5:26:41 PM	SiCl4 pre valve closed
8/29/2012	5:26:41 PM	SiCl4 post valve closed
8/29/2012	5:26:41 PM	Bypass valve closed
8/29/2012	5:26:41 PM	Bubbler valve closed
8/29/2012	5:26:41 PM	Main Vac valve opened
8/29/2012	5:26:41 PM	Helium MFC set to  0.000000
8/29/2012	5:26:41 PM	H2 MFC set to  0.000000
8/29/2012	5:26:41 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:41 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:41 PM	Tube furnace set to 0
8/29/2012	5:26:41 PM	H2 valve closed
8/29/2012	5:26:41 PM	BCl3 valve closed
8/29/2012	5:26:41 PM	PH3 valve closed
8/29/2012	5:26:41 PM	SiCl4 pre valve closed
8/29/2012	5:26:41 PM	SiCl4 post valve closed
8/29/2012	5:26:41 PM	Bypass valve closed
8/29/2012	5:26:41 PM	Bubbler valve closed
8/29/2012	5:26:42 PM	Helium valve opened
8/29/2012	5:26:42 PM	Main Vac valve opened
8/29/2012	5:26:42 PM	Helium MFC set to  20.000000
8/29/2012	5:26:42 PM	H2 MFC set to  0.000000
8/29/2012	5:26:42 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:42 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:42 PM	Tube furnace set to 0
8/29/2012	5:26:42 PM	Helium valve closed
8/29/2012	5:26:42 PM	H2 valve closed
8/29/2012	5:26:42 PM	BCl3 valve closed
8/29/2012	5:26:42 PM	PH3 valve closed
8/29/2012	5:26:42 PM	SiCl4 pre valve closed
8/29/2012	5:26:42 PM	SiCl4 post valve closed
8/29/2012	5:26:42 PM	Bypass valve closed
8/29/2012	5:26:42 PM	Bubbler valve closed
8/29/2012	5:26:42 PM	Main Vac valve opened
8/29/2012	5:26:42 PM	Helium MFC set to  0.000000
8/29/2012	5:26:42 PM	H2 MFC set to  0.000000
8/29/2012	5:26:42 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:42 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:42 PM	Tube furnace set to 0
8/29/2012	5:26:43 PM	H2 valve closed
8/29/2012	5:26:43 PM	BCl3 valve closed
8/29/2012	5:26:43 PM	PH3 valve closed
8/29/2012	5:26:43 PM	SiCl4 pre valve closed
8/29/2012	5:26:43 PM	SiCl4 post valve closed
8/29/2012	5:26:43 PM	Bypass valve closed
8/29/2012	5:26:43 PM	Bubbler valve closed
8/29/2012	5:26:43 PM	Helium valve opened
8/29/2012	5:26:43 PM	Main Vac valve opened
8/29/2012	5:26:43 PM	Helium MFC set to  20.000000
8/29/2012	5:26:43 PM	H2 MFC set to  0.000000
8/29/2012	5:26:43 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:43 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:43 PM	Tube furnace set to 0
8/29/2012	5:26:43 PM	Helium valve closed
8/29/2012	5:26:43 PM	H2 valve closed
8/29/2012	5:26:43 PM	BCl3 valve closed
8/29/2012	5:26:43 PM	PH3 valve closed
8/29/2012	5:26:43 PM	SiCl4 pre valve closed
8/29/2012	5:26:43 PM	SiCl4 post valve closed
8/29/2012	5:26:43 PM	Bypass valve closed
8/29/2012	5:26:43 PM	Bubbler valve closed
8/29/2012	5:26:43 PM	Main Vac valve opened
8/29/2012	5:26:43 PM	Helium MFC set to  0.000000
8/29/2012	5:26:43 PM	H2 MFC set to  0.000000
8/29/2012	5:26:43 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:43 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:43 PM	Tube furnace set to 0
8/29/2012	5:26:44 PM	H2 valve closed
8/29/2012	5:26:44 PM	BCl3 valve closed
8/29/2012	5:26:44 PM	PH3 valve closed
8/29/2012	5:26:44 PM	SiCl4 pre valve closed
8/29/2012	5:26:44 PM	SiCl4 post valve closed
8/29/2012	5:26:44 PM	Bypass valve closed
8/29/2012	5:26:44 PM	Bubbler valve closed
8/29/2012	5:26:44 PM	Helium valve opened
8/29/2012	5:26:44 PM	Main Vac valve opened
8/29/2012	5:26:44 PM	Helium MFC set to  20.000000
8/29/2012	5:26:44 PM	H2 MFC set to  0.000000
8/29/2012	5:26:44 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:44 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:44 PM	Tube furnace set to 0
8/29/2012	5:26:44 PM	Helium valve closed
8/29/2012	5:26:44 PM	H2 valve closed
8/29/2012	5:26:44 PM	BCl3 valve closed
8/29/2012	5:26:44 PM	PH3 valve closed
8/29/2012	5:26:44 PM	SiCl4 pre valve closed
8/29/2012	5:26:44 PM	SiCl4 post valve closed
8/29/2012	5:26:44 PM	Bypass valve closed
8/29/2012	5:26:44 PM	Bubbler valve closed
8/29/2012	5:26:44 PM	Main Vac valve opened
8/29/2012	5:26:44 PM	Helium MFC set to  0.000000
8/29/2012	5:26:44 PM	H2 MFC set to  0.000000
8/29/2012	5:26:44 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:44 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:45 PM	Tube furnace set to 0
8/29/2012	5:26:47 PM	H2 valve closed
8/29/2012	5:26:47 PM	BCl3 valve closed
8/29/2012	5:26:47 PM	PH3 valve closed
8/29/2012	5:26:47 PM	SiCl4 pre valve closed
8/29/2012	5:26:47 PM	SiCl4 post valve closed
8/29/2012	5:26:47 PM	Bypass valve closed
8/29/2012	5:26:47 PM	Bubbler valve closed
8/29/2012	5:26:47 PM	Helium valve opened
8/29/2012	5:26:47 PM	Main Vac valve opened
8/29/2012	5:26:47 PM	Helium MFC set to  20.000000
8/29/2012	5:26:47 PM	H2 MFC set to  0.000000
8/29/2012	5:26:47 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:47 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:47 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:47 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:47 PM	Tube furnace set to 0
8/29/2012	5:26:48 PM	Helium valve closed
8/29/2012	5:26:48 PM	H2 valve closed
8/29/2012	5:26:48 PM	BCl3 valve closed
8/29/2012	5:26:48 PM	PH3 valve closed
8/29/2012	5:26:48 PM	SiCl4 pre valve closed
8/29/2012	5:26:48 PM	SiCl4 post valve closed
8/29/2012	5:26:48 PM	Bypass valve closed
8/29/2012	5:26:48 PM	Bubbler valve closed
8/29/2012	5:26:48 PM	Main Vac valve opened
8/29/2012	5:26:48 PM	Helium MFC set to  0.000000
8/29/2012	5:26:48 PM	H2 MFC set to  0.000000
8/29/2012	5:26:48 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:48 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:48 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:48 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:48 PM	Tube furnace set to 200
8/29/2012	5:26:49 PM	H2 valve closed
8/29/2012	5:26:49 PM	BCl3 valve closed
8/29/2012	5:26:49 PM	PH3 valve closed
8/29/2012	5:26:49 PM	SiCl4 pre valve closed
8/29/2012	5:26:49 PM	SiCl4 post valve closed
8/29/2012	5:26:49 PM	Bypass valve closed
8/29/2012	5:26:49 PM	Bubbler valve closed
8/29/2012	5:26:49 PM	Helium valve opened
8/29/2012	5:26:49 PM	Main Vac valve opened
8/29/2012	5:26:49 PM	Helium MFC set to  20.000000
8/29/2012	5:26:49 PM	H2 MFC set to  0.000000
8/29/2012	5:26:49 PM	BCl3 MFC set to  0.000000
8/29/2012	5:26:49 PM	PH3 MFC set to  0.000000
8/29/2012	5:26:49 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:26:49 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:26:49 PM	Tube furnace set to 200
8/29/2012	5:27:19 PM	Helium valve closed
8/29/2012	5:27:19 PM	H2 valve closed
8/29/2012	5:27:19 PM	BCl3 valve closed
8/29/2012	5:27:19 PM	PH3 valve closed
8/29/2012	5:27:19 PM	SiCl4 pre valve closed
8/29/2012	5:27:19 PM	SiCl4 post valve closed
8/29/2012	5:27:19 PM	Bypass valve closed
8/29/2012	5:27:19 PM	Bubbler valve closed
8/29/2012	5:27:19 PM	Main Vac valve opened
8/29/2012	5:27:19 PM	Helium MFC set to  0.000000
8/29/2012	5:27:19 PM	H2 MFC set to  0.000000
8/29/2012	5:27:19 PM	BCl3 MFC set to  0.000000
8/29/2012	5:27:19 PM	PH3 MFC set to  0.000000
8/29/2012	5:27:19 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:27:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:27:19 PM	Tube furnace set to 200
8/29/2012	5:27:49 PM	H2 valve closed
8/29/2012	5:27:49 PM	BCl3 valve closed
8/29/2012	5:27:49 PM	PH3 valve closed
8/29/2012	5:27:49 PM	SiCl4 pre valve closed
8/29/2012	5:27:49 PM	SiCl4 post valve closed
8/29/2012	5:27:49 PM	Bypass valve closed
8/29/2012	5:27:49 PM	Bubbler valve closed
8/29/2012	5:27:49 PM	Helium valve opened
8/29/2012	5:27:49 PM	Main Vac valve opened
8/29/2012	5:27:49 PM	Helium MFC set to  20.000000
8/29/2012	5:27:49 PM	H2 MFC set to  0.000000
8/29/2012	5:27:49 PM	BCl3 MFC set to  0.000000
8/29/2012	5:27:49 PM	PH3 MFC set to  0.000000
8/29/2012	5:27:49 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:27:49 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:27:49 PM	Tube furnace set to 200
8/29/2012	5:28:19 PM	Helium valve closed
8/29/2012	5:28:19 PM	H2 valve closed
8/29/2012	5:28:19 PM	BCl3 valve closed
8/29/2012	5:28:19 PM	PH3 valve closed
8/29/2012	5:28:19 PM	SiCl4 pre valve closed
8/29/2012	5:28:19 PM	SiCl4 post valve closed
8/29/2012	5:28:19 PM	Bypass valve closed
8/29/2012	5:28:19 PM	Bubbler valve closed
8/29/2012	5:28:19 PM	Main Vac valve opened
8/29/2012	5:28:19 PM	Helium MFC set to  0.000000
8/29/2012	5:28:19 PM	H2 MFC set to  0.000000
8/29/2012	5:28:19 PM	BCl3 MFC set to  0.000000
8/29/2012	5:28:19 PM	PH3 MFC set to  0.000000
8/29/2012	5:28:19 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:28:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:28:20 PM	Tube furnace set to 200
8/29/2012	5:28:50 PM	H2 valve closed
8/29/2012	5:28:50 PM	BCl3 valve closed
8/29/2012	5:28:50 PM	PH3 valve closed
8/29/2012	5:28:50 PM	SiCl4 pre valve closed
8/29/2012	5:28:50 PM	SiCl4 post valve closed
8/29/2012	5:28:50 PM	Bypass valve closed
8/29/2012	5:28:50 PM	Bubbler valve closed
8/29/2012	5:28:50 PM	Helium valve opened
8/29/2012	5:28:50 PM	Main Vac valve opened
8/29/2012	5:28:50 PM	Helium MFC set to  20.000000
8/29/2012	5:28:50 PM	H2 MFC set to  0.000000
8/29/2012	5:28:50 PM	BCl3 MFC set to  0.000000
8/29/2012	5:28:50 PM	PH3 MFC set to  0.000000
8/29/2012	5:28:50 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:28:50 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:28:50 PM	Tube furnace set to 200
8/29/2012	5:29:20 PM	Helium valve closed
8/29/2012	5:29:20 PM	H2 valve closed
8/29/2012	5:29:20 PM	BCl3 valve closed
8/29/2012	5:29:20 PM	PH3 valve closed
8/29/2012	5:29:20 PM	SiCl4 pre valve closed
8/29/2012	5:29:20 PM	SiCl4 post valve closed
8/29/2012	5:29:20 PM	Bypass valve closed
8/29/2012	5:29:20 PM	Bubbler valve closed
8/29/2012	5:29:20 PM	Main Vac valve opened
8/29/2012	5:29:20 PM	Helium MFC set to  0.000000
8/29/2012	5:29:20 PM	H2 MFC set to  0.000000
8/29/2012	5:29:20 PM	BCl3 MFC set to  0.000000
8/29/2012	5:29:20 PM	PH3 MFC set to  0.000000
8/29/2012	5:29:20 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:29:20 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:29:20 PM	Tube furnace set to 200
8/29/2012	5:29:50 PM	H2 valve closed
8/29/2012	5:29:50 PM	BCl3 valve closed
8/29/2012	5:29:50 PM	PH3 valve closed
8/29/2012	5:29:50 PM	SiCl4 pre valve closed
8/29/2012	5:29:50 PM	SiCl4 post valve closed
8/29/2012	5:29:50 PM	Bypass valve closed
8/29/2012	5:29:50 PM	Bubbler valve closed
8/29/2012	5:29:50 PM	Helium valve opened
8/29/2012	5:29:50 PM	Main Vac valve opened
8/29/2012	5:29:50 PM	Helium MFC set to  20.000000
8/29/2012	5:29:50 PM	H2 MFC set to  0.000000
8/29/2012	5:29:50 PM	BCl3 MFC set to  0.000000
8/29/2012	5:29:50 PM	PH3 MFC set to  0.000000
8/29/2012	5:29:50 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:29:50 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:29:50 PM	Tube furnace set to 200
8/29/2012	5:30:20 PM	Helium valve closed
8/29/2012	5:30:20 PM	H2 valve closed
8/29/2012	5:30:20 PM	BCl3 valve closed
8/29/2012	5:30:20 PM	PH3 valve closed
8/29/2012	5:30:20 PM	SiCl4 pre valve closed
8/29/2012	5:30:20 PM	SiCl4 post valve closed
8/29/2012	5:30:20 PM	Bypass valve closed
8/29/2012	5:30:20 PM	Bubbler valve closed
8/29/2012	5:30:20 PM	Main Vac valve opened
8/29/2012	5:30:20 PM	Helium MFC set to  0.000000
8/29/2012	5:30:20 PM	H2 MFC set to  0.000000
8/29/2012	5:30:20 PM	BCl3 MFC set to  0.000000
8/29/2012	5:30:20 PM	PH3 MFC set to  0.000000
8/29/2012	5:30:20 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:30:20 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:30:20 PM	Tube furnace set to 200
8/29/2012	5:30:51 PM	H2 valve closed
8/29/2012	5:30:51 PM	BCl3 valve closed
8/29/2012	5:30:51 PM	PH3 valve closed
8/29/2012	5:30:51 PM	SiCl4 pre valve closed
8/29/2012	5:30:51 PM	SiCl4 post valve closed
8/29/2012	5:30:51 PM	Bypass valve closed
8/29/2012	5:30:51 PM	Bubbler valve closed
8/29/2012	5:30:51 PM	Helium valve opened
8/29/2012	5:30:51 PM	Main Vac valve opened
8/29/2012	5:30:51 PM	Helium MFC set to  20.000000
8/29/2012	5:30:51 PM	H2 MFC set to  0.000000
8/29/2012	5:30:51 PM	BCl3 MFC set to  0.000000
8/29/2012	5:30:51 PM	PH3 MFC set to  0.000000
8/29/2012	5:30:51 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:30:51 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:30:51 PM	Tube furnace set to 200
8/29/2012	5:31:21 PM	Helium valve closed
8/29/2012	5:31:21 PM	H2 valve closed
8/29/2012	5:31:21 PM	BCl3 valve closed
8/29/2012	5:31:21 PM	PH3 valve closed
8/29/2012	5:31:21 PM	SiCl4 pre valve closed
8/29/2012	5:31:21 PM	SiCl4 post valve closed
8/29/2012	5:31:21 PM	Bypass valve closed
8/29/2012	5:31:21 PM	Bubbler valve closed
8/29/2012	5:31:21 PM	Main Vac valve opened
8/29/2012	5:31:21 PM	Helium MFC set to  0.000000
8/29/2012	5:31:21 PM	H2 MFC set to  0.000000
8/29/2012	5:31:21 PM	BCl3 MFC set to  0.000000
8/29/2012	5:31:21 PM	PH3 MFC set to  0.000000
8/29/2012	5:31:21 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:31:21 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:31:21 PM	Tube furnace set to 200
8/29/2012	5:31:51 PM	H2 valve closed
8/29/2012	5:31:51 PM	BCl3 valve closed
8/29/2012	5:31:51 PM	PH3 valve closed
8/29/2012	5:31:51 PM	SiCl4 pre valve closed
8/29/2012	5:31:51 PM	SiCl4 post valve closed
8/29/2012	5:31:51 PM	Bypass valve closed
8/29/2012	5:31:51 PM	Bubbler valve closed
8/29/2012	5:31:51 PM	Helium valve opened
8/29/2012	5:31:51 PM	Main Vac valve opened
8/29/2012	5:31:51 PM	Helium MFC set to  20.000000
8/29/2012	5:31:51 PM	H2 MFC set to  0.000000
8/29/2012	5:31:51 PM	BCl3 MFC set to  0.000000
8/29/2012	5:31:51 PM	PH3 MFC set to  0.000000
8/29/2012	5:31:51 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:31:51 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:31:51 PM	Tube furnace set to 200
8/29/2012	5:32:21 PM	Helium valve closed
8/29/2012	5:32:21 PM	H2 valve closed
8/29/2012	5:32:21 PM	BCl3 valve closed
8/29/2012	5:32:21 PM	PH3 valve closed
8/29/2012	5:32:21 PM	SiCl4 pre valve closed
8/29/2012	5:32:21 PM	SiCl4 post valve closed
8/29/2012	5:32:21 PM	Bypass valve closed
8/29/2012	5:32:21 PM	Bubbler valve closed
8/29/2012	5:32:21 PM	Main Vac valve opened
8/29/2012	5:32:21 PM	Helium MFC set to  0.000000
8/29/2012	5:32:21 PM	H2 MFC set to  0.000000
8/29/2012	5:32:21 PM	BCl3 MFC set to  0.000000
8/29/2012	5:32:21 PM	PH3 MFC set to  0.000000
8/29/2012	5:32:21 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:32:21 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:32:21 PM	Tube furnace set to 0
8/29/2012	5:32:22 PM	Run finished at 5:32 PM
8/29/2012	5:43:39 PM	Main Vac valve closed
8/29/2012	5:43:59 PM	Main Vac valve opened
8/29/2012	5:44:51 PM	Recipe started at 5:44 PM
8/29/2012	5:44:51 PM	Helium valve closed
8/29/2012	5:44:51 PM	H2 valve closed
8/29/2012	5:44:51 PM	BCl3 valve closed
8/29/2012	5:44:51 PM	PH3 valve closed
8/29/2012	5:44:51 PM	SiCl4 pre valve closed
8/29/2012	5:44:51 PM	SiCl4 post valve closed
8/29/2012	5:44:51 PM	Main Vac valve closed
8/29/2012	5:44:51 PM	Bypass valve closed
8/29/2012	5:44:51 PM	Bubbler valve closed
8/29/2012	5:44:51 PM	Helium MFC set to  0.000000
8/29/2012	5:44:51 PM	H2 MFC set to  0.000000
8/29/2012	5:44:51 PM	BCl3 MFC set to  0.000000
8/29/2012	5:44:51 PM	PH3 MFC set to  0.000000
8/29/2012	5:44:51 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:44:51 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:44:51 PM	Tube furnace set to 0
8/29/2012	5:44:54 PM	Helium valve closed
8/29/2012	5:44:54 PM	BCl3 valve closed
8/29/2012	5:44:55 PM	PH3 valve closed
8/29/2012	5:44:55 PM	SiCl4 pre valve closed
8/29/2012	5:44:55 PM	SiCl4 post valve closed
8/29/2012	5:44:55 PM	Main Vac valve closed
8/29/2012	5:44:55 PM	Bypass valve closed
8/29/2012	5:44:55 PM	Bubbler valve closed
8/29/2012	5:44:55 PM	H2 valve opened
8/29/2012	5:44:55 PM	Helium MFC set to  0.000000
8/29/2012	5:44:55 PM	H2 MFC set to  500.000000
8/29/2012	5:44:55 PM	BCl3 MFC set to  0.000000
8/29/2012	5:44:55 PM	PH3 MFC set to  0.000000
8/29/2012	5:44:55 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:44:55 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:44:55 PM	Tube furnace set to 0
8/29/2012	5:46:06 PM	Helium valve closed
8/29/2012	5:46:06 PM	BCl3 valve closed
8/29/2012	5:46:06 PM	PH3 valve closed
8/29/2012	5:46:06 PM	SiCl4 pre valve closed
8/29/2012	5:46:06 PM	SiCl4 post valve closed
8/29/2012	5:46:06 PM	Main Vac valve closed
8/29/2012	5:46:06 PM	Bypass valve closed
8/29/2012	5:46:06 PM	H2 valve opened
8/29/2012	5:46:06 PM	Bubbler valve opened
8/29/2012	5:46:06 PM	Helium MFC set to  0.000000
8/29/2012	5:46:06 PM	H2 MFC set to  500.000000
8/29/2012	5:46:06 PM	BCl3 MFC set to  0.000000
8/29/2012	5:46:06 PM	PH3 MFC set to  0.000000
8/29/2012	5:46:06 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:46:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:46:06 PM	Tube furnace set to 0
8/29/2012	5:46:08 PM	Helium valve closed
8/29/2012	5:46:08 PM	BCl3 valve closed
8/29/2012	5:46:08 PM	PH3 valve closed
8/29/2012	5:46:08 PM	SiCl4 pre valve closed
8/29/2012	5:46:08 PM	SiCl4 post valve closed
8/29/2012	5:46:08 PM	Main Vac valve closed
8/29/2012	5:46:08 PM	Bypass valve closed
8/29/2012	5:46:08 PM	H2 valve opened
8/29/2012	5:46:08 PM	Bubbler valve opened
8/29/2012	5:46:08 PM	Helium MFC set to  0.000000
8/29/2012	5:46:08 PM	H2 MFC set to  500.000000
8/29/2012	5:46:08 PM	BCl3 MFC set to  0.000000
8/29/2012	5:46:08 PM	PH3 MFC set to  0.000000
8/29/2012	5:46:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	5:46:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	5:46:08 PM	Tube furnace set to 1000
8/29/2012	6:06:08 PM	Helium valve closed
8/29/2012	6:06:08 PM	PH3 valve closed
8/29/2012	6:06:08 PM	Main Vac valve closed
8/29/2012	6:06:08 PM	Bypass valve closed
8/29/2012	6:06:08 PM	H2 valve opened
8/29/2012	6:06:08 PM	BCl3 valve opened
8/29/2012	6:06:08 PM	SiCl4 pre valve opened
8/29/2012	6:06:08 PM	SiCl4 post valve opened
8/29/2012	6:06:08 PM	Bubbler valve opened
8/29/2012	6:06:08 PM	Helium MFC set to  0.000000
8/29/2012	6:06:08 PM	H2 MFC set to  450.000000
8/29/2012	6:06:08 PM	BCl3 MFC set to  1.500000
8/29/2012	6:06:08 PM	PH3 MFC set to  0.000000
8/29/2012	6:06:08 PM	SiCl4 MFC set to  50.000000
8/29/2012	6:06:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:06:08 PM	Tube furnace set to 1000
8/29/2012	6:14:08 PM	Helium valve closed
8/29/2012	6:14:08 PM	BCl3 valve closed
8/29/2012	6:14:08 PM	PH3 valve closed
8/29/2012	6:14:08 PM	SiCl4 pre valve closed
8/29/2012	6:14:08 PM	SiCl4 post valve closed
8/29/2012	6:14:08 PM	Main Vac valve closed
8/29/2012	6:14:08 PM	Bypass valve closed
8/29/2012	6:14:08 PM	H2 valve opened
8/29/2012	6:14:08 PM	Bubbler valve opened
8/29/2012	6:14:08 PM	Helium MFC set to  0.000000
8/29/2012	6:14:08 PM	H2 MFC set to  500.000000
8/29/2012	6:14:08 PM	BCl3 MFC set to  0.000000
8/29/2012	6:14:08 PM	PH3 MFC set to  0.000000
8/29/2012	6:14:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:14:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:14:08 PM	Tube furnace set to 950
8/29/2012	6:16:08 PM	Helium valve closed
8/29/2012	6:16:08 PM	BCl3 valve closed
8/29/2012	6:16:08 PM	PH3 valve closed
8/29/2012	6:16:08 PM	SiCl4 pre valve closed
8/29/2012	6:16:08 PM	SiCl4 post valve closed
8/29/2012	6:16:08 PM	Main Vac valve closed
8/29/2012	6:16:08 PM	Bypass valve closed
8/29/2012	6:16:08 PM	H2 valve opened
8/29/2012	6:16:08 PM	Bubbler valve opened
8/29/2012	6:16:08 PM	Helium MFC set to  0.000000
8/29/2012	6:16:08 PM	H2 MFC set to  500.000000
8/29/2012	6:16:08 PM	BCl3 MFC set to  0.000000
8/29/2012	6:16:08 PM	PH3 MFC set to  0.000000
8/29/2012	6:16:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:16:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:16:08 PM	Tube furnace set to 900
8/29/2012	6:18:08 PM	Helium valve closed
8/29/2012	6:18:08 PM	BCl3 valve closed
8/29/2012	6:18:08 PM	PH3 valve closed
8/29/2012	6:18:08 PM	SiCl4 pre valve closed
8/29/2012	6:18:08 PM	SiCl4 post valve closed
8/29/2012	6:18:08 PM	Main Vac valve closed
8/29/2012	6:18:08 PM	Bypass valve closed
8/29/2012	6:18:08 PM	H2 valve opened
8/29/2012	6:18:08 PM	Bubbler valve opened
8/29/2012	6:18:08 PM	Helium MFC set to  0.000000
8/29/2012	6:18:08 PM	H2 MFC set to  500.000000
8/29/2012	6:18:08 PM	BCl3 MFC set to  0.000000
8/29/2012	6:18:08 PM	PH3 MFC set to  0.000000
8/29/2012	6:18:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:18:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:18:09 PM	Tube furnace set to 850
8/29/2012	6:20:09 PM	H2 valve closed
8/29/2012	6:20:09 PM	BCl3 valve closed
8/29/2012	6:20:09 PM	PH3 valve closed
8/29/2012	6:20:09 PM	SiCl4 pre valve closed
8/29/2012	6:20:09 PM	SiCl4 post valve closed
8/29/2012	6:20:09 PM	Main Vac valve closed
8/29/2012	6:20:09 PM	Bypass valve closed
8/29/2012	6:20:09 PM	Helium valve opened
8/29/2012	6:20:09 PM	Bubbler valve opened
8/29/2012	6:20:09 PM	Helium MFC set to  500.000000
8/29/2012	6:20:09 PM	H2 MFC set to  0.000000
8/29/2012	6:20:09 PM	BCl3 MFC set to  0.000000
8/29/2012	6:20:09 PM	PH3 MFC set to  0.000000
8/29/2012	6:20:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:20:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:20:09 PM	Tube furnace set to 800
8/29/2012	6:22:09 PM	H2 valve closed
8/29/2012	6:22:09 PM	BCl3 valve closed
8/29/2012	6:22:09 PM	PH3 valve closed
8/29/2012	6:22:09 PM	SiCl4 pre valve closed
8/29/2012	6:22:09 PM	SiCl4 post valve closed
8/29/2012	6:22:09 PM	Main Vac valve closed
8/29/2012	6:22:09 PM	Bypass valve closed
8/29/2012	6:22:09 PM	Helium valve opened
8/29/2012	6:22:09 PM	Bubbler valve opened
8/29/2012	6:22:09 PM	Helium MFC set to  500.000000
8/29/2012	6:22:09 PM	H2 MFC set to  0.000000
8/29/2012	6:22:09 PM	BCl3 MFC set to  0.000000
8/29/2012	6:22:09 PM	PH3 MFC set to  0.000000
8/29/2012	6:22:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:22:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:22:09 PM	Tube furnace set to 750
8/29/2012	6:24:09 PM	H2 valve closed
8/29/2012	6:24:09 PM	BCl3 valve closed
8/29/2012	6:24:09 PM	PH3 valve closed
8/29/2012	6:24:09 PM	SiCl4 pre valve closed
8/29/2012	6:24:09 PM	SiCl4 post valve closed
8/29/2012	6:24:09 PM	Main Vac valve closed
8/29/2012	6:24:09 PM	Bypass valve closed
8/29/2012	6:24:09 PM	Helium valve opened
8/29/2012	6:24:09 PM	Bubbler valve opened
8/29/2012	6:24:09 PM	Helium MFC set to  500.000000
8/29/2012	6:24:09 PM	H2 MFC set to  0.000000
8/29/2012	6:24:09 PM	BCl3 MFC set to  0.000000
8/29/2012	6:24:09 PM	PH3 MFC set to  0.000000
8/29/2012	6:24:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:24:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:24:09 PM	Tube furnace set to 0
8/29/2012	6:44:09 PM	Helium valve closed
8/29/2012	6:44:09 PM	H2 valve closed
8/29/2012	6:44:09 PM	BCl3 valve closed
8/29/2012	6:44:09 PM	PH3 valve closed
8/29/2012	6:44:09 PM	SiCl4 pre valve closed
8/29/2012	6:44:09 PM	SiCl4 post valve closed
8/29/2012	6:44:09 PM	Main Vac valve closed
8/29/2012	6:44:09 PM	Bypass valve closed
8/29/2012	6:44:09 PM	Bubbler valve closed
8/29/2012	6:44:09 PM	Helium MFC set to  0.000000
8/29/2012	6:44:09 PM	H2 MFC set to  0.000000
8/29/2012	6:44:09 PM	BCl3 MFC set to  0.000000
8/29/2012	6:44:09 PM	PH3 MFC set to  0.000000
8/29/2012	6:44:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	6:44:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	6:44:09 PM	Tube furnace set to 0
8/29/2012	6:44:10 PM	Run finished at 6:44 PM
8/29/2012	7:42:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	7:42:31 PM	Recipe started at 7:42 PM
8/29/2012	7:42:31 PM	Helium valve closed
8/29/2012	7:42:31 PM	H2 valve closed
8/29/2012	7:42:31 PM	BCl3 valve closed
8/29/2012	7:42:31 PM	PH3 valve closed
8/29/2012	7:42:31 PM	SiCl4 pre valve closed
8/29/2012	7:42:31 PM	SiCl4 post valve closed
8/29/2012	7:42:31 PM	Main Vac valve closed
8/29/2012	7:42:31 PM	Bypass valve closed
8/29/2012	7:42:31 PM	Bubbler valve closed
8/29/2012	7:42:31 PM	Helium MFC set to  0.000000
8/29/2012	7:42:31 PM	H2 MFC set to  0.000000
8/29/2012	7:42:31 PM	BCl3 MFC set to  0.000000
8/29/2012	7:42:31 PM	PH3 MFC set to  0.000000
8/29/2012	7:42:31 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:42:31 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:42:31 PM	Tube furnace set to 0
8/29/2012	7:42:34 PM	H2 valve closed
8/29/2012	7:42:34 PM	BCl3 valve closed
8/29/2012	7:42:34 PM	PH3 valve closed
8/29/2012	7:42:34 PM	SiCl4 pre valve closed
8/29/2012	7:42:34 PM	SiCl4 post valve closed
8/29/2012	7:42:34 PM	Main Vac valve closed
8/29/2012	7:42:34 PM	Bypass valve closed
8/29/2012	7:42:34 PM	Bubbler valve closed
8/29/2012	7:42:34 PM	Helium valve opened
8/29/2012	7:42:34 PM	Helium MFC set to  500.000000
8/29/2012	7:42:34 PM	H2 MFC set to  0.000000
8/29/2012	7:42:34 PM	BCl3 MFC set to  0.000000
8/29/2012	7:42:34 PM	PH3 MFC set to  0.000000
8/29/2012	7:42:34 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:42:34 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:42:34 PM	Tube furnace set to 0
8/29/2012	7:42:42 PM	Helium valve closed
8/29/2012	7:42:42 PM	H2 valve closed
8/29/2012	7:42:42 PM	BCl3 valve closed
8/29/2012	7:42:42 PM	PH3 valve closed
8/29/2012	7:42:42 PM	SiCl4 pre valve closed
8/29/2012	7:42:42 PM	SiCl4 post valve closed
8/29/2012	7:42:42 PM	Main Vac valve closed
8/29/2012	7:42:42 PM	Bypass valve closed
8/29/2012	7:42:42 PM	Bubbler valve closed
8/29/2012	7:42:42 PM	Helium MFC set to  0.000000
8/29/2012	7:42:42 PM	H2 MFC set to  0.000000
8/29/2012	7:42:42 PM	BCl3 MFC set to  0.000000
8/29/2012	7:42:42 PM	PH3 MFC set to  0.000000
8/29/2012	7:42:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:42:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:42:42 PM	Tube furnace set to 0
8/29/2012	7:42:43 PM	Run finished at 7:42 PM
8/29/2012	7:42:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2012	7:45:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	7:45:24 PM	Recipe started at 7:45 PM
8/29/2012	7:45:24 PM	Helium valve closed
8/29/2012	7:45:24 PM	H2 valve closed
8/29/2012	7:45:24 PM	BCl3 valve closed
8/29/2012	7:45:24 PM	PH3 valve closed
8/29/2012	7:45:24 PM	SiCl4 pre valve closed
8/29/2012	7:45:24 PM	SiCl4 post valve closed
8/29/2012	7:45:24 PM	Main Vac valve closed
8/29/2012	7:45:24 PM	Bubbler valve closed
8/29/2012	7:45:24 PM	Bypass valve opened
8/29/2012	7:45:24 PM	Helium MFC set to  0.000000
8/29/2012	7:45:24 PM	H2 MFC set to  0.000000
8/29/2012	7:45:24 PM	BCl3 MFC set to  0.000000
8/29/2012	7:45:24 PM	PH3 MFC set to  0.000000
8/29/2012	7:45:24 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:45:24 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:45:24 PM	Tube furnace set to 0
8/29/2012	7:46:40 PM	Helium valve closed
8/29/2012	7:46:40 PM	H2 valve closed
8/29/2012	7:46:40 PM	BCl3 valve closed
8/29/2012	7:46:40 PM	PH3 valve closed
8/29/2012	7:46:40 PM	SiCl4 pre valve closed
8/29/2012	7:46:41 PM	SiCl4 post valve closed
8/29/2012	7:46:41 PM	Main Vac valve closed
8/29/2012	7:46:41 PM	Bubbler valve closed
8/29/2012	7:46:41 PM	Bypass valve opened
8/29/2012	7:46:41 PM	Helium MFC set to  0.000000
8/29/2012	7:46:41 PM	H2 MFC set to  0.000000
8/29/2012	7:46:41 PM	BCl3 MFC set to  0.000000
8/29/2012	7:46:41 PM	PH3 MFC set to  0.000000
8/29/2012	7:46:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:46:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:46:41 PM	Tube furnace set to 0
8/29/2012	7:47:41 PM	Helium valve closed
8/29/2012	7:47:41 PM	H2 valve closed
8/29/2012	7:47:41 PM	BCl3 valve closed
8/29/2012	7:47:41 PM	PH3 valve closed
8/29/2012	7:47:41 PM	SiCl4 pre valve closed
8/29/2012	7:47:41 PM	SiCl4 post valve closed
8/29/2012	7:47:41 PM	Bypass valve closed
8/29/2012	7:47:41 PM	Bubbler valve closed
8/29/2012	7:47:41 PM	Main Vac valve opened
8/29/2012	7:47:41 PM	Helium MFC set to  0.000000
8/29/2012	7:47:41 PM	H2 MFC set to  0.000000
8/29/2012	7:47:41 PM	BCl3 MFC set to  0.000000
8/29/2012	7:47:41 PM	PH3 MFC set to  0.000000
8/29/2012	7:47:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:47:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:47:41 PM	Tube furnace set to 0
8/29/2012	7:47:42 PM	Run finished at 7:47 PM
8/29/2012	7:47:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2012	7:49:07 PM	Recipe started at 7:48 PM
8/29/2012	7:49:07 PM	Helium valve closed
8/29/2012	7:49:07 PM	H2 valve closed
8/29/2012	7:49:07 PM	BCl3 valve closed
8/29/2012	7:49:07 PM	PH3 valve closed
8/29/2012	7:49:07 PM	SiCl4 pre valve closed
8/29/2012	7:49:07 PM	SiCl4 post valve closed
8/29/2012	7:49:07 PM	Bypass valve closed
8/29/2012	7:49:07 PM	Bubbler valve closed
8/29/2012	7:49:07 PM	Main Vac valve opened
8/29/2012	7:49:07 PM	Helium MFC set to  0.000000
8/29/2012	7:49:07 PM	H2 MFC set to  0.000000
8/29/2012	7:49:07 PM	BCl3 MFC set to  0.000000
8/29/2012	7:49:07 PM	PH3 MFC set to  0.000000
8/29/2012	7:49:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:49:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:49:07 PM	Tube furnace set to 0
8/29/2012	7:49:37 PM	H2 valve closed
8/29/2012	7:49:37 PM	BCl3 valve closed
8/29/2012	7:49:37 PM	PH3 valve closed
8/29/2012	7:49:37 PM	SiCl4 pre valve closed
8/29/2012	7:49:37 PM	SiCl4 post valve closed
8/29/2012	7:49:37 PM	Bypass valve closed
8/29/2012	7:49:37 PM	Bubbler valve closed
8/29/2012	7:49:37 PM	Helium valve opened
8/29/2012	7:49:37 PM	Main Vac valve opened
8/29/2012	7:49:37 PM	Helium MFC set to  20.000000
8/29/2012	7:49:37 PM	H2 MFC set to  0.000000
8/29/2012	7:49:37 PM	BCl3 MFC set to  0.000000
8/29/2012	7:49:37 PM	PH3 MFC set to  0.000000
8/29/2012	7:49:37 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:49:37 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:49:37 PM	Tube furnace set to 0
8/29/2012	7:50:07 PM	Helium valve closed
8/29/2012	7:50:07 PM	H2 valve closed
8/29/2012	7:50:08 PM	BCl3 valve closed
8/29/2012	7:50:08 PM	PH3 valve closed
8/29/2012	7:50:08 PM	SiCl4 pre valve closed
8/29/2012	7:50:08 PM	SiCl4 post valve closed
8/29/2012	7:50:08 PM	Bypass valve closed
8/29/2012	7:50:08 PM	Bubbler valve closed
8/29/2012	7:50:08 PM	Main Vac valve opened
8/29/2012	7:50:08 PM	Helium MFC set to  0.000000
8/29/2012	7:50:08 PM	H2 MFC set to  0.000000
8/29/2012	7:50:08 PM	BCl3 MFC set to  0.000000
8/29/2012	7:50:08 PM	PH3 MFC set to  0.000000
8/29/2012	7:50:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:50:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:50:08 PM	Tube furnace set to 0
8/29/2012	7:50:38 PM	H2 valve closed
8/29/2012	7:50:38 PM	BCl3 valve closed
8/29/2012	7:50:38 PM	PH3 valve closed
8/29/2012	7:50:38 PM	SiCl4 pre valve closed
8/29/2012	7:50:38 PM	SiCl4 post valve closed
8/29/2012	7:50:38 PM	Bypass valve closed
8/29/2012	7:50:38 PM	Bubbler valve closed
8/29/2012	7:50:38 PM	Helium valve opened
8/29/2012	7:50:38 PM	Main Vac valve opened
8/29/2012	7:50:38 PM	Helium MFC set to  20.000000
8/29/2012	7:50:38 PM	H2 MFC set to  0.000000
8/29/2012	7:50:38 PM	BCl3 MFC set to  0.000000
8/29/2012	7:50:38 PM	PH3 MFC set to  0.000000
8/29/2012	7:50:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:50:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:50:38 PM	Tube furnace set to 0
8/29/2012	7:51:08 PM	Helium valve closed
8/29/2012	7:51:08 PM	H2 valve closed
8/29/2012	7:51:08 PM	BCl3 valve closed
8/29/2012	7:51:08 PM	PH3 valve closed
8/29/2012	7:51:08 PM	SiCl4 pre valve closed
8/29/2012	7:51:08 PM	SiCl4 post valve closed
8/29/2012	7:51:08 PM	Bypass valve closed
8/29/2012	7:51:08 PM	Bubbler valve closed
8/29/2012	7:51:08 PM	Main Vac valve opened
8/29/2012	7:51:08 PM	Helium MFC set to  0.000000
8/29/2012	7:51:08 PM	H2 MFC set to  0.000000
8/29/2012	7:51:08 PM	BCl3 MFC set to  0.000000
8/29/2012	7:51:08 PM	PH3 MFC set to  0.000000
8/29/2012	7:51:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:51:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:51:08 PM	Tube furnace set to 0
8/29/2012	7:51:38 PM	H2 valve closed
8/29/2012	7:51:38 PM	BCl3 valve closed
8/29/2012	7:51:38 PM	PH3 valve closed
8/29/2012	7:51:38 PM	SiCl4 pre valve closed
8/29/2012	7:51:38 PM	SiCl4 post valve closed
8/29/2012	7:51:38 PM	Bypass valve closed
8/29/2012	7:51:38 PM	Bubbler valve closed
8/29/2012	7:51:38 PM	Helium valve opened
8/29/2012	7:51:38 PM	Main Vac valve opened
8/29/2012	7:51:38 PM	Helium MFC set to  20.000000
8/29/2012	7:51:38 PM	H2 MFC set to  0.000000
8/29/2012	7:51:38 PM	BCl3 MFC set to  0.000000
8/29/2012	7:51:38 PM	PH3 MFC set to  0.000000
8/29/2012	7:51:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:51:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:51:38 PM	Tube furnace set to 0
8/29/2012	7:52:08 PM	Helium valve closed
8/29/2012	7:52:08 PM	H2 valve closed
8/29/2012	7:52:08 PM	BCl3 valve closed
8/29/2012	7:52:08 PM	PH3 valve closed
8/29/2012	7:52:08 PM	SiCl4 pre valve closed
8/29/2012	7:52:08 PM	SiCl4 post valve closed
8/29/2012	7:52:08 PM	Bypass valve closed
8/29/2012	7:52:08 PM	Bubbler valve closed
8/29/2012	7:52:08 PM	Main Vac valve opened
8/29/2012	7:52:08 PM	Helium MFC set to  0.000000
8/29/2012	7:52:08 PM	H2 MFC set to  0.000000
8/29/2012	7:52:08 PM	BCl3 MFC set to  0.000000
8/29/2012	7:52:08 PM	PH3 MFC set to  0.000000
8/29/2012	7:52:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:52:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:52:09 PM	Tube furnace set to 0
8/29/2012	7:52:39 PM	H2 valve closed
8/29/2012	7:52:39 PM	BCl3 valve closed
8/29/2012	7:52:39 PM	PH3 valve closed
8/29/2012	7:52:39 PM	SiCl4 pre valve closed
8/29/2012	7:52:39 PM	SiCl4 post valve closed
8/29/2012	7:52:39 PM	Bypass valve closed
8/29/2012	7:52:39 PM	Bubbler valve closed
8/29/2012	7:52:39 PM	Helium valve opened
8/29/2012	7:52:39 PM	Main Vac valve opened
8/29/2012	7:52:39 PM	Helium MFC set to  20.000000
8/29/2012	7:52:39 PM	H2 MFC set to  0.000000
8/29/2012	7:52:39 PM	BCl3 MFC set to  0.000000
8/29/2012	7:52:39 PM	PH3 MFC set to  0.000000
8/29/2012	7:52:39 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:52:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:52:39 PM	Tube furnace set to 0
8/29/2012	7:53:09 PM	Helium valve closed
8/29/2012	7:53:09 PM	H2 valve closed
8/29/2012	7:53:09 PM	BCl3 valve closed
8/29/2012	7:53:09 PM	PH3 valve closed
8/29/2012	7:53:09 PM	SiCl4 pre valve closed
8/29/2012	7:53:09 PM	SiCl4 post valve closed
8/29/2012	7:53:09 PM	Bypass valve closed
8/29/2012	7:53:09 PM	Bubbler valve closed
8/29/2012	7:53:09 PM	Main Vac valve opened
8/29/2012	7:53:09 PM	Helium MFC set to  0.000000
8/29/2012	7:53:09 PM	H2 MFC set to  0.000000
8/29/2012	7:53:09 PM	BCl3 MFC set to  0.000000
8/29/2012	7:53:09 PM	PH3 MFC set to  0.000000
8/29/2012	7:53:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:53:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:53:09 PM	Tube furnace set to 0
8/29/2012	7:53:39 PM	H2 valve closed
8/29/2012	7:53:39 PM	BCl3 valve closed
8/29/2012	7:53:39 PM	PH3 valve closed
8/29/2012	7:53:39 PM	SiCl4 pre valve closed
8/29/2012	7:53:39 PM	SiCl4 post valve closed
8/29/2012	7:53:39 PM	Bypass valve closed
8/29/2012	7:53:39 PM	Bubbler valve closed
8/29/2012	7:53:39 PM	Helium valve opened
8/29/2012	7:53:39 PM	Main Vac valve opened
8/29/2012	7:53:39 PM	Helium MFC set to  20.000000
8/29/2012	7:53:39 PM	H2 MFC set to  0.000000
8/29/2012	7:53:39 PM	BCl3 MFC set to  0.000000
8/29/2012	7:53:39 PM	PH3 MFC set to  0.000000
8/29/2012	7:53:39 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:53:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:53:39 PM	Tube furnace set to 0
8/29/2012	7:54:09 PM	Helium valve closed
8/29/2012	7:54:09 PM	H2 valve closed
8/29/2012	7:54:09 PM	BCl3 valve closed
8/29/2012	7:54:09 PM	PH3 valve closed
8/29/2012	7:54:09 PM	SiCl4 pre valve closed
8/29/2012	7:54:09 PM	SiCl4 post valve closed
8/29/2012	7:54:09 PM	Bypass valve closed
8/29/2012	7:54:09 PM	Bubbler valve closed
8/29/2012	7:54:09 PM	Main Vac valve opened
8/29/2012	7:54:09 PM	Helium MFC set to  0.000000
8/29/2012	7:54:09 PM	H2 MFC set to  0.000000
8/29/2012	7:54:09 PM	BCl3 MFC set to  0.000000
8/29/2012	7:54:09 PM	PH3 MFC set to  0.000000
8/29/2012	7:54:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:54:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:54:10 PM	Tube furnace set to 0
8/29/2012	7:54:40 PM	H2 valve closed
8/29/2012	7:54:40 PM	BCl3 valve closed
8/29/2012	7:54:40 PM	PH3 valve closed
8/29/2012	7:54:40 PM	SiCl4 pre valve closed
8/29/2012	7:54:40 PM	SiCl4 post valve closed
8/29/2012	7:54:40 PM	Bypass valve closed
8/29/2012	7:54:40 PM	Bubbler valve closed
8/29/2012	7:54:40 PM	Helium valve opened
8/29/2012	7:54:40 PM	Main Vac valve opened
8/29/2012	7:54:40 PM	Helium MFC set to  20.000000
8/29/2012	7:54:40 PM	H2 MFC set to  0.000000
8/29/2012	7:54:40 PM	BCl3 MFC set to  0.000000
8/29/2012	7:54:40 PM	PH3 MFC set to  0.000000
8/29/2012	7:54:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:54:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:54:40 PM	Tube furnace set to 0
8/29/2012	7:55:10 PM	Helium valve closed
8/29/2012	7:55:10 PM	H2 valve closed
8/29/2012	7:55:10 PM	BCl3 valve closed
8/29/2012	7:55:10 PM	PH3 valve closed
8/29/2012	7:55:10 PM	SiCl4 pre valve closed
8/29/2012	7:55:10 PM	SiCl4 post valve closed
8/29/2012	7:55:10 PM	Bypass valve closed
8/29/2012	7:55:10 PM	Bubbler valve closed
8/29/2012	7:55:10 PM	Main Vac valve opened
8/29/2012	7:55:10 PM	Helium MFC set to  0.000000
8/29/2012	7:55:10 PM	H2 MFC set to  0.000000
8/29/2012	7:55:10 PM	BCl3 MFC set to  0.000000
8/29/2012	7:55:10 PM	PH3 MFC set to  0.000000
8/29/2012	7:55:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:55:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:55:10 PM	Tube furnace set to 0
8/29/2012	7:55:40 PM	H2 valve closed
8/29/2012	7:55:40 PM	BCl3 valve closed
8/29/2012	7:55:40 PM	PH3 valve closed
8/29/2012	7:55:40 PM	SiCl4 pre valve closed
8/29/2012	7:55:40 PM	SiCl4 post valve closed
8/29/2012	7:55:40 PM	Bypass valve closed
8/29/2012	7:55:40 PM	Bubbler valve closed
8/29/2012	7:55:40 PM	Helium valve opened
8/29/2012	7:55:40 PM	Main Vac valve opened
8/29/2012	7:55:40 PM	Helium MFC set to  20.000000
8/29/2012	7:55:40 PM	H2 MFC set to  0.000000
8/29/2012	7:55:40 PM	BCl3 MFC set to  0.000000
8/29/2012	7:55:40 PM	PH3 MFC set to  0.000000
8/29/2012	7:55:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:55:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:55:40 PM	Tube furnace set to 0
8/29/2012	7:56:10 PM	Helium valve closed
8/29/2012	7:56:10 PM	H2 valve closed
8/29/2012	7:56:10 PM	BCl3 valve closed
8/29/2012	7:56:10 PM	PH3 valve closed
8/29/2012	7:56:10 PM	SiCl4 pre valve closed
8/29/2012	7:56:10 PM	SiCl4 post valve closed
8/29/2012	7:56:10 PM	Bypass valve closed
8/29/2012	7:56:10 PM	Bubbler valve closed
8/29/2012	7:56:10 PM	Main Vac valve opened
8/29/2012	7:56:10 PM	Helium MFC set to  0.000000
8/29/2012	7:56:10 PM	H2 MFC set to  0.000000
8/29/2012	7:56:10 PM	BCl3 MFC set to  0.000000
8/29/2012	7:56:10 PM	PH3 MFC set to  0.000000
8/29/2012	7:56:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:56:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:56:11 PM	Tube furnace set to 0
8/29/2012	7:56:41 PM	H2 valve closed
8/29/2012	7:56:41 PM	BCl3 valve closed
8/29/2012	7:56:41 PM	PH3 valve closed
8/29/2012	7:56:41 PM	SiCl4 pre valve closed
8/29/2012	7:56:41 PM	SiCl4 post valve closed
8/29/2012	7:56:41 PM	Bypass valve closed
8/29/2012	7:56:41 PM	Bubbler valve closed
8/29/2012	7:56:41 PM	Helium valve opened
8/29/2012	7:56:41 PM	Main Vac valve opened
8/29/2012	7:56:41 PM	Helium MFC set to  20.000000
8/29/2012	7:56:41 PM	H2 MFC set to  0.000000
8/29/2012	7:56:41 PM	BCl3 MFC set to  0.000000
8/29/2012	7:56:41 PM	PH3 MFC set to  0.000000
8/29/2012	7:56:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:56:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:56:41 PM	Tube furnace set to 0
8/29/2012	7:57:11 PM	Helium valve closed
8/29/2012	7:57:11 PM	H2 valve closed
8/29/2012	7:57:11 PM	BCl3 valve closed
8/29/2012	7:57:11 PM	PH3 valve closed
8/29/2012	7:57:11 PM	SiCl4 pre valve closed
8/29/2012	7:57:11 PM	SiCl4 post valve closed
8/29/2012	7:57:11 PM	Bypass valve closed
8/29/2012	7:57:11 PM	Bubbler valve closed
8/29/2012	7:57:11 PM	Main Vac valve opened
8/29/2012	7:57:11 PM	Helium MFC set to  0.000000
8/29/2012	7:57:11 PM	H2 MFC set to  0.000000
8/29/2012	7:57:11 PM	BCl3 MFC set to  0.000000
8/29/2012	7:57:11 PM	PH3 MFC set to  0.000000
8/29/2012	7:57:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:57:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:57:11 PM	Tube furnace set to 0
8/29/2012	7:57:41 PM	H2 valve closed
8/29/2012	7:57:41 PM	BCl3 valve closed
8/29/2012	7:57:41 PM	PH3 valve closed
8/29/2012	7:57:41 PM	SiCl4 pre valve closed
8/29/2012	7:57:41 PM	SiCl4 post valve closed
8/29/2012	7:57:41 PM	Bypass valve closed
8/29/2012	7:57:41 PM	Bubbler valve closed
8/29/2012	7:57:41 PM	Helium valve opened
8/29/2012	7:57:41 PM	Main Vac valve opened
8/29/2012	7:57:41 PM	Helium MFC set to  20.000000
8/29/2012	7:57:41 PM	H2 MFC set to  0.000000
8/29/2012	7:57:41 PM	BCl3 MFC set to  0.000000
8/29/2012	7:57:41 PM	PH3 MFC set to  0.000000
8/29/2012	7:57:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:57:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:57:41 PM	Tube furnace set to 0
8/29/2012	7:58:11 PM	Helium valve closed
8/29/2012	7:58:11 PM	H2 valve closed
8/29/2012	7:58:11 PM	BCl3 valve closed
8/29/2012	7:58:11 PM	PH3 valve closed
8/29/2012	7:58:11 PM	SiCl4 pre valve closed
8/29/2012	7:58:11 PM	SiCl4 post valve closed
8/29/2012	7:58:11 PM	Bypass valve closed
8/29/2012	7:58:11 PM	Bubbler valve closed
8/29/2012	7:58:11 PM	Main Vac valve opened
8/29/2012	7:58:11 PM	Helium MFC set to  0.000000
8/29/2012	7:58:11 PM	H2 MFC set to  0.000000
8/29/2012	7:58:11 PM	BCl3 MFC set to  0.000000
8/29/2012	7:58:11 PM	PH3 MFC set to  0.000000
8/29/2012	7:58:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:58:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:58:11 PM	Tube furnace set to 200
8/29/2012	7:58:41 PM	H2 valve closed
8/29/2012	7:58:42 PM	BCl3 valve closed
8/29/2012	7:58:42 PM	PH3 valve closed
8/29/2012	7:58:42 PM	SiCl4 pre valve closed
8/29/2012	7:58:42 PM	SiCl4 post valve closed
8/29/2012	7:58:42 PM	Bypass valve closed
8/29/2012	7:58:42 PM	Bubbler valve closed
8/29/2012	7:58:42 PM	Helium valve opened
8/29/2012	7:58:42 PM	Main Vac valve opened
8/29/2012	7:58:42 PM	Helium MFC set to  20.000000
8/29/2012	7:58:42 PM	H2 MFC set to  0.000000
8/29/2012	7:58:42 PM	BCl3 MFC set to  0.000000
8/29/2012	7:58:42 PM	PH3 MFC set to  0.000000
8/29/2012	7:58:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:58:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:58:42 PM	Tube furnace set to 200
8/29/2012	7:59:12 PM	Helium valve closed
8/29/2012	7:59:12 PM	H2 valve closed
8/29/2012	7:59:12 PM	BCl3 valve closed
8/29/2012	7:59:12 PM	PH3 valve closed
8/29/2012	7:59:12 PM	SiCl4 pre valve closed
8/29/2012	7:59:12 PM	SiCl4 post valve closed
8/29/2012	7:59:12 PM	Bypass valve closed
8/29/2012	7:59:12 PM	Bubbler valve closed
8/29/2012	7:59:12 PM	Main Vac valve opened
8/29/2012	7:59:12 PM	Helium MFC set to  0.000000
8/29/2012	7:59:12 PM	H2 MFC set to  0.000000
8/29/2012	7:59:12 PM	BCl3 MFC set to  0.000000
8/29/2012	7:59:12 PM	PH3 MFC set to  0.000000
8/29/2012	7:59:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:59:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:59:12 PM	Tube furnace set to 200
8/29/2012	7:59:42 PM	H2 valve closed
8/29/2012	7:59:42 PM	BCl3 valve closed
8/29/2012	7:59:42 PM	PH3 valve closed
8/29/2012	7:59:42 PM	SiCl4 pre valve closed
8/29/2012	7:59:42 PM	SiCl4 post valve closed
8/29/2012	7:59:42 PM	Bypass valve closed
8/29/2012	7:59:42 PM	Bubbler valve closed
8/29/2012	7:59:42 PM	Helium valve opened
8/29/2012	7:59:42 PM	Main Vac valve opened
8/29/2012	7:59:42 PM	Helium MFC set to  20.000000
8/29/2012	7:59:42 PM	H2 MFC set to  0.000000
8/29/2012	7:59:42 PM	BCl3 MFC set to  0.000000
8/29/2012	7:59:42 PM	PH3 MFC set to  0.000000
8/29/2012	7:59:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	7:59:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	7:59:42 PM	Tube furnace set to 200
8/29/2012	8:00:12 PM	Helium valve closed
8/29/2012	8:00:12 PM	H2 valve closed
8/29/2012	8:00:12 PM	BCl3 valve closed
8/29/2012	8:00:12 PM	PH3 valve closed
8/29/2012	8:00:12 PM	SiCl4 pre valve closed
8/29/2012	8:00:12 PM	SiCl4 post valve closed
8/29/2012	8:00:12 PM	Bypass valve closed
8/29/2012	8:00:12 PM	Bubbler valve closed
8/29/2012	8:00:12 PM	Main Vac valve opened
8/29/2012	8:00:12 PM	Helium MFC set to  0.000000
8/29/2012	8:00:12 PM	H2 MFC set to  0.000000
8/29/2012	8:00:12 PM	BCl3 MFC set to  0.000000
8/29/2012	8:00:12 PM	PH3 MFC set to  0.000000
8/29/2012	8:00:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:00:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:00:12 PM	Tube furnace set to 200
8/29/2012	8:00:42 PM	H2 valve closed
8/29/2012	8:00:42 PM	BCl3 valve closed
8/29/2012	8:00:42 PM	PH3 valve closed
8/29/2012	8:00:42 PM	SiCl4 pre valve closed
8/29/2012	8:00:42 PM	SiCl4 post valve closed
8/29/2012	8:00:42 PM	Bypass valve closed
8/29/2012	8:00:42 PM	Bubbler valve closed
8/29/2012	8:00:42 PM	Helium valve opened
8/29/2012	8:00:42 PM	Main Vac valve opened
8/29/2012	8:00:42 PM	Helium MFC set to  20.000000
8/29/2012	8:00:42 PM	H2 MFC set to  0.000000
8/29/2012	8:00:42 PM	BCl3 MFC set to  0.000000
8/29/2012	8:00:43 PM	PH3 MFC set to  0.000000
8/29/2012	8:00:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:00:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:00:43 PM	Tube furnace set to 200
8/29/2012	8:01:13 PM	Helium valve closed
8/29/2012	8:01:13 PM	H2 valve closed
8/29/2012	8:01:13 PM	BCl3 valve closed
8/29/2012	8:01:13 PM	PH3 valve closed
8/29/2012	8:01:13 PM	SiCl4 pre valve closed
8/29/2012	8:01:13 PM	SiCl4 post valve closed
8/29/2012	8:01:13 PM	Bypass valve closed
8/29/2012	8:01:13 PM	Bubbler valve closed
8/29/2012	8:01:13 PM	Main Vac valve opened
8/29/2012	8:01:13 PM	Helium MFC set to  0.000000
8/29/2012	8:01:13 PM	H2 MFC set to  0.000000
8/29/2012	8:01:13 PM	BCl3 MFC set to  0.000000
8/29/2012	8:01:13 PM	PH3 MFC set to  0.000000
8/29/2012	8:01:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:01:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:01:13 PM	Tube furnace set to 200
8/29/2012	8:01:43 PM	H2 valve closed
8/29/2012	8:01:43 PM	BCl3 valve closed
8/29/2012	8:01:43 PM	PH3 valve closed
8/29/2012	8:01:43 PM	SiCl4 pre valve closed
8/29/2012	8:01:43 PM	SiCl4 post valve closed
8/29/2012	8:01:43 PM	Bypass valve closed
8/29/2012	8:01:43 PM	Bubbler valve closed
8/29/2012	8:01:43 PM	Helium valve opened
8/29/2012	8:01:43 PM	Main Vac valve opened
8/29/2012	8:01:43 PM	Helium MFC set to  20.000000
8/29/2012	8:01:43 PM	H2 MFC set to  0.000000
8/29/2012	8:01:43 PM	BCl3 MFC set to  0.000000
8/29/2012	8:01:43 PM	PH3 MFC set to  0.000000
8/29/2012	8:01:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:01:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:01:43 PM	Tube furnace set to 200
8/29/2012	8:02:13 PM	Helium valve closed
8/29/2012	8:02:13 PM	H2 valve closed
8/29/2012	8:02:13 PM	BCl3 valve closed
8/29/2012	8:02:13 PM	PH3 valve closed
8/29/2012	8:02:13 PM	SiCl4 pre valve closed
8/29/2012	8:02:13 PM	SiCl4 post valve closed
8/29/2012	8:02:13 PM	Bypass valve closed
8/29/2012	8:02:13 PM	Bubbler valve closed
8/29/2012	8:02:13 PM	Main Vac valve opened
8/29/2012	8:02:13 PM	Helium MFC set to  0.000000
8/29/2012	8:02:13 PM	H2 MFC set to  0.000000
8/29/2012	8:02:13 PM	BCl3 MFC set to  0.000000
8/29/2012	8:02:13 PM	PH3 MFC set to  0.000000
8/29/2012	8:02:13 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:02:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:02:13 PM	Tube furnace set to 200
8/29/2012	8:02:43 PM	H2 valve closed
8/29/2012	8:02:43 PM	BCl3 valve closed
8/29/2012	8:02:43 PM	PH3 valve closed
8/29/2012	8:02:43 PM	SiCl4 pre valve closed
8/29/2012	8:02:43 PM	SiCl4 post valve closed
8/29/2012	8:02:43 PM	Bypass valve closed
8/29/2012	8:02:43 PM	Bubbler valve closed
8/29/2012	8:02:43 PM	Helium valve opened
8/29/2012	8:02:43 PM	Main Vac valve opened
8/29/2012	8:02:43 PM	Helium MFC set to  20.000000
8/29/2012	8:02:43 PM	H2 MFC set to  0.000000
8/29/2012	8:02:43 PM	BCl3 MFC set to  0.000000
8/29/2012	8:02:43 PM	PH3 MFC set to  0.000000
8/29/2012	8:02:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:02:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:02:44 PM	Tube furnace set to 200
8/29/2012	8:03:14 PM	Helium valve closed
8/29/2012	8:03:14 PM	H2 valve closed
8/29/2012	8:03:14 PM	BCl3 valve closed
8/29/2012	8:03:14 PM	PH3 valve closed
8/29/2012	8:03:14 PM	SiCl4 pre valve closed
8/29/2012	8:03:14 PM	SiCl4 post valve closed
8/29/2012	8:03:14 PM	Bypass valve closed
8/29/2012	8:03:14 PM	Bubbler valve closed
8/29/2012	8:03:14 PM	Main Vac valve opened
8/29/2012	8:03:14 PM	Helium MFC set to  0.000000
8/29/2012	8:03:14 PM	H2 MFC set to  0.000000
8/29/2012	8:03:14 PM	BCl3 MFC set to  0.000000
8/29/2012	8:03:14 PM	PH3 MFC set to  0.000000
8/29/2012	8:03:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:03:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:03:14 PM	Tube furnace set to 200
8/29/2012	8:03:44 PM	H2 valve closed
8/29/2012	8:03:44 PM	BCl3 valve closed
8/29/2012	8:03:44 PM	PH3 valve closed
8/29/2012	8:03:44 PM	SiCl4 pre valve closed
8/29/2012	8:03:44 PM	SiCl4 post valve closed
8/29/2012	8:03:44 PM	Bypass valve closed
8/29/2012	8:03:44 PM	Bubbler valve closed
8/29/2012	8:03:44 PM	Helium valve opened
8/29/2012	8:03:44 PM	Main Vac valve opened
8/29/2012	8:03:44 PM	Helium MFC set to  20.000000
8/29/2012	8:03:44 PM	H2 MFC set to  0.000000
8/29/2012	8:03:44 PM	BCl3 MFC set to  0.000000
8/29/2012	8:03:44 PM	PH3 MFC set to  0.000000
8/29/2012	8:03:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:03:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:03:44 PM	Tube furnace set to 200
8/29/2012	8:04:14 PM	Helium valve closed
8/29/2012	8:04:14 PM	H2 valve closed
8/29/2012	8:04:14 PM	BCl3 valve closed
8/29/2012	8:04:14 PM	PH3 valve closed
8/29/2012	8:04:14 PM	SiCl4 pre valve closed
8/29/2012	8:04:14 PM	SiCl4 post valve closed
8/29/2012	8:04:14 PM	Bypass valve closed
8/29/2012	8:04:14 PM	Bubbler valve closed
8/29/2012	8:04:14 PM	Main Vac valve opened
8/29/2012	8:04:14 PM	Helium MFC set to  0.000000
8/29/2012	8:04:14 PM	H2 MFC set to  0.000000
8/29/2012	8:04:14 PM	BCl3 MFC set to  0.000000
8/29/2012	8:04:14 PM	PH3 MFC set to  0.000000
8/29/2012	8:04:14 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:04:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:04:14 PM	Tube furnace set to 0
8/29/2012	8:04:15 PM	Run finished at 8:04 PM
8/29/2012	8:19:31 PM	Recipe started at 8:19 PM
8/29/2012	8:19:31 PM	Helium valve closed
8/29/2012	8:19:31 PM	H2 valve closed
8/29/2012	8:19:31 PM	BCl3 valve closed
8/29/2012	8:19:31 PM	PH3 valve closed
8/29/2012	8:19:31 PM	SiCl4 pre valve closed
8/29/2012	8:19:31 PM	SiCl4 post valve closed
8/29/2012	8:19:31 PM	Bypass valve closed
8/29/2012	8:19:31 PM	Bubbler valve closed
8/29/2012	8:19:31 PM	Main Vac valve opened
8/29/2012	8:19:31 PM	Helium MFC set to  0.000000
8/29/2012	8:19:31 PM	H2 MFC set to  0.000000
8/29/2012	8:19:31 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:31 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:31 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:31 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:31 PM	Tube furnace set to 0
8/29/2012	8:19:32 PM	H2 valve closed
8/29/2012	8:19:32 PM	BCl3 valve closed
8/29/2012	8:19:32 PM	PH3 valve closed
8/29/2012	8:19:32 PM	SiCl4 pre valve closed
8/29/2012	8:19:32 PM	SiCl4 post valve closed
8/29/2012	8:19:32 PM	Bypass valve closed
8/29/2012	8:19:32 PM	Bubbler valve closed
8/29/2012	8:19:32 PM	Helium valve opened
8/29/2012	8:19:32 PM	Main Vac valve opened
8/29/2012	8:19:32 PM	Helium MFC set to  20.000000
8/29/2012	8:19:32 PM	H2 MFC set to  0.000000
8/29/2012	8:19:32 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:32 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:32 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:32 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:32 PM	Tube furnace set to 0
8/29/2012	8:19:32 PM	Helium valve closed
8/29/2012	8:19:32 PM	H2 valve closed
8/29/2012	8:19:32 PM	BCl3 valve closed
8/29/2012	8:19:32 PM	PH3 valve closed
8/29/2012	8:19:32 PM	SiCl4 pre valve closed
8/29/2012	8:19:32 PM	SiCl4 post valve closed
8/29/2012	8:19:32 PM	Bypass valve closed
8/29/2012	8:19:32 PM	Bubbler valve closed
8/29/2012	8:19:32 PM	Main Vac valve opened
8/29/2012	8:19:32 PM	Helium MFC set to  0.000000
8/29/2012	8:19:32 PM	H2 MFC set to  0.000000
8/29/2012	8:19:32 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:32 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:32 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:32 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:32 PM	Tube furnace set to 0
8/29/2012	8:19:33 PM	H2 valve closed
8/29/2012	8:19:33 PM	BCl3 valve closed
8/29/2012	8:19:33 PM	PH3 valve closed
8/29/2012	8:19:33 PM	SiCl4 pre valve closed
8/29/2012	8:19:33 PM	SiCl4 post valve closed
8/29/2012	8:19:33 PM	Bypass valve closed
8/29/2012	8:19:33 PM	Bubbler valve closed
8/29/2012	8:19:33 PM	Helium valve opened
8/29/2012	8:19:33 PM	Main Vac valve opened
8/29/2012	8:19:33 PM	Helium MFC set to  20.000000
8/29/2012	8:19:33 PM	H2 MFC set to  0.000000
8/29/2012	8:19:33 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:33 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:33 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:33 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:33 PM	Tube furnace set to 0
8/29/2012	8:19:34 PM	Helium valve closed
8/29/2012	8:19:34 PM	H2 valve closed
8/29/2012	8:19:34 PM	BCl3 valve closed
8/29/2012	8:19:34 PM	PH3 valve closed
8/29/2012	8:19:34 PM	SiCl4 pre valve closed
8/29/2012	8:19:34 PM	SiCl4 post valve closed
8/29/2012	8:19:34 PM	Bypass valve closed
8/29/2012	8:19:34 PM	Bubbler valve closed
8/29/2012	8:19:34 PM	Main Vac valve opened
8/29/2012	8:19:34 PM	Helium MFC set to  0.000000
8/29/2012	8:19:34 PM	H2 MFC set to  0.000000
8/29/2012	8:19:34 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:34 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:34 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:34 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:34 PM	Tube furnace set to 0
8/29/2012	8:19:35 PM	H2 valve closed
8/29/2012	8:19:35 PM	BCl3 valve closed
8/29/2012	8:19:35 PM	PH3 valve closed
8/29/2012	8:19:35 PM	SiCl4 pre valve closed
8/29/2012	8:19:35 PM	SiCl4 post valve closed
8/29/2012	8:19:35 PM	Bypass valve closed
8/29/2012	8:19:35 PM	Bubbler valve closed
8/29/2012	8:19:35 PM	Helium valve opened
8/29/2012	8:19:35 PM	Main Vac valve opened
8/29/2012	8:19:35 PM	Helium MFC set to  20.000000
8/29/2012	8:19:35 PM	H2 MFC set to  0.000000
8/29/2012	8:19:35 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:35 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:35 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:35 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:35 PM	Tube furnace set to 0
8/29/2012	8:19:35 PM	Helium valve closed
8/29/2012	8:19:35 PM	H2 valve closed
8/29/2012	8:19:35 PM	BCl3 valve closed
8/29/2012	8:19:35 PM	PH3 valve closed
8/29/2012	8:19:35 PM	SiCl4 pre valve closed
8/29/2012	8:19:35 PM	SiCl4 post valve closed
8/29/2012	8:19:35 PM	Bypass valve closed
8/29/2012	8:19:35 PM	Bubbler valve closed
8/29/2012	8:19:35 PM	Main Vac valve opened
8/29/2012	8:19:35 PM	Helium MFC set to  0.000000
8/29/2012	8:19:35 PM	H2 MFC set to  0.000000
8/29/2012	8:19:35 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:35 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:35 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:35 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:36 PM	Tube furnace set to 0
8/29/2012	8:19:36 PM	H2 valve closed
8/29/2012	8:19:36 PM	BCl3 valve closed
8/29/2012	8:19:36 PM	PH3 valve closed
8/29/2012	8:19:36 PM	SiCl4 pre valve closed
8/29/2012	8:19:36 PM	SiCl4 post valve closed
8/29/2012	8:19:36 PM	Bypass valve closed
8/29/2012	8:19:36 PM	Bubbler valve closed
8/29/2012	8:19:36 PM	Helium valve opened
8/29/2012	8:19:36 PM	Main Vac valve opened
8/29/2012	8:19:36 PM	Helium MFC set to  20.000000
8/29/2012	8:19:36 PM	H2 MFC set to  0.000000
8/29/2012	8:19:36 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:36 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:36 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:36 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:36 PM	Tube furnace set to 0
8/29/2012	8:19:37 PM	Helium valve closed
8/29/2012	8:19:37 PM	H2 valve closed
8/29/2012	8:19:37 PM	BCl3 valve closed
8/29/2012	8:19:37 PM	PH3 valve closed
8/29/2012	8:19:37 PM	SiCl4 pre valve closed
8/29/2012	8:19:37 PM	SiCl4 post valve closed
8/29/2012	8:19:37 PM	Bypass valve closed
8/29/2012	8:19:37 PM	Bubbler valve closed
8/29/2012	8:19:37 PM	Main Vac valve opened
8/29/2012	8:19:37 PM	Helium MFC set to  0.000000
8/29/2012	8:19:37 PM	H2 MFC set to  0.000000
8/29/2012	8:19:37 PM	BCl3 MFC set to  0.000000
8/29/2012	8:19:37 PM	PH3 MFC set to  0.000000
8/29/2012	8:19:37 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:19:37 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:19:37 PM	Tube furnace set to 0
8/29/2012	8:20:07 PM	H2 valve closed
8/29/2012	8:20:07 PM	BCl3 valve closed
8/29/2012	8:20:07 PM	PH3 valve closed
8/29/2012	8:20:07 PM	SiCl4 pre valve closed
8/29/2012	8:20:07 PM	SiCl4 post valve closed
8/29/2012	8:20:07 PM	Bypass valve closed
8/29/2012	8:20:07 PM	Bubbler valve closed
8/29/2012	8:20:07 PM	Helium valve opened
8/29/2012	8:20:07 PM	Main Vac valve opened
8/29/2012	8:20:07 PM	Helium MFC set to  20.000000
8/29/2012	8:20:07 PM	H2 MFC set to  0.000000
8/29/2012	8:20:07 PM	BCl3 MFC set to  0.000000
8/29/2012	8:20:07 PM	PH3 MFC set to  0.000000
8/29/2012	8:20:07 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:20:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:20:08 PM	Tube furnace set to 0
8/29/2012	8:20:38 PM	Helium valve closed
8/29/2012	8:20:38 PM	H2 valve closed
8/29/2012	8:20:38 PM	BCl3 valve closed
8/29/2012	8:20:38 PM	PH3 valve closed
8/29/2012	8:20:38 PM	SiCl4 pre valve closed
8/29/2012	8:20:38 PM	SiCl4 post valve closed
8/29/2012	8:20:38 PM	Bypass valve closed
8/29/2012	8:20:38 PM	Bubbler valve closed
8/29/2012	8:20:38 PM	Main Vac valve opened
8/29/2012	8:20:38 PM	Helium MFC set to  0.000000
8/29/2012	8:20:38 PM	H2 MFC set to  0.000000
8/29/2012	8:20:38 PM	BCl3 MFC set to  0.000000
8/29/2012	8:20:38 PM	PH3 MFC set to  0.000000
8/29/2012	8:20:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:20:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:20:38 PM	Tube furnace set to 0
8/29/2012	8:21:08 PM	H2 valve closed
8/29/2012	8:21:08 PM	BCl3 valve closed
8/29/2012	8:21:08 PM	PH3 valve closed
8/29/2012	8:21:08 PM	SiCl4 pre valve closed
8/29/2012	8:21:08 PM	SiCl4 post valve closed
8/29/2012	8:21:08 PM	Bypass valve closed
8/29/2012	8:21:08 PM	Bubbler valve closed
8/29/2012	8:21:08 PM	Helium valve opened
8/29/2012	8:21:08 PM	Main Vac valve opened
8/29/2012	8:21:08 PM	Helium MFC set to  20.000000
8/29/2012	8:21:08 PM	H2 MFC set to  0.000000
8/29/2012	8:21:08 PM	BCl3 MFC set to  0.000000
8/29/2012	8:21:08 PM	PH3 MFC set to  0.000000
8/29/2012	8:21:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:21:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:21:08 PM	Tube furnace set to 0
8/29/2012	8:21:38 PM	Helium valve closed
8/29/2012	8:21:38 PM	H2 valve closed
8/29/2012	8:21:38 PM	BCl3 valve closed
8/29/2012	8:21:38 PM	PH3 valve closed
8/29/2012	8:21:38 PM	SiCl4 pre valve closed
8/29/2012	8:21:38 PM	SiCl4 post valve closed
8/29/2012	8:21:38 PM	Bypass valve closed
8/29/2012	8:21:38 PM	Bubbler valve closed
8/29/2012	8:21:38 PM	Main Vac valve opened
8/29/2012	8:21:38 PM	Helium MFC set to  0.000000
8/29/2012	8:21:38 PM	H2 MFC set to  0.000000
8/29/2012	8:21:38 PM	BCl3 MFC set to  0.000000
8/29/2012	8:21:38 PM	PH3 MFC set to  0.000000
8/29/2012	8:21:38 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:21:38 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:21:38 PM	Tube furnace set to 0
8/29/2012	8:22:08 PM	H2 valve closed
8/29/2012	8:22:08 PM	BCl3 valve closed
8/29/2012	8:22:08 PM	PH3 valve closed
8/29/2012	8:22:08 PM	SiCl4 pre valve closed
8/29/2012	8:22:08 PM	SiCl4 post valve closed
8/29/2012	8:22:08 PM	Bypass valve closed
8/29/2012	8:22:08 PM	Bubbler valve closed
8/29/2012	8:22:08 PM	Helium valve opened
8/29/2012	8:22:08 PM	Main Vac valve opened
8/29/2012	8:22:08 PM	Helium MFC set to  20.000000
8/29/2012	8:22:08 PM	H2 MFC set to  0.000000
8/29/2012	8:22:08 PM	BCl3 MFC set to  0.000000
8/29/2012	8:22:08 PM	PH3 MFC set to  0.000000
8/29/2012	8:22:08 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:22:08 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:22:09 PM	Tube furnace set to 0
8/29/2012	8:22:39 PM	Helium valve closed
8/29/2012	8:22:39 PM	H2 valve closed
8/29/2012	8:22:39 PM	BCl3 valve closed
8/29/2012	8:22:39 PM	PH3 valve closed
8/29/2012	8:22:39 PM	SiCl4 pre valve closed
8/29/2012	8:22:39 PM	SiCl4 post valve closed
8/29/2012	8:22:39 PM	Bypass valve closed
8/29/2012	8:22:39 PM	Bubbler valve closed
8/29/2012	8:22:39 PM	Main Vac valve opened
8/29/2012	8:22:39 PM	Helium MFC set to  0.000000
8/29/2012	8:22:39 PM	H2 MFC set to  0.000000
8/29/2012	8:22:39 PM	BCl3 MFC set to  0.000000
8/29/2012	8:22:39 PM	PH3 MFC set to  0.000000
8/29/2012	8:22:39 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:22:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:22:39 PM	Tube furnace set to 0
8/29/2012	8:23:09 PM	H2 valve closed
8/29/2012	8:23:09 PM	BCl3 valve closed
8/29/2012	8:23:09 PM	PH3 valve closed
8/29/2012	8:23:09 PM	SiCl4 pre valve closed
8/29/2012	8:23:09 PM	SiCl4 post valve closed
8/29/2012	8:23:09 PM	Bypass valve closed
8/29/2012	8:23:09 PM	Bubbler valve closed
8/29/2012	8:23:09 PM	Helium valve opened
8/29/2012	8:23:09 PM	Main Vac valve opened
8/29/2012	8:23:09 PM	Helium MFC set to  20.000000
8/29/2012	8:23:09 PM	H2 MFC set to  0.000000
8/29/2012	8:23:09 PM	BCl3 MFC set to  0.000000
8/29/2012	8:23:09 PM	PH3 MFC set to  0.000000
8/29/2012	8:23:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:23:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:23:09 PM	Tube furnace set to 0
8/29/2012	8:23:39 PM	Helium valve closed
8/29/2012	8:23:39 PM	H2 valve closed
8/29/2012	8:23:39 PM	BCl3 valve closed
8/29/2012	8:23:39 PM	PH3 valve closed
8/29/2012	8:23:39 PM	SiCl4 pre valve closed
8/29/2012	8:23:39 PM	SiCl4 post valve closed
8/29/2012	8:23:39 PM	Bypass valve closed
8/29/2012	8:23:39 PM	Bubbler valve closed
8/29/2012	8:23:39 PM	Main Vac valve opened
8/29/2012	8:23:39 PM	Helium MFC set to  0.000000
8/29/2012	8:23:39 PM	H2 MFC set to  0.000000
8/29/2012	8:23:39 PM	BCl3 MFC set to  0.000000
8/29/2012	8:23:39 PM	PH3 MFC set to  0.000000
8/29/2012	8:23:39 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:23:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:23:39 PM	Tube furnace set to 0
8/29/2012	8:24:09 PM	H2 valve closed
8/29/2012	8:24:09 PM	BCl3 valve closed
8/29/2012	8:24:09 PM	PH3 valve closed
8/29/2012	8:24:09 PM	SiCl4 pre valve closed
8/29/2012	8:24:09 PM	SiCl4 post valve closed
8/29/2012	8:24:09 PM	Bypass valve closed
8/29/2012	8:24:09 PM	Bubbler valve closed
8/29/2012	8:24:09 PM	Helium valve opened
8/29/2012	8:24:09 PM	Main Vac valve opened
8/29/2012	8:24:09 PM	Helium MFC set to  20.000000
8/29/2012	8:24:09 PM	H2 MFC set to  0.000000
8/29/2012	8:24:09 PM	BCl3 MFC set to  0.000000
8/29/2012	8:24:09 PM	PH3 MFC set to  0.000000
8/29/2012	8:24:09 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:24:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:24:09 PM	Tube furnace set to 0
8/29/2012	8:24:39 PM	Helium valve closed
8/29/2012	8:24:39 PM	H2 valve closed
8/29/2012	8:24:39 PM	BCl3 valve closed
8/29/2012	8:24:39 PM	PH3 valve closed
8/29/2012	8:24:39 PM	SiCl4 pre valve closed
8/29/2012	8:24:39 PM	SiCl4 post valve closed
8/29/2012	8:24:39 PM	Bypass valve closed
8/29/2012	8:24:40 PM	Bubbler valve closed
8/29/2012	8:24:40 PM	Main Vac valve opened
8/29/2012	8:24:40 PM	Helium MFC set to  0.000000
8/29/2012	8:24:40 PM	H2 MFC set to  0.000000
8/29/2012	8:24:40 PM	BCl3 MFC set to  0.000000
8/29/2012	8:24:40 PM	PH3 MFC set to  0.000000
8/29/2012	8:24:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:24:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:24:40 PM	Tube furnace set to 200
8/29/2012	8:25:10 PM	H2 valve closed
8/29/2012	8:25:10 PM	BCl3 valve closed
8/29/2012	8:25:10 PM	PH3 valve closed
8/29/2012	8:25:10 PM	SiCl4 pre valve closed
8/29/2012	8:25:10 PM	SiCl4 post valve closed
8/29/2012	8:25:10 PM	Bypass valve closed
8/29/2012	8:25:10 PM	Bubbler valve closed
8/29/2012	8:25:10 PM	Helium valve opened
8/29/2012	8:25:10 PM	Main Vac valve opened
8/29/2012	8:25:10 PM	Helium MFC set to  20.000000
8/29/2012	8:25:10 PM	H2 MFC set to  0.000000
8/29/2012	8:25:10 PM	BCl3 MFC set to  0.000000
8/29/2012	8:25:10 PM	PH3 MFC set to  0.000000
8/29/2012	8:25:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:25:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:25:10 PM	Tube furnace set to 200
8/29/2012	8:25:40 PM	Helium valve closed
8/29/2012	8:25:40 PM	H2 valve closed
8/29/2012	8:25:40 PM	BCl3 valve closed
8/29/2012	8:25:40 PM	PH3 valve closed
8/29/2012	8:25:40 PM	SiCl4 pre valve closed
8/29/2012	8:25:40 PM	SiCl4 post valve closed
8/29/2012	8:25:40 PM	Bypass valve closed
8/29/2012	8:25:40 PM	Bubbler valve closed
8/29/2012	8:25:40 PM	Main Vac valve opened
8/29/2012	8:25:40 PM	Helium MFC set to  0.000000
8/29/2012	8:25:40 PM	H2 MFC set to  0.000000
8/29/2012	8:25:40 PM	BCl3 MFC set to  0.000000
8/29/2012	8:25:40 PM	PH3 MFC set to  0.000000
8/29/2012	8:25:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:25:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:25:40 PM	Tube furnace set to 200
8/29/2012	8:26:10 PM	H2 valve closed
8/29/2012	8:26:10 PM	BCl3 valve closed
8/29/2012	8:26:10 PM	PH3 valve closed
8/29/2012	8:26:10 PM	SiCl4 pre valve closed
8/29/2012	8:26:10 PM	SiCl4 post valve closed
8/29/2012	8:26:10 PM	Bypass valve closed
8/29/2012	8:26:10 PM	Bubbler valve closed
8/29/2012	8:26:10 PM	Helium valve opened
8/29/2012	8:26:10 PM	Main Vac valve opened
8/29/2012	8:26:10 PM	Helium MFC set to  20.000000
8/29/2012	8:26:10 PM	H2 MFC set to  0.000000
8/29/2012	8:26:10 PM	BCl3 MFC set to  0.000000
8/29/2012	8:26:10 PM	PH3 MFC set to  0.000000
8/29/2012	8:26:10 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:26:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:26:10 PM	Tube furnace set to 200
8/29/2012	8:26:40 PM	Helium valve closed
8/29/2012	8:26:40 PM	H2 valve closed
8/29/2012	8:26:40 PM	BCl3 valve closed
8/29/2012	8:26:40 PM	PH3 valve closed
8/29/2012	8:26:40 PM	SiCl4 pre valve closed
8/29/2012	8:26:40 PM	SiCl4 post valve closed
8/29/2012	8:26:40 PM	Bypass valve closed
8/29/2012	8:26:40 PM	Bubbler valve closed
8/29/2012	8:26:40 PM	Main Vac valve opened
8/29/2012	8:26:40 PM	Helium MFC set to  0.000000
8/29/2012	8:26:40 PM	H2 MFC set to  0.000000
8/29/2012	8:26:40 PM	BCl3 MFC set to  0.000000
8/29/2012	8:26:40 PM	PH3 MFC set to  0.000000
8/29/2012	8:26:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:26:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:26:41 PM	Tube furnace set to 200
8/29/2012	8:27:11 PM	H2 valve closed
8/29/2012	8:27:11 PM	BCl3 valve closed
8/29/2012	8:27:11 PM	PH3 valve closed
8/29/2012	8:27:11 PM	SiCl4 pre valve closed
8/29/2012	8:27:11 PM	SiCl4 post valve closed
8/29/2012	8:27:11 PM	Bypass valve closed
8/29/2012	8:27:11 PM	Bubbler valve closed
8/29/2012	8:27:11 PM	Helium valve opened
8/29/2012	8:27:11 PM	Main Vac valve opened
8/29/2012	8:27:11 PM	Helium MFC set to  20.000000
8/29/2012	8:27:11 PM	H2 MFC set to  0.000000
8/29/2012	8:27:11 PM	BCl3 MFC set to  0.000000
8/29/2012	8:27:11 PM	PH3 MFC set to  0.000000
8/29/2012	8:27:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:27:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:27:11 PM	Tube furnace set to 200
8/29/2012	8:27:41 PM	Helium valve closed
8/29/2012	8:27:41 PM	H2 valve closed
8/29/2012	8:27:41 PM	BCl3 valve closed
8/29/2012	8:27:41 PM	PH3 valve closed
8/29/2012	8:27:41 PM	SiCl4 pre valve closed
8/29/2012	8:27:41 PM	SiCl4 post valve closed
8/29/2012	8:27:41 PM	Bypass valve closed
8/29/2012	8:27:41 PM	Bubbler valve closed
8/29/2012	8:27:41 PM	Main Vac valve opened
8/29/2012	8:27:41 PM	Helium MFC set to  0.000000
8/29/2012	8:27:41 PM	H2 MFC set to  0.000000
8/29/2012	8:27:41 PM	BCl3 MFC set to  0.000000
8/29/2012	8:27:41 PM	PH3 MFC set to  0.000000
8/29/2012	8:27:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:27:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:27:41 PM	Tube furnace set to 200
8/29/2012	8:28:11 PM	H2 valve closed
8/29/2012	8:28:11 PM	BCl3 valve closed
8/29/2012	8:28:11 PM	PH3 valve closed
8/29/2012	8:28:11 PM	SiCl4 pre valve closed
8/29/2012	8:28:11 PM	SiCl4 post valve closed
8/29/2012	8:28:11 PM	Bypass valve closed
8/29/2012	8:28:11 PM	Bubbler valve closed
8/29/2012	8:28:11 PM	Helium valve opened
8/29/2012	8:28:11 PM	Main Vac valve opened
8/29/2012	8:28:11 PM	Helium MFC set to  20.000000
8/29/2012	8:28:11 PM	H2 MFC set to  0.000000
8/29/2012	8:28:11 PM	BCl3 MFC set to  0.000000
8/29/2012	8:28:11 PM	PH3 MFC set to  0.000000
8/29/2012	8:28:11 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:28:11 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:28:11 PM	Tube furnace set to 200
8/29/2012	8:28:41 PM	Helium valve closed
8/29/2012	8:28:41 PM	H2 valve closed
8/29/2012	8:28:41 PM	BCl3 valve closed
8/29/2012	8:28:41 PM	PH3 valve closed
8/29/2012	8:28:41 PM	SiCl4 pre valve closed
8/29/2012	8:28:41 PM	SiCl4 post valve closed
8/29/2012	8:28:41 PM	Bypass valve closed
8/29/2012	8:28:41 PM	Bubbler valve closed
8/29/2012	8:28:41 PM	Main Vac valve opened
8/29/2012	8:28:41 PM	Helium MFC set to  0.000000
8/29/2012	8:28:41 PM	H2 MFC set to  0.000000
8/29/2012	8:28:41 PM	BCl3 MFC set to  0.000000
8/29/2012	8:28:41 PM	PH3 MFC set to  0.000000
8/29/2012	8:28:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:28:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:28:42 PM	Tube furnace set to 200
8/29/2012	8:29:12 PM	H2 valve closed
8/29/2012	8:29:12 PM	BCl3 valve closed
8/29/2012	8:29:12 PM	PH3 valve closed
8/29/2012	8:29:12 PM	SiCl4 pre valve closed
8/29/2012	8:29:12 PM	SiCl4 post valve closed
8/29/2012	8:29:12 PM	Bypass valve closed
8/29/2012	8:29:12 PM	Bubbler valve closed
8/29/2012	8:29:12 PM	Helium valve opened
8/29/2012	8:29:12 PM	Main Vac valve opened
8/29/2012	8:29:12 PM	Helium MFC set to  20.000000
8/29/2012	8:29:12 PM	H2 MFC set to  0.000000
8/29/2012	8:29:12 PM	BCl3 MFC set to  0.000000
8/29/2012	8:29:12 PM	PH3 MFC set to  0.000000
8/29/2012	8:29:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:29:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:29:12 PM	Tube furnace set to 200
8/29/2012	8:29:42 PM	Helium valve closed
8/29/2012	8:29:42 PM	H2 valve closed
8/29/2012	8:29:42 PM	BCl3 valve closed
8/29/2012	8:29:42 PM	PH3 valve closed
8/29/2012	8:29:42 PM	SiCl4 pre valve closed
8/29/2012	8:29:42 PM	SiCl4 post valve closed
8/29/2012	8:29:42 PM	Bypass valve closed
8/29/2012	8:29:42 PM	Bubbler valve closed
8/29/2012	8:29:42 PM	Main Vac valve opened
8/29/2012	8:29:42 PM	Helium MFC set to  0.000000
8/29/2012	8:29:42 PM	H2 MFC set to  0.000000
8/29/2012	8:29:42 PM	BCl3 MFC set to  0.000000
8/29/2012	8:29:42 PM	PH3 MFC set to  0.000000
8/29/2012	8:29:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:29:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:29:42 PM	Tube furnace set to 200
8/29/2012	8:30:12 PM	H2 valve closed
8/29/2012	8:30:12 PM	BCl3 valve closed
8/29/2012	8:30:12 PM	PH3 valve closed
8/29/2012	8:30:12 PM	SiCl4 pre valve closed
8/29/2012	8:30:12 PM	SiCl4 post valve closed
8/29/2012	8:30:12 PM	Bypass valve closed
8/29/2012	8:30:12 PM	Bubbler valve closed
8/29/2012	8:30:12 PM	Helium valve opened
8/29/2012	8:30:12 PM	Main Vac valve opened
8/29/2012	8:30:12 PM	Helium MFC set to  20.000000
8/29/2012	8:30:12 PM	H2 MFC set to  0.000000
8/29/2012	8:30:12 PM	BCl3 MFC set to  0.000000
8/29/2012	8:30:12 PM	PH3 MFC set to  0.000000
8/29/2012	8:30:12 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:30:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:30:12 PM	Tube furnace set to 200
8/29/2012	8:30:42 PM	Helium valve closed
8/29/2012	8:30:42 PM	H2 valve closed
8/29/2012	8:30:42 PM	BCl3 valve closed
8/29/2012	8:30:42 PM	PH3 valve closed
8/29/2012	8:30:42 PM	SiCl4 pre valve closed
8/29/2012	8:30:42 PM	SiCl4 post valve closed
8/29/2012	8:30:42 PM	Bypass valve closed
8/29/2012	8:30:42 PM	Bubbler valve closed
8/29/2012	8:30:42 PM	Main Vac valve opened
8/29/2012	8:30:42 PM	Helium MFC set to  0.000000
8/29/2012	8:30:42 PM	H2 MFC set to  0.000000
8/29/2012	8:30:42 PM	BCl3 MFC set to  0.000000
8/29/2012	8:30:42 PM	PH3 MFC set to  0.000000
8/29/2012	8:30:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:30:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:30:43 PM	Tube furnace set to 0
8/29/2012	8:30:44 PM	Run finished at 8:30 PM
8/29/2012	8:34:47 PM	Main Vac valve closed
8/29/2012	8:35:07 PM	Main Vac valve opened
8/29/2012	8:36:25 PM	Recipe started at 8:36 PM
8/29/2012	8:36:25 PM	Helium valve closed
8/29/2012	8:36:25 PM	H2 valve closed
8/29/2012	8:36:25 PM	BCl3 valve closed
8/29/2012	8:36:25 PM	PH3 valve closed
8/29/2012	8:36:25 PM	SiCl4 pre valve closed
8/29/2012	8:36:25 PM	SiCl4 post valve closed
8/29/2012	8:36:25 PM	Main Vac valve closed
8/29/2012	8:36:25 PM	Bypass valve closed
8/29/2012	8:36:25 PM	Bubbler valve closed
8/29/2012	8:36:25 PM	Helium MFC set to  0.000000
8/29/2012	8:36:25 PM	H2 MFC set to  0.000000
8/29/2012	8:36:25 PM	BCl3 MFC set to  0.000000
8/29/2012	8:36:25 PM	PH3 MFC set to  0.000000
8/29/2012	8:36:25 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:36:25 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:36:26 PM	Tube furnace set to 0
8/29/2012	8:36:29 PM	Helium valve closed
8/29/2012	8:36:29 PM	BCl3 valve closed
8/29/2012	8:36:29 PM	PH3 valve closed
8/29/2012	8:36:29 PM	SiCl4 pre valve closed
8/29/2012	8:36:29 PM	SiCl4 post valve closed
8/29/2012	8:36:29 PM	Main Vac valve closed
8/29/2012	8:36:29 PM	Bypass valve closed
8/29/2012	8:36:29 PM	Bubbler valve closed
8/29/2012	8:36:29 PM	H2 valve opened
8/29/2012	8:36:29 PM	Helium MFC set to  0.000000
8/29/2012	8:36:29 PM	H2 MFC set to  500.000000
8/29/2012	8:36:29 PM	BCl3 MFC set to  0.000000
8/29/2012	8:36:29 PM	PH3 MFC set to  0.000000
8/29/2012	8:36:29 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:36:29 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:36:29 PM	Tube furnace set to 0
8/29/2012	8:37:40 PM	Helium valve closed
8/29/2012	8:37:40 PM	BCl3 valve closed
8/29/2012	8:37:40 PM	PH3 valve closed
8/29/2012	8:37:40 PM	SiCl4 pre valve closed
8/29/2012	8:37:40 PM	SiCl4 post valve closed
8/29/2012	8:37:40 PM	Main Vac valve closed
8/29/2012	8:37:40 PM	Bypass valve closed
8/29/2012	8:37:40 PM	H2 valve opened
8/29/2012	8:37:40 PM	Bubbler valve opened
8/29/2012	8:37:40 PM	Helium MFC set to  0.000000
8/29/2012	8:37:40 PM	H2 MFC set to  500.000000
8/29/2012	8:37:40 PM	BCl3 MFC set to  0.000000
8/29/2012	8:37:40 PM	PH3 MFC set to  0.000000
8/29/2012	8:37:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:37:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:37:40 PM	Tube furnace set to 0
8/29/2012	8:37:41 PM	Helium valve closed
8/29/2012	8:37:41 PM	BCl3 valve closed
8/29/2012	8:37:41 PM	PH3 valve closed
8/29/2012	8:37:41 PM	SiCl4 pre valve closed
8/29/2012	8:37:41 PM	SiCl4 post valve closed
8/29/2012	8:37:41 PM	Main Vac valve closed
8/29/2012	8:37:41 PM	Bypass valve closed
8/29/2012	8:37:41 PM	H2 valve opened
8/29/2012	8:37:41 PM	Bubbler valve opened
8/29/2012	8:37:41 PM	Helium MFC set to  0.000000
8/29/2012	8:37:41 PM	H2 MFC set to  500.000000
8/29/2012	8:37:41 PM	BCl3 MFC set to  0.000000
8/29/2012	8:37:41 PM	PH3 MFC set to  0.000000
8/29/2012	8:37:41 PM	SiCl4 MFC set to  0.000000
8/29/2012	8:37:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:37:42 PM	Tube furnace set to 1000
8/29/2012	8:57:41 PM	Helium valve closed
8/29/2012	8:57:41 PM	PH3 valve closed
8/29/2012	8:57:41 PM	Main Vac valve closed
8/29/2012	8:57:41 PM	Bypass valve closed
8/29/2012	8:57:41 PM	H2 valve opened
8/29/2012	8:57:41 PM	BCl3 valve opened
8/29/2012	8:57:42 PM	SiCl4 pre valve opened
8/29/2012	8:57:42 PM	SiCl4 post valve opened
8/29/2012	8:57:42 PM	Bubbler valve opened
8/29/2012	8:57:42 PM	Helium MFC set to  0.000000
8/29/2012	8:57:42 PM	H2 MFC set to  450.000000
8/29/2012	8:57:42 PM	BCl3 MFC set to  1.500000
8/29/2012	8:57:42 PM	PH3 MFC set to  0.000000
8/29/2012	8:57:42 PM	SiCl4 MFC set to  50.000000
8/29/2012	8:57:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	8:57:42 PM	Tube furnace set to 1000
8/29/2012	9:07:42 PM	Helium valve closed
8/29/2012	9:07:42 PM	BCl3 valve closed
8/29/2012	9:07:42 PM	PH3 valve closed
8/29/2012	9:07:42 PM	SiCl4 pre valve closed
8/29/2012	9:07:42 PM	SiCl4 post valve closed
8/29/2012	9:07:42 PM	Main Vac valve closed
8/29/2012	9:07:42 PM	Bypass valve closed
8/29/2012	9:07:42 PM	H2 valve opened
8/29/2012	9:07:42 PM	Bubbler valve opened
8/29/2012	9:07:42 PM	Helium MFC set to  0.000000
8/29/2012	9:07:42 PM	H2 MFC set to  500.000000
8/29/2012	9:07:42 PM	BCl3 MFC set to  0.000000
8/29/2012	9:07:42 PM	PH3 MFC set to  0.000000
8/29/2012	9:07:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:07:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:07:42 PM	Tube furnace set to 950
8/29/2012	9:09:42 PM	Helium valve closed
8/29/2012	9:09:42 PM	BCl3 valve closed
8/29/2012	9:09:42 PM	PH3 valve closed
8/29/2012	9:09:42 PM	SiCl4 pre valve closed
8/29/2012	9:09:42 PM	SiCl4 post valve closed
8/29/2012	9:09:42 PM	Main Vac valve closed
8/29/2012	9:09:42 PM	Bypass valve closed
8/29/2012	9:09:42 PM	H2 valve opened
8/29/2012	9:09:42 PM	Bubbler valve opened
8/29/2012	9:09:42 PM	Helium MFC set to  0.000000
8/29/2012	9:09:42 PM	H2 MFC set to  500.000000
8/29/2012	9:09:42 PM	BCl3 MFC set to  0.000000
8/29/2012	9:09:42 PM	PH3 MFC set to  0.000000
8/29/2012	9:09:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:09:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:09:42 PM	Tube furnace set to 900
8/29/2012	9:11:42 PM	Helium valve closed
8/29/2012	9:11:42 PM	BCl3 valve closed
8/29/2012	9:11:42 PM	PH3 valve closed
8/29/2012	9:11:42 PM	SiCl4 pre valve closed
8/29/2012	9:11:42 PM	SiCl4 post valve closed
8/29/2012	9:11:42 PM	Main Vac valve closed
8/29/2012	9:11:42 PM	Bypass valve closed
8/29/2012	9:11:42 PM	H2 valve opened
8/29/2012	9:11:42 PM	Bubbler valve opened
8/29/2012	9:11:42 PM	Helium MFC set to  0.000000
8/29/2012	9:11:42 PM	H2 MFC set to  500.000000
8/29/2012	9:11:42 PM	BCl3 MFC set to  0.000000
8/29/2012	9:11:42 PM	PH3 MFC set to  0.000000
8/29/2012	9:11:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:11:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:11:42 PM	Tube furnace set to 850
8/29/2012	9:13:42 PM	H2 valve closed
8/29/2012	9:13:42 PM	BCl3 valve closed
8/29/2012	9:13:42 PM	PH3 valve closed
8/29/2012	9:13:42 PM	SiCl4 pre valve closed
8/29/2012	9:13:42 PM	SiCl4 post valve closed
8/29/2012	9:13:42 PM	Main Vac valve closed
8/29/2012	9:13:42 PM	Bypass valve closed
8/29/2012	9:13:42 PM	Helium valve opened
8/29/2012	9:13:42 PM	Bubbler valve opened
8/29/2012	9:13:42 PM	Helium MFC set to  500.000000
8/29/2012	9:13:42 PM	H2 MFC set to  0.000000
8/29/2012	9:13:42 PM	BCl3 MFC set to  0.000000
8/29/2012	9:13:42 PM	PH3 MFC set to  0.000000
8/29/2012	9:13:42 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:13:42 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:13:43 PM	Tube furnace set to 800
8/29/2012	9:15:43 PM	H2 valve closed
8/29/2012	9:15:43 PM	BCl3 valve closed
8/29/2012	9:15:43 PM	PH3 valve closed
8/29/2012	9:15:43 PM	SiCl4 pre valve closed
8/29/2012	9:15:43 PM	SiCl4 post valve closed
8/29/2012	9:15:43 PM	Main Vac valve closed
8/29/2012	9:15:43 PM	Bypass valve closed
8/29/2012	9:15:43 PM	Helium valve opened
8/29/2012	9:15:43 PM	Bubbler valve opened
8/29/2012	9:15:43 PM	Helium MFC set to  500.000000
8/29/2012	9:15:43 PM	H2 MFC set to  0.000000
8/29/2012	9:15:43 PM	BCl3 MFC set to  0.000000
8/29/2012	9:15:43 PM	PH3 MFC set to  0.000000
8/29/2012	9:15:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:15:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:15:43 PM	Tube furnace set to 750
8/29/2012	9:17:43 PM	H2 valve closed
8/29/2012	9:17:43 PM	BCl3 valve closed
8/29/2012	9:17:43 PM	PH3 valve closed
8/29/2012	9:17:43 PM	SiCl4 pre valve closed
8/29/2012	9:17:43 PM	SiCl4 post valve closed
8/29/2012	9:17:43 PM	Main Vac valve closed
8/29/2012	9:17:43 PM	Bypass valve closed
8/29/2012	9:17:43 PM	Helium valve opened
8/29/2012	9:17:43 PM	Bubbler valve opened
8/29/2012	9:17:43 PM	Helium MFC set to  500.000000
8/29/2012	9:17:43 PM	H2 MFC set to  0.000000
8/29/2012	9:17:43 PM	BCl3 MFC set to  0.000000
8/29/2012	9:17:43 PM	PH3 MFC set to  0.000000
8/29/2012	9:17:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:17:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:17:43 PM	Tube furnace set to 0
8/29/2012	9:37:43 PM	Helium valve closed
8/29/2012	9:37:43 PM	H2 valve closed
8/29/2012	9:37:43 PM	BCl3 valve closed
8/29/2012	9:37:43 PM	PH3 valve closed
8/29/2012	9:37:43 PM	SiCl4 pre valve closed
8/29/2012	9:37:43 PM	SiCl4 post valve closed
8/29/2012	9:37:43 PM	Main Vac valve closed
8/29/2012	9:37:43 PM	Bypass valve closed
8/29/2012	9:37:43 PM	Bubbler valve closed
8/29/2012	9:37:43 PM	Helium MFC set to  0.000000
8/29/2012	9:37:43 PM	H2 MFC set to  0.000000
8/29/2012	9:37:43 PM	BCl3 MFC set to  0.000000
8/29/2012	9:37:43 PM	PH3 MFC set to  0.000000
8/29/2012	9:37:43 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:37:43 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:37:43 PM	Tube furnace set to 0
8/29/2012	9:37:44 PM	Helium valve closed
8/29/2012	9:37:44 PM	H2 valve closed
8/29/2012	9:37:44 PM	BCl3 valve closed
8/29/2012	9:37:44 PM	PH3 valve closed
8/29/2012	9:37:44 PM	SiCl4 pre valve closed
8/29/2012	9:37:44 PM	SiCl4 post valve closed
8/29/2012	9:37:44 PM	Main Vac valve closed
8/29/2012	9:37:44 PM	Bubbler valve closed
8/29/2012	9:37:44 PM	Bypass valve opened
8/29/2012	9:37:44 PM	Helium MFC set to  0.000000
8/29/2012	9:37:44 PM	H2 MFC set to  0.000000
8/29/2012	9:37:44 PM	BCl3 MFC set to  0.000000
8/29/2012	9:37:44 PM	PH3 MFC set to  0.000000
8/29/2012	9:37:44 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:37:44 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:37:45 PM	Tube furnace set to 0
8/29/2012	9:38:40 PM	Helium valve closed
8/29/2012	9:38:40 PM	H2 valve closed
8/29/2012	9:38:40 PM	BCl3 valve closed
8/29/2012	9:38:40 PM	PH3 valve closed
8/29/2012	9:38:40 PM	SiCl4 pre valve closed
8/29/2012	9:38:40 PM	SiCl4 post valve closed
8/29/2012	9:38:40 PM	Main Vac valve closed
8/29/2012	9:38:40 PM	Bubbler valve closed
8/29/2012	9:38:40 PM	Bypass valve opened
8/29/2012	9:38:40 PM	Helium MFC set to  0.000000
8/29/2012	9:38:40 PM	H2 MFC set to  0.000000
8/29/2012	9:38:40 PM	BCl3 MFC set to  0.000000
8/29/2012	9:38:40 PM	PH3 MFC set to  0.000000
8/29/2012	9:38:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:38:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:38:40 PM	Tube furnace set to 0
8/29/2012	9:39:40 PM	Helium valve closed
8/29/2012	9:39:40 PM	H2 valve closed
8/29/2012	9:39:40 PM	BCl3 valve closed
8/29/2012	9:39:40 PM	PH3 valve closed
8/29/2012	9:39:40 PM	SiCl4 pre valve closed
8/29/2012	9:39:40 PM	SiCl4 post valve closed
8/29/2012	9:39:40 PM	Bypass valve closed
8/29/2012	9:39:40 PM	Bubbler valve closed
8/29/2012	9:39:40 PM	Main Vac valve opened
8/29/2012	9:39:40 PM	Helium MFC set to  0.000000
8/29/2012	9:39:40 PM	H2 MFC set to  0.000000
8/29/2012	9:39:40 PM	BCl3 MFC set to  0.000000
8/29/2012	9:39:40 PM	PH3 MFC set to  0.000000
8/29/2012	9:39:40 PM	SiCl4 MFC set to  0.000000
8/29/2012	9:39:40 PM	Bypass solenoid MFC set to  0.000000
8/29/2012	9:39:41 PM	Tube furnace set to 0
8/29/2012	9:39:42 PM	Run finished at 9:39 PM
